• Title/Summary/Keyword: 마이크로구조물

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Three-Dimensional Microstructures Fabricated by Multi-Step Electrochemical Aluminum-Foil Etching (알루미늄 박판의 다단 전해식각 공정을 이용한 3 차원 마이크로 구조물의 제작)

  • Kim, Yoon-Ji;Youn, Se-Chan;Han, Won;Cho, Young-Ho;Park, Ho-Joon;Chang, Byeung-Gyu;Oh, Yong-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.12
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    • pp.1805-1810
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    • 2010
  • We present a simple, cost-effective, and fast fabrication process for three-dimensional (3D) microstructures; this process is based on multi-step electrochemical etching of metal foils which facilitates the mass production of 3D microstructures. Compared to electroplating, this process maintains uniform and well-controlled material properties of the microstructure. In the experimental study, we perform single-step electrochemical etching of aluminum foils for the fabrication of 2D cantilever arrays. In the single-step etching, the depth etch rate and bias etch rate are measured as $1.50{\pm}0.10 {\mu}m/min$ and $0.77{\pm}0.03 {\mu}m/min$, respectively. Using the results of single-step etching, we perform two-step electrochemical etching for 3D microstructures with probe tips on cantilevers. The errors in height and lateral fabrication in the case of the fabricated structures are $15.5{\pm}5.8% $ and $3.3{\pm}0.9%$, respectively; the surface roughness is $37.4{\pm}9.6nm$.

Damage Detection of Truss Structures Using Genetic Algorithm (유전 알고리즘을 이용한 트러스 구조물 손상탐지)

  • Kim, Hyung-Mi;Lee, Jae-Hong
    • Journal of Korean Society of Steel Construction
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    • v.24 no.5
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    • pp.549-558
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    • 2012
  • This study identifies the damage detection of truss structures by using genetic algorithm(GA) from changed elements properties. To model the damaged truss structures, the modulus of elasticity of some specific elements is reduced. The analysis of truss structures is performed with static analysis by applying uniform load, and the location and extent of structural damage is detected by comparing the stain of each element of healthy truss structures with damaged truss structures using genetic algorithm. In this study, some numerical examples are presented to detect the location and extent of damage using genetic algorithm.

Design of A$1_2$$O_3$ substrate for the increasing fracture toughness (A$1_2$$O_3$기판 재료의 $K_{IC}$ 증가를 위한 재료 설계)

  • ;S.Tariolle;P.Goeuriot
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.11a
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    • pp.177-179
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    • 2002
  • A1$_2$ $O_3$기판재료의 $K_{IC}$ 증가를 위한 재료설계를 시도하였다. 먼저 A1$_2$ $O_3$기판을 구성하는 A1$_2$ $O_3$다층구조물에 적절한 다공성 중간층을 삽입하는 샌드위치 구조물을 제조하였다. 제조된 A1$_2$ $O_3$구조물의 미세구조를 관찰하였고, Vickers 경도와 three-point bending test를 통해서 단일조성 구조물과 샌드위치 구조물의 경도와 인성 측정치를 비교하였다. 다공층을 삽입한 A1$_2$ $O_3$샌드위치 구조물의 Single-Edge Notched Beam이 단일 조성의 구조물에 비해 파괴강도와 인성이 향상되는 결과를 얻었다.

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A case study on reinforcement and design application of reinforced earth wall using micro pile (마이크로 파일을 이용한 블록식 보강토옹벽의 보강 및 설계적용 사례 연구)

  • Hong, Kikwon;Han, Jung-Geun;Lee, Kwang-Wu;Park, Jong-Beom
    • Journal of the Korean Geosynthetics Society
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    • v.13 no.4
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    • pp.161-167
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    • 2014
  • This paper describes reinforcement method of reinforced earth wall near the abutment. The excessive displacement of a case affected by reduction of bearing capacity due to macro-environment condition like a coast. That is, the front displacement of reinforced earth wall has been happening continuously due to strength reduction of foundation ground. The micro pile is applied to reinforcement method, in order to secure a bearing capacity and global slope stability of reinforced earth wall. The results of numerical analysis confirmed that reinforcement method based on micro pile can secure a stability of structure, while the reconstruction of reinforced earth wall is impossible by construction and macro-environment condition.

Reduction of Differential Settlements due to Deep Excavation Using the Micro-piling Method (마이크로 파일을 이용한 가설 벽체 인접 구조물의 침하 억제에 관한 연구)

  • Huh, In-Goo;Hwang, Tae-Hyun;Lee, Sang-Ryeong;Shin, Jong-Ho;Kwon, Oh-Yeob
    • Journal of the Korean Geotechnical Society
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    • v.24 no.10
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    • pp.71-81
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    • 2008
  • Wall displacements caused by earth pressure, rainfalls, rise in ground water level, inappropriate deep excavation and structural defects of the wall may produce differential settlements to existing buildings, which often result in damages and/or collapses of the building structures. In this case, measures to protect the walls and nearby structures would be required. One of the recent measures to reduce differential settlements and protecting walls is to reinforce the ground using micro-piles. In this study physical model tests were carried out to evaluate the performance of the micro-pile method. It is revealed that reduction of the settlement was maximized when the length of micro-pile is twice of the foundation width, distance between piles is twice of the pile diameter and the distance to wall is one tenth of the foundation width. Based on the test results some design recommendations were made.

A Design of Dynamic Structure Database for Ultra Precision FAB. Structure based on Semi-Empirical Method (준 경험적 기법에 의한 차세대 초정밀 FAB. 구조물의 통합 동적 구조 데이터베이스 설계)

  • Lee, Hyun-jun;Lee, Kyong-oh;Lee, Gyu-seop
    • Proceedings of the Korea Information Processing Society Conference
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    • 2012.04a
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    • pp.868-871
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    • 2012
  • 반도체와 LCD 산업 분야, 나노급 공정 및 검사 기술이 요구되는 산업 분야의 수요 증가에 따라 초정밀 가공/생산/검사 장비를 설치, 운용하는 FAB. 구조물의 설계 요구가 층증대 되고 있다. 이에 따라 건물의 환경진동 규제치도 강화되고 있는 실정이다. 이와 같은, 대형 구조물에서 서브마이크로 수준의 미진동(微振動)을 제어하는 문제는 여전히 어려운 과제로 남아 있다. 이는 진동 응답을 결정하는 구조와 재료가 복잡하고 다양한 형태를 갖고 있는 반면, 다루어야 할 동적 응답은 극한적으로 작은 마이크로(micro) 이하의 값을 다루어야 한다. 그러므로, 기존에 이용되고 있는 해석과 실험의 결과만으로는 신모델 설계에 적용하는 것은 어렵다. 따라서, 본 논문에서는 이러한 영역의 경험적 데이터물을 체계적인 데이터베이스로 구축하여 새로운 동적 구조 설계 기술의 기반을 제공하고자 한다.

Optimum Design of Grid Structures with Pretension (초기인장력을 받은 그리드 구조물의 최적설계)

  • Kim, Dae-Hwan;Lee, Jae-Hong
    • Journal of Korean Association for Spatial Structures
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    • v.11 no.1
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    • pp.77-85
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    • 2011
  • In this study, micro genetic algorithm is used to find an optimum cross section of grid structures with pretension. Design optimization of trusses consists of arriving at optimum sizes of cross-section and prestressing force parameters, when weight of the truss is minimum, satisfying a set of specified constraints. The present approach is verified by ten-bar truss example showing good agreements with previous results. Features of the proposed method, which help in modeling and application to optimal design of pretensioned truss structures, are demonstrated by solving a problem of seventy two bar truss structures. The minimum weight design of seventy two bar truss is performed for various magnitudes of pretension and optimal prestressing forces are also found for various configurations of pretensioned truss structures.

Manufacturing of Three-dimensional Micro Structure Using Proton Beam (양성자 빔을 이용한 3차원 마이크로 구조물 가공)

  • Lee, Seonggyu;Kwon, Won Tae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.39 no.4
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    • pp.301-307
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    • 2015
  • The diameter of a proton beam emanating from the MC-50 cyclotron is about 2-3 mm with Gaussian distribution. This widely irradiated proton beam is not suitable for semiconductor etching, precise positioning, and micromachining, which require a small spot. In this study, a beam cutting method using a microhole is proposed as an economical alternative. We produced a microhole with aspect ratio, average diameter, and thickness of 428, $21{\mu}m$, and 9 mm, respectively, for cutting the proton beam. By using this high-aspect-ratio microhole, we conducted machinability tests on microstructures with sizes of tens of ${\mu}m$. Additionally, the results of simulation using GEANT4 and those of the actual experiment were compared and analyzed. The outcome confirmed the possibility of implementing a micro process technology for the fabrication of three-dimensional microstructures of 20 micron units using the MC-50 cyclotron with the microhole.

Synthesis of Pd-decorated SiO2 layers with superhydrophobic and oleophilic micro-nano hierarchical (초소수성 및 친유성을 갖는 마이크로-나노 계층구조의 Pd 금속입자 기능화된 SiO2층 합성)

  • Kim, Jae-Hun;Lee, Jae-Hyeong;Kim, Jin-Yeong;Kim, Sang-Seop
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.67.2-67.2
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    • 2017
  • 본 연구에서는 $SiO_2$ 미세구조 상에 Pd 나노입자(NPs)를 증착하여, 불소화된 마이크로-나노 계층구조를 갖는 Pd-decorated $SiO_2$($Pd/SiO_2$)를 제작하였다. 마이크로 크기의 거칠기를 갖는 $SiO_2$ 층은 졸-겔 공정을 사용해서 제조된 용액을 전기분사함으로써 제조되었다. 이어서, 자외선(UV)을 이용한 광 환원법을 이용해 Pd 나노입자를 $SiO_2$ 층에 형성했다. 생성된 표면은 마이크로-나노의 계층구조 형태를 보여주었다. 해당 시편의 불소화 처리 후, 마이크로-나노의 계층구조 표면은 $170^{\circ}$ 이상의 물 접촉각(water contact angle; WCA) 및 $5^{\circ}$ 이하의 슬라이딩 각(sliding angle)을 보여줌으로써 물에 대해 탁월한 소수성을 나타내었다. 또한, 커피($CA=161^{\circ}$), 우유($CA=162^{\circ}$), 쥬스($CA=163^{\circ}$), 그리고 글리세롤($CA=165^{\circ}$)에 대해서도 우수한 소수 특성을 보여주었다. 또한, 이들 $Pd/SiO_2$ 층은 우수한 장기내구성 및 자외선 저항성을 보여주었다. 그리고 이어진 기름에 대한 접촉각 측정을 통해 해당 시편이 소유 특성이 아닌 친유 특성을 보여준다는 것을 확인할 수 있었고, 기름에 대한 CA는 약 ${\sim}10^{\circ}$로 매우 우수한 친유 특성을 나타내었다. 이와 같은 결과는 자체세정이 가능한 표면 및 지능형 물/기름 분리 시스템과 같은 스마트 장치에서 초소수성-친유성 특성을 갖는 계층구조의 $Pd/SiO_2$ 층을 사용할 가능성을 명확하게 보여준다고 판단된다.

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