• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.8
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• pp.543-548
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• 2003

In this paper, we have proposed and fabricated a two-axis rotational micro-mirror with large tilt angle. Such a micro-mirror is a key element for N$\times$N high capacity optical cross-connect switches. The micro-mirror is required to have large tilt angle to increase the capacity of the cross-connect switches. For larger micro-mirror tilt angle between the grounded mirror plate and the bottom electrode is to be large enough to provide space for the tilting of the mirror. For our proposed structure, the gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates by using the bulk micromachining technology, and combined later by employing self-align technique. As a result, a large tilt angle has been achieved without using additional actuators. The measured tilt angles were as large as $\pm$5.5$^{\circ}$ and $\pm$8.4$^{\circ}$ in the x and y direction respectively, and the pull-in voltages for the two directions were 380 V and 275 V respectively. Finally the fabricated mirror was successfully utilized to steer the optical beam. To our knowledge, our micro-mirror has the best performance among the micro-mirrors reported internationally so far.

• Proceedings of the Optical Society of Korea Conference
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• 1998.08a
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• pp.92-93
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• 1998

폴리 실리톤으로 제작된 마이크로 미러의 표면에서 반사되는 스펙클을 이용하여 홀 로그램을 기록하였다. 마이크로 미러에서 반사되는 스펙클 패턴은 다중모드 광섬유에서 관 측할 수 있는 스펙클과 거의 비슷한 형태로 보이며 이를 이용하여 홀로그램의 기록밀도를 향상시킬수 있음을 보였다.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.1
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• pp.29-34
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• 2000

In this paper, the damping characteristics for electrostatically driven micro mirror which have deep grooves on their driving electrodes were investigated. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The damping farce is caused by squeeze action of the gas film between a moving mirror plate and the electrodes. The grooves decrease the damping force and enable the moving plate to be driven at high speed and low driving voltage.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1530-1531
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• 2007

본 논문은 미러 표면에 형성된 코일과 미러 양쪽에 위치한 영구자석간의 전자기력에 의해 구동되는 마이크로미러의 설계 및 결과를 나타낸다. $4mm\;{\times}\;4mm$ 크기를 갖는 미러의 전자기 특성 및 구동을 유한요소해석 프로그램인 COMSOL Multiphysics를 이용하여 시뮬레이션 하였다. 4 kHz의 공진주파수 특성을 갖도록 설계된 마이크로미러는 코일에 $3.6\;A/mm^2$의 current density 적용 시 x-, y-axis displacement가 각각 $1.2{\mu}m$, $12{\mu}m$가 되는 것으로 나타났다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.2
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• pp.46-54
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• 2007

We have fabricated and characterized MMI (Multimode Interference) coupled ring resonator with the total internal reflection mirrors and the semiconductor optical amplifier for the integration of the WDM (Wavelength Division Multiplexing) system. The TIR (Total Internal Reflection) mirrors were fabricated by self-aligned process and had losses of about 0.71 dB per mirror. Coupling in and out of a resonator was achieved using the extremely small MMI couplers. The MMI length and width used in the experiment were $119{\mu}m$ and $9{\mu}m$, respectively. The resulting FSR (Free Spectral Range) and on-off ratio were approximately 1.333 nm (162 GHz) and 13 dB, respectively.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1151-1153
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• 1999

3-layer polysilicon 표면미세가공공정을 이용하여 micro zone plate 렌즈와 미러 및 이를 구동하기 위한 구동기를 일체화시킨 마이크로 구동형 광학소자를 설계, 제작하였다. 650nm의 파장대역에서 초점거리가 $500{\mu}m$가 되도록 마이크로 zone plate 렌즈를 설계하였으며, 렌즈의 광학축은 실리콘 기판 상에서 $121{\mu}m$거리에 위치하도록 제작하였다. 마이크로 hinge와 스프링 latch 및 측면지지 plate를 이용하여 마이크로 렌즈와 미러가 실리콘 기판상에서 out-of-plane동작이 가능하도록 하였다. 마이크로렌즈 초점거리의 가변을 위하여 6개의 SDA(Scratch Drive Actuator)어레이를 설계, 제작하였다. 또한 빔 반사를 위한 마이크로 미러를 설계하고 $45^{\circ}$ self-assembly를 위하여 마이크로 hinge와 SDA array를 제작하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.371-376
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• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.39-47
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.

• Korean Journal of Optics and Photonics
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• v.17 no.4
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• pp.366-370
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• 2006

An optical microphone incorporating a reflective diaphragm and a fiber-optic head was demonstrated. The diaphragm was made of a micromirror membrane which is suspended by a silicon bar connected to a frame, allowing fer a displacement induced by acoustic waves. A compact, simple optical head was implemented by exploiting a single multimode fiber. For the assembled microphone, the static characteristics were investigated to find the operation point defined as the optimum distance between the head and the diaphragm, and a flat frequency response with a variation of $\sim$2dB for the range of up to 2 kHz was accomplished.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.229.1-229.1
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• 2005