A Study on Properties of Hydrogenated a-C and a-CN thin films Prepared by Plasma Chemical Vapor Deposition (PCVD법에 의한 a-C:H 및 a-CN:H 박막의 특성 평가에 관한 연구)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2011.05a
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- pp.110-111
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- 2011