• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.180-183
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• 2005

본 논문에서는 새로운 형태의 혼합형 5자유도 마이크로 매니퓰레이터를 제안하고 개발하고자 한다. 제안된 기구는 평면형 2자유도 XY-stage와 공간형 3자유도 병렬 기구로 구성된다. 3자유도 병렬기구는 3개의 직렬체인으로 이루어져 있으며, 공간상에서 두 방향의 회전 움직임과 Z축 방향으로의 병진운동을 생성한다. 모의실험을 통하여 개발된 기구의 작업공간과 출력단에서의 정밀도 해석을 수행한다. 개발된 기구는 조작 대상 물체의 미세 위치제어를 필요로 하는 반도체 및 기계, 생물, 의료분야 등에 적용 될 수 있다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.735-736
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.539-540
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• 2006

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.1 s.256
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• pp.62-69
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• 2007

Micromanipulator is a device that manipulates an object with high precision. Generally, a parallel-type robot has inherently higher precision than a serial-type robot. In most cases, the use of flexure hinge mechanisms is the most appropriate approach to micromanipulators. The micromanipulator is basically required that have high natural frequency and sufficient workspace. However, previous designs are hard to satisfy the required workspace and natural frequency, simultaneously, because the previous micromanipulators are coupled designs. Therefore, this paper suggests a new design parameter as displacement amplifier and new design procedure based on semi-coupled design in axiomatic design. As a consequence the spatial 3-DOF micromanipulator which is chosen as an exemplary device has natural frequency of 500Hz and workspace of $-0.5^{\circ}{\sim}0.5^{\circ}$. To investigate the effectiveness of the displacement amplifier, simulation and experiment are performed.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.187-192
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• 2007

In this paper we present a 3-DOF manipulator of which task is to unload the product from a micro factory. The micro factory developed by KITECH presses sheet metal to produce a micro valve that is used for micro pump. Our research is focused on the development of a small-sized unloading manipulator which works in the narrow workspace between the dies. We have implemented pick-and-place task with vacuum pressure and 3-DOF motion with stepping motors. We present the design procedures and analysis required in each module.