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http://dx.doi.org/10.3807/KJOP.2006.17.4.366

Optical Microphone Based on a Reflective Micromirror Diaphragm  

Song, Ju-Han (Department of Electronic Engineering, Kwangwoon University)
Lee, Sang-Shin (Department of Electronic Engineering, Kwangwoon University)
Publication Information
Korean Journal of Optics and Photonics / v.17, no.4, 2006 , pp. 366-370 More about this Journal
Abstract
An optical microphone incorporating a reflective diaphragm and a fiber-optic head was demonstrated. The diaphragm was made of a micromirror membrane which is suspended by a silicon bar connected to a frame, allowing fer a displacement induced by acoustic waves. A compact, simple optical head was implemented by exploiting a single multimode fiber. For the assembled microphone, the static characteristics were investigated to find the operation point defined as the optimum distance between the head and the diaphragm, and a flat frequency response with a variation of $\sim$2dB for the range of up to 2 kHz was accomplished.
Keywords
Microphone; Micrmirror; Reflective diaphragm; Fiberoptic; Acoustooptic transducer;
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