• Title/Summary/Keyword: 마이크로파 유전특성

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A Study on Properties of a Near-Field Microwave Microscope Using a Waveguide Resonator (도파관 공진기를 이용한 마이크로파 근접장 현미경의 특성에 관한 연구)

  • Kim, Hyun;Kim, Song-Hui;Kim, Joo-Young;Lee, Kie-Jin
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.1
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    • pp.16-24
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    • 2008

  • Near-field scanning microwave microscope (NSMM) has been used to characterize the electromagnetic properties of samples based on a cavity perturbation technique. We used a NSMM using a waveguide cavity to couple a metallic probe tip as a point like evanescent field emitter. We explained the quality of our NSMM system by applying the cavity perturbation theory. First, to make a shape perturbation, we inserted linear and loop probes in the waveguide resonator. To check up electric and magnetic field distribution inside the waveguide resonator by shape perturbation, we confirmed the field distribution by using a HFSS simulation. Second, to make material perturbation, we located a dielectric sample in front of the probe tip and measured reflection coefficient $(S_{11})$. We found that the resonance frequency$(f_r)$ was changed linearly as the dielectric constant of resonator$({\varepsilon}_r)$ increased when ${\Delta}{\varepsilon}\;and\;{\Delta}{\mu}$ were small.

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