• Title/Summary/Keyword: 마모 형상

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Effect of Diamond Abrasive Shape of CMP Conditioner on Polishing Pad Surface Control (CMP 컨디셔너의 다이아몬드 입자 모양이 연마 패드 표면 형상 제어에 미치는 영향)

  • Lee, Donghwan;Lee, Kihun;Jeong, Seonho;Kim, Hyungjae;Cho, Hanchul;Jeong, Haedo
    • Tribology and Lubricants
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    • v.35 no.6
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    • pp.330-336
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    • 2019
  • Conditioning is a process involving pad surface scraping by a moving metallic disk that is electrodeposited with diamond abrasives. It is an indispensable process in chemical-mechanical planarization, which regulates the pad roughness by removing the surface residues. Additionally, conditioning maintains the material removal rates and increases the pad lifetime. As the conditioning continues, the pad profile becomes unevenly to be deformed, which causes poor polishing quality. Simulation calculates the density at which the diamond abrasives on the conditioner scratch the unit area on the pad. It can predict the profile deformation through the control of conditioner dwell time. Previously, this effect of the diamond shape on conditioning has been investigated with regard to microscopic areas, such as surface roughness, rather than global pad-profile deformation. In this study, the effect of diamond shape on the pad profile is evaluated by comparing the simulated and experimental conditioning using two conditioners: a) random-shaped abrasive conditioner (RSC) and b) uniform-shaped abrasive conditioner (USC). Consequently, it is confirmed that the USC is incapable of controlling the pad profile, which is consistent with the simulation results.

A Study on Heat Treatment Characteristic of HPDL to Surface Hardening for Press Die(I) - Characteristics of Laser Heat Treatment on FCD550 for Drawing Process - (프레스 금형의 표면경화를 위한 고출력 다이오드 레이저의 열처리 특성에 관한 연구(I) - 드로잉공정 적용을 위한 FCD550 소재의 레이저 열처리 특성 -)

  • Kim, Jong-Do;Song, Moo-Keun;Lee, Chang-Je;Hwang, Hyun-Tae
    • Proceedings of the KWS Conference
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    • 2010.05a
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    • pp.95-95
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    • 2010
  • 자동차 산업에서 차체를 성형하는 프레스 금형 산업은 꾸준히 증가하고 있는 자동차 생산대수와 함께 성장해가고 있으며, 자동차 산업의 국제 경쟁이 심해지고 소비자들의 요구가 다양해짐에 따라 신제품 개발주기에 발맞추어 금형의 제작에도 단납기 및 비용절감을 위한 노력과 제품의 품질 향상을 위해 신기술, 신공법이 적용되고 있다. 한편 자동차 차체를 제작하는 프레스 금형가공은 박판소재를 원하는 형상으로 제작하는 공정으로써, 프레스의 상 하 운동을 이용하여 강판을 성형한다. 이러한 금형의 형태는 곧 자동차 차체 제품의 형태를 완성하므로 제품을 성형하는 도중에 금형과 소재의 마찰에 의해 금형의 마모나 마멸이 발생하여 제품의 품질을 저하시킬 우려가 있다. 따라서 금형의 내마모성 및 수명을 향상시키기 위한 방안들 중 표면경화처리가 행해지고 있으며, 그중 공정 속도가 빠르고 국부적인 열처리가 가능한 레이저 표면처리 방법이 많은 관심을 받고 있다. 본 연구에서는 이러한 금형의 성질을 향상시키기 위해 고출력 다이오드 레이저를 이용하여 프레스 금형공정 중 드로잉(drawing) 공정에의 적용을 위한 표면경화처리를 실시하였다. 최대출력 4.0kW의 다이오드 레이저를 사용하였으며, 6축 외팔보 로봇에 열처리용 광학계를 장착하여 열처리를 실시하였다. 또한 광학계 부근에는 적외선 온도센서가 부착되어있어 열처리시 시험편의 표면온도를 실시간으로 측정할 수 있도록 구성되어져있다. 시험편은 금형재료용 구상흑연 주철인 FCD550 소재를 사용하였으며, 공정변수에 따른 열처리 특성을 파악하고, 그 경화특성을 평가하였다. 실험 결과, FCD550 소재의 표면 열처리시 레이저 출력 3.5kW, 빔 이송속도 3mm/sec에서 최적의 열처리 특성을 나타내었으며, 이때의 최고 경도는 930Hv을 나타내며 모재에 비해 경도가 3배 정도 상승하는 우수한 경화특성을 보였다.

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The influence of mechanical damage on the formation of the structural defects on the silicon surface during oxidation (규소 결정 표면의 구조 결함의 형성에 미치는 기계적 손상의 영향)

  • Kim, Dae-Il;Kim, Jong-Bum;Kim, Young-Kwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.2
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    • pp.45-50
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    • 2005
  • During oxidation process, several type of defects are formed on the surface of the silicon crystal which was damaged mechanically before oxidation. As the size of abrasive particle increases multiple dislocation loops are produced favorably over oxidation-induced stacking faults, which are dominantly produced when ground with finer abrasive particle. These defects are not related with the crystal growth process like Czochralski or directional solidification. During directional solidification process, twins and stacking faults are the two major defects observed in the bulk of the silicon crystal. On the other hand, slip dislocations produced by the thermal stress are not observed. Thus, not only in single crystalline silicon crystal but also in multi-crystalline silicon, extrinsic gettering process with programmed production of surface defects might be highly applicable to silicon wafers for purification.

Gap Control Using Discharge Pulse Counting in Micro-EDM (미세 방전 가공에서의 방전 펄스 카운팅을 이용한 간극 제어)

  • Jung J.W.;Ko S.H.;Jeong Y.H.;Min B.K.;Lee S.J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.499-500
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    • 2006
  • The electrode wear in micro-EDM significantly deteriorates the machining accuracy. In this regard, electrode wear needs to be compensated in-process to improve the product quality. Therefore, there are substantial amount of research about electrode wear. In this study a control method for micro-EDM using discharge pulse counting is proposed. The method is based on the assumption that the removed workpiece volume is proportional to the number of discharge pulses, which is verified from experimental results analyzing geometrically machined volume according to various number of discharges. Especially, the method has an advantage that electrode wear does not need to be concerned. The proposed method is implemented to an actual micro-EDM system using high speed data acquisition board, simple counting algorithm with 3 axis motion system. As a result, it is demonstrated that the volume of hole machined by EDM drilling can be accurately estimated using the number of discharge pulses. In EDM milling process a micro groove without depth variation caused by electrode wear could be machined using the developed control method. Consequently, it is shown that machining accuracy in drilling and milling processes can be improved by using process control based on the number of discharge pulses.

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Comparison of characteristics of MgO films deposited by vacuum arc method with other methods. (진공아크 증착법과 다른 공정에 의해 증착된 MgO 박막 특성 비교)

  • 이은성;김종국;이성훈;이건환
    • Journal of the Korean Vacuum Society
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    • v.12 no.2
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    • pp.112-117
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    • 2003
  • MgO films is widely used in plasma display panel (PDP) technology. In this work, structural and optical properties of the MgO films deposited by e-beam evaporation, reactive magnetron sputtering, which are commercially used, and arc deposition were compared. MgO thin films were deposited on glass substrates by vacuum arc deposition equipment using a magnesium metal target at various oxygen gas flows. In order to investigate the packing density by ellipsometer, to measure reasonable erosion-rates of the MgO protective layers, we introduced an acceleration test method, namely, Ar+ ion beam induced erosion test. Also, XPS and UV test were adopted to examine the effect of the moisture on the optical transmittance of the MgO protective layers, which showed that these of MgO films by arc deposition method sustained more 90% and were insensitive to effect of the moisture. XRD and AFM have been also used to study behaviors of the structure and surface morphology.

Analysis of Vehicle Dynamic Performance after Wheel Reprofiling (차륜 전삭에 따른 차량 동적성능 분석)

  • Hur, Hyunmoo;Ahn, Dahoon;Youn, Suksoon;Choi, Yongwoon
    • Journal of the Korean Society for Railway
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    • v.19 no.5
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    • pp.565-575
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    • 2016
  • Wheel reprofiling is frequently conducted to remove faults such as flange wear, flat areas, and cracks that occur in railway vehicle operation. We analyzed the dynamic performances of a vehicle before and after wheel reprofiling to grasp the influence of reprofiling on the dynamic behavior of the vehicle. We measured the wheel profile of the test vehicle and conducted a running test to analyze the vibration and comfort characteristics of the test vehicle. The result of the test indicated that vibration of the test vehicle after wheel reprofiling was reduced compared to that before wheel reprofiling. And, comfort level of the test vehicle after wheel reprofiling was improved by about 3dB laterally and vertically. Consequently, the positive effect of wheel reprofiling on the dynamic performance of vehicle was verified.

Properties of Advanced Synthetic Fiber Reinforced Concrete for Improvement of Tunnel Shotcrete Performance (터널 숏크리트 성능 향상을 위한 고기능성 합성섬유 보강 콘크리트의 물성 평가)

  • Jeon, Chanki;Jeon, Joongkyu
    • Journal of the Society of Disaster Information
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    • v.7 no.1
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    • pp.43-50
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    • 2011
  • The Application of Steel Fiber Shotcrete in tunneling construction has become part of tunneling practice at least since the 1970s because of its high bending and tensile properties. Over the past 3 decades, researcher from all over the world have been significantly developing the associated technologies for improved performance of SFRS. But still it has some major drawbacks in terms of durability, damage of pumping hose, wastage due to rebound concrete, corrosion and it costs high. To overcome this situation researcher has to look for some alternative material. Therefore, this part study deals with the three types of fiber in order to find good alternative for steel fiber. Polyamide and Polypropylene fiber were used in this study with 0.6, 0.5% mixing ratio. To evaluate its fresh and harden properties air content, slump, compressive, split tensile and bending strength were measured. After comparing the results of all three types of fiber reinforced concrete with its different mixing proportion this study propose that polyamide fiber with addition ratio of 0.6 % for field use.

Forced Vibration Modeling of Rail Considering Shear Deformation and Moving Magnetic Load (전단변형과 시간변화 이동자기력을 고려한 레일의 강제진동모델링)

  • Kim, Jun Soo;Kim, Seong Jong;Lee, Hyuk;Ha, Sung Kyu;Lee, Young-Hyun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.12
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    • pp.1547-1557
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    • 2013
  • A forced vibration model of a rail system was established using the Timoshenko beam theory to determine the dynamic response of a rail under time-varying load considering the damping effect and stiffness of the elastic foundation. By using a Fourier series and a numerical method, the critical velocity and dynamic response of the rail were obtained. The forced vibration model was verified by using FEM and Euler beam theory. The permanent deformation of the rail was predicted based on the forced vibration model. The permanent deformation and wear were observed through the experiment. Parametric studies were then conducted to investigate the effect of five design factors, i.e., rail cross-section shape, rail material density, rail material stiffness, containment stiffness, and damping coefficient between rail and containment, on four performance indices of the rail, i.e., critical velocity, maximum deflection, maximum longitudinal stress, and maximum shear stress.

Study on the Development of Concrete Public Sign Block (콘크리트 공공 사인 블록 개발에 대한 연구)

  • Lee, Ung-Kyun;Lee, Sung-Chul;Kim, Jong Yoon;Kim, Baek-Joong
    • Journal of the Society of Disaster Information
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    • v.17 no.2
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    • pp.266-274
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    • 2021
  • Purpose: The purpose of this study is to develop a concrete public sign block for floors that can provide pedestrian safety and various information. Method: In order to achieve these research objectives, step-by-step block manufacturing techniques applied in relation to the development of public sign blocks were proposed, and the field applicability of the developed concrete public sign blocks was evaluated. Result: The concrete public sign block for floors developed in this study is expected to be capable of expressing public signs of various shapes and to reduce manufacturing cost. As a result of the usability evaluation for two years, no problems such as cracks, edge dropouts, discoloration, and abrasion were found, so it is judged that sufficient durability was secured. Conclusion: Based on these research results, it is expected that the concrete public sign block will be used as an alternative to secure the weaknesses such as stickers, stone and brass plates that have been used in the existing public sign for floors. It is expected that it can be applied in various fields.

Selective Laser Melting of Metal Matrix Composites: A Review of Materials and Process Design (레이저로 적층 제조한 금속 기지재 복합재료의 설계 및 제조 연구동향)

  • Kim, Min-Kyeom;Kim, Taehwan;Kim, Ju-won;Kim, Dongwon;Fang, Yongjian;No, Jonghwan;Suhr, Jonghwan
    • Composites Research
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    • v.34 no.4
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    • pp.212-225
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    • 2021
  • Metal matrix composites (MMCs) were widely used in various industries, due to the excellent properties: high strength, stiffness, wear resistance, hardness, thermal conductivity, electrical conductivity, etc. With additive manufacturing (AM) technology rapidly developed, AM MMCs have been actively investigated thanks to the cost- and time-saving manufacturing. However, several issues still need to be addressed before fabricating AM MMCs. Here, several types of MMCs were introduced and MMCs' design methods to tackle the issues were suggested in a powder bed fusion (PBF) technique. The paper could come up with a guideline for the material and process design of MMCs in the PBF technique.