• Journal of the Microelectronics and Packaging Society
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• v.16 no.2
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• pp.33-42
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• 2009

A polymer-based flexible neural probe was fabricated for monitoring of neural activities from a brain. To improve the insertion stiffness, a 5 ${\mu}m$ thick biocompatible Au layer was electroplated between the top and bottom polymer layers. The developed neural probe penetrated a gel whose elastic modulus is similar to that of a live brain tissue without any fracture, To minimize mechanical residual stress and bending from the probe, two new methods were employed: (1) use of a thermal annealing process after completing the device and (2) incorporation of multiple different layers to compensate the residual stress between top and bottom layers. Mechanical bending around the probe tip was clearly removed after employing the two processes. In electrical test, the developed probe showed a proper impedance value to record neural signals from a brain and the result remained the same for 72 hours. In simple in-vitro probe characterization, the probe showed a great removal of residual stress and an excellent recording performance. The in-vitro recording results did not change even after 1 week, suggesting that this electrode has the potential for great recording from neuron firing and long-term implant performance.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.2
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• pp.99-105
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• 2022

As the chip size gets smaller, the width of the electrode line is also fine, and the density of interconnections is increasing. As a result, RC delay is becoming a problem due to the difference in resistance between the capacitor layer and the electrical conductivity layer. To solve this problem, the development of electrodes with high electrical conductivity and dielectric materials with low dielectric constant is required. In this study, we developed low dielectric ink by mixing commercial PSR which protect PCB's circuits from external factors and PI with excellent thermal property and low-k characteristics. As a result, the ink mixture of PSR and PI 10:3 showed the best results, with a dielectric constant of about 2.6 and 2.37 at 20 GHz and 28 GHz, respectively, and dielectric dissipation was measured at about 0.022 and 0.016. In order to verify the applicability of future applications, various line-width transmission lines produced on Teflon were evaluated, and as a result, the loss of transmission lines using low dielectric ink mixed with PI was 0.12 dB less on average in S21 than when only PSR was used.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.3
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• pp.25-29
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• 2022

Recently, the importance of electronic packaging technology has been attracting attention, and heterogeneous integration technology in which chips are stacked out-of-plane direction is being applied to the electronic packaging field. The 2.5D integration circuit is a technology for stacking chips using an interposer including TSV, and is widely used already. Therefore, it is necessary to make the interposer mechanically reliable in the packaging process that undergoes various thermal processes and mechanical loadings. Considering the structural characteristics of the interposer on which several thin films are deposited, thermal stress due to the difference in thermal expansion coefficients of materials can have a great effect on reliability. In this study, the mechanical reliability of the metal pad for wire bonding on the silicon interposer against thermal stress was evaluated. After heating the interposer to the solder reflow temperature, the delamination of the metal pad that occurred during cooling was observed and the mechanism was investigated. In addition, it was confirmed that the high cooling rate and the defect caused by handling promote delamination of the metal pads.

• Journal of the Microelectronics and Packaging Society
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• v.30 no.1
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• pp.71-78
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• 2023

The possibility of improving plating thickness distribution was investigated through quantitative consideration of bipolar electrodes without external power applied. By having the cathode tilted with respect to the anode, the potential distribution in the electrolyte solution adjacent to the cathode is different due to the difference in iR drop due to the path difference to the anode in each region of the cathode. The purpose of this study is to observe the bipolar characteristics in the case of an auxiliary anode for the non-uniform potential distribution of such a Hull cell. In particular, in order to evaluate the possibility of improving the non-uniform thickness distribution of the cathode by utilizing these bipolar characteristics, it was verified through experiments and simulations, and the electric potential and current density distribution around the bipolar electrode were analyzed. The electroplating in a Hull cell was performed for 75 min at a current density of 10 mA/cm², and the average thickness is about 16 ㎛. The standard deviation of the thickness was 10 ㎛ in the normal Hull cell without using the auxiliary anode, whereas it was 3.5 ㎛ in the case of using the auxiliary cathode. Simulation calculations also showed 8.9 ㎛ and 3.3 ㎛ for each condition, and it was found that the consistency between the experimental and simulation results was relatively high, and the thickness distribution could be improved through using the auxiliary anode by the bipolar phenomenon.

• Journal of the Microelectronics and Packaging Society
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• v.30 no.3
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• pp.94-101
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• 2023

Zinc oxide(ZnO) is a semiconductor material with a bandgap of 3.37 eV and an exciton binding energy of 60 meV for various applications. Recently ZnO has been proven to enhance its electrical properties for utilization as an alternative for transparent conducting oxide (TCO) materials. In this study, cation(Al, Ga)-anion(F) single and double doped ZnO thin films were grown by atomic layer deposition (ALD) to enhance the electrical properties. The structural and optical properties of doped ZnO thin films were analyzed, and doping effects were confirmed to electrical characteristics. In single doped ZnO, it was observed that the carrier concentration was increased after doping, acting as a donor to ZnO. Among the single doping elements, F doped ZnO(FZO) showed the highest mobility and conductivity due to the passivation effect of oxygen vacancies. In the case of double doping, higher electrical characteristics were observed compared to single doping. Among the samples, Al-F doped ZnO(AFZO) exhibited the lowest resistance value. This results can be attributed to an increase in delocalized electron states and a decrease in lattice distortion resulting from the differences in ionic radius. The partial density of states(PDOS) was also analyzed and observed to be consistent with the experimental results.

• Polymer(Korea)
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• v.36 no.6
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• pp.739-744
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• 2012

In this work, we prepared the carbons from synthesized styrene-acrylonitrile carbon precursor. The prepared carbons were chemically activated, and then the activated SAN-based carbons were named as A-SANs. The activations were carried out at different temperatures to investigate the effect of activation temperature on the surface and electrochemical properties of the activated SAN-based carbons for using as an electrode of electric double layer capacitors (EDLC). The characteristics of A-SAN were determined by X-ray diffraction (XRD), scanning electron microscopy (SEM), surface area and pore size analysis. Also, the electrochemical behaviors were observed by cyclic voltammetry and galvanostatic charge-discharge method. From the results, the A-SAN 700 showed excellent electrochemical property and the highest specific capacitance, but these properties decreased when the activation temperature was above $700^{\circ}C$. This is due to the fact that the activation at a temperature over $700^{\circ}C$ causes deformation of micropore structures.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.154-154
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• 2009

본 연구는 고전압 전력기기인 몰드형변압기와 계기용 변성기인 CT, PT 절연특성에 유용한 Epoxy/Nano-Micro Mixture Composites(이하,ENMMC)를 개발하기위해 무엇보다 중요한 것은 Nano입자인 $SiO_2$_10nm입자의 표면을 제어하여 즉, 표면의 소수성을 크게 하여 나노입자의 균질한 분산을 얻은것이 무엇보다 중요하다. 개발된 Epoxy/$SiO_2$_10nm Nanocomposites와 Microcomposites을 기계적 전단응력을 이용하여 균질 혼합을 실시하였다. 이런 조건을 이용한 전기적특성을 측정하기위해 구대구 전극이 완전함침된 평등전계하에서 절연파괴전압을 측정하기 시편을 제조하였다. 마이크로입자의 충진함량을 일정하게 유지하여 나노입자 충진함량비율을 4가지로 변화시켜 절연파괴특성을 연구하였다. 충진함량이 나노입자의 경우 1wt%이하의 값이 상대적으로 우수한 절연파괴특성으로 와이블 플롯을 통하여 알수있었다. 상대적으로 멀티나노콤포지트의 형상파라미터가 큰 결과값을 얻을수 있었다. 그리고 스케일파리미터는 누적확률 밀도함수로서 63.2%에서 대단히 큰 초절연성의 절연소재를 개발할수 있었다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.12
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• pp.6980-6985
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• 2014

A micro-conductive pattern was fabricated on an insulating substrate ($SiO_2$) surface using a laser direct writing method. In the LIFT process, when the laser beam irradiates a thin metal film, the photon energy is absorbed by the film and converted to thermal energy, and the thermal decomposition reaction produced by the resulting heat conduction forms a deposit on the substrate. The resistivity of the micro-electrodes deposited through LIFT process with and without polymer coating was measured. The results showed that the electric conductivity of the micro-pattern and micro-structure can be increased approximatly two times when the deposited micropattern is fabricated through a LIFT process with a polymer coating, compared to the case without a polymer coating.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.666-669
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• 2008

Droplet in miniaturized microfluidic systems have received much focused attention recently. In this work, electrical charging phenomenon of a conducting water droplet on the electrode under the dc electric field is studied and using this phenomenon droplet actuation method for microreactor applications is experimentally demonstrated. To find effects of key factors, the effects of electric field, medium viscosity, and droplet size are investigated. A scaling law of charging for the conducting droplet is derived from the experimental results. Unlike the case of a perfect conductor, the estimated amount of electrical charge ($Q_{est}$) of a water droplet is proportional to the 1.59 power of the droplet radius (R) and the 1.33 power of the electric field strength (E). (For a spherical perfect conductor, Q is proportional to R2 and E.) It is thought that the differences are mainly due to incomplete charging of a water droplet resulted from the combined effect of electrochemical reaction at electrode and the relatively low conductivity of water. Using this phenomenon, we demonstrate the transport of the charged droplet and fusion of two oppositely-charged droplets. When electric field is subjected sequentially on the electrode, the charged droplet is transported on the electrode. For the visualization of fusion of charged droplets, the precipitation reaction is used. When subjected to a DC voltage, two droplets charged are moving and merging toward each other due to the Coulombic force and chemical reaction is simultaneously occurred by coalescence of droplets. It may be due to the interchange effect of charge. It is shown that the droplet can be used for microreactor where transporting, merging etc. of reagents constitute unit operation.

• Korean Chemical Engineering Research
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• v.47 no.3
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• pp.321-326
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• 2009

A simple measuring device is proposed, and its performance is examined in an adsorption process separating a gas mixture. The sensor is made of a quartz crystal resonator and solid adsorbent to detect the target component. Micro-particle carbon cryogel(MCC) is utilized as the adsorbent, and the gas mixture of air and i-butane are separated in a column containing bamboo activated carbon. Two devices are placed at the inlet and outlet of the column. The measurements are compared with those of GC outcome to prove the measurements are effective. The experimentally proved system is simple and capable to be implemented in an in-line system with on-line measurement.