• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.2
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• pp.291-299
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• 2002

This paper characterizes hi-directionally oscillating flow in planar microdiffusers in order to evaluate the frequency-dependent flow rectification performance of the microdiffusers. In the theoretical study, we analyze a hi-directionally oscillating flow in the planar microdiffuser. In the experimental study, we fabricate two different microdiffuser prototypes, having different neck widths of 100 ㎛ (D100) and 300 ㎛(D300), respectively. The experimental net flow rates are measured as 116.6 $\mu$ι/min. and 344.4 $\mu$ι/min. for D100 and D300, respectively. The experimental flow rate of D300 decreases at the oscillating flow frequencies higher than 90Hz, at which the net boundary layer thickness is reduced to the microdiffuser neck width. It is experimentally verified that the flow rectification performance and the net flow rate of the microdiffusers tend to decrease when the boundary layer thickness is smaller than the diffuser neck width.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.5
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• pp.411-417
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• 2007

This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.

• Journal of the KSME
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• v.50 no.1
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• pp.32-36
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• 2010

이 글에서는 전형적인 포토리소그래피 공정을 변형 적용하여 다양한 모양의 3차원 감광막 구조물을 형성할 수 있는, 다중노광 단일현상 고정, 다중코팅 단일노광 공정, 디퓨저 리소 그래피 공정, 리플로 공정 등 네 가지 기술을 소개한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.595-596
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.195-202
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• 2004

This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2672-2677
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• 2007

An investigation of low Reynolds number flow in nozzles and diffusers which are widely used in the valveless micropump is presented. Flow characteristics in the nozzle and diffuser are explained in view of viscous effect and flow oscillation induced by pumping membrane. These calculation results show that the rectification property of valveless micropump is due to a flow separation in the diffuser and the separation is largely originated from the flow oscillation. Under the assumptions of steady flow velocity profile and flow separation in the diffuser, simplified analytical models are provided to see the dependency of rectification on the micropump geometry. Geometric parameters of channel length, nozzle throat, chamber size, and converging/diverging angle are depicted through the analytical models in low Reynolds number flow, and the prediction and experimental results are compared. This theoretical study can be used to determine the optimum geometry of valveless micropump.

• Korean Journal of Materials Research
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• v.23 no.8
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• pp.447-452
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• 2013

Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.