• The Optical Journal
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• v.14 no.4 s.80
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• pp.69-70
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• 2002

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.47-56
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• 2007

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.608-611
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• 2003

In this paper, laser direct micromaching is developed to fabricate micro patterns using UV laser ( λ$_3$= 355 nm). Experimentally, laser beam paths mainly influences the surface shape quality. Thus. we proposed laser beam path generator by extracting shape data in a blueprint worked through CAD modeler and using genetic algorithm that considers the characteristics of laser beam. The results show that various shapes of micro patterns could be manufactured using proposed method in this paper.

• Laser Solutions
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• v.14 no.1
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• pp.25-29
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• 2011

Micromachining of photosensitive glass by UV exposure, heat treatment, and etching processes is reported. Like photoresist, the photosensitive glass is also classified into positive and negative types by development characteristics. For the positive type, the exposed area is crystallized and etched away during the etching process in HF solution, whereas the unexposed area is crystallized and etched away for the negative type. The crystallized area of the photosensitive glass has an etch rate approximately 30~100 times faster than that of the amorphous area so that it becomes possible to fabricate microstructures in the glass. Based on the unique properties of glass such as high optical transparency, electrical insulation, and chemical/thermal stability, the glass micromachining technique introduced in this work could be widely applied to various devices in the fields of electronics, bio engineering, nanoelectonics and so on.

• Journal of Sensor Science and Technology
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• v.5 no.1
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• pp.71-77
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• 1996

Considering that polycrystalline silicon, a structural material of the micromachining, is affected by a sacrificial oxide layer, the poly-oxide obtained by the thermal oxidation of polycrystalline silicon is newly proposed and estimated as the sacrificial oxide layer. The grain size of the polycrystalline silicon grown on the poly-oxide is larger than that of poly crystalline silicon grown on the conventional sacrificial oxide layer. As a result of XRD, increase of (111) textures and formation of additional (220) textures are observed on the polycrystaIline silicon deposited on the poly-oxide. Also, the polycrystalline silicon grown on the poly-oxide represents small and uniform stress.

• Journal of the KSME
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• v.52 no.8
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• pp.51-54
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• 2012

이 글에서는 마이크로머시닝 기술로 제작된 뇌신호 측정용 초소형 MEMS 뉴럴 프로브 시스템에 대한 소개와 최신 연구 동향을 소개하고자 한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.143-144
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• 2010

• Journal of the KSME
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• v.33 no.6
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• pp.484-498
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• 1993

마이크로머신의 기술은 빠른 속도로 진보되고 있으며 광학관계를 비롯해서 생명, 유체, 표면과학 등에의 응용도 유망하고 응용 제품이 만들어지는 날도 가까워지고 있다. 여기서 소개한 반도체 기술을 바탕으로 한 접근 방법 외에 정밀기계 가공을 이용하여 mm 크기의 기계를 만들거나, 분자기계를 유전자공학의 수법으로 만들려고 하는 시도 등 여러 가지 접근 방법도 행해지고 있 으며 앞으로의 발전이 한층더 기대된다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.256-256
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• 2004

Micro/Meso 기계적 가공은 기존 MEMS 공정에서 제작할 수 없었던 높은 세장비(aspect ratio)를 가지는 제품을 가공할 수 있을 뿐만 아니라 보다 높은 가공 정밀도를 획득할 수 있다. 따라서, 미소 부품에 대한 마이크로/매소 단위의 미세 절삭 가공을 위해서는 공간적 측면과 에너지 소비, 정밀도 측면에서 효율적인 시스템을 구성하기 위해서 마이크로 머시닝 전용 기계가 요구된다. 이에 본 연구에서는 '마이크로 팩토리' 의 기본 공작기계인 마이크로 선반을 개발하여 초정밀 미소 절삭에 대한 연구를 진행 중에 있다.(중략)

• CDE review
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• v.15 no.2
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• pp.13-18
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• 2009