• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.381.1-381.1
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• 2016

분석 방법의 간편함과 용이함의 장점은 물론, 시료 전처리 과정이 적어 시료물질의 임의 파괴나 훼손을 방지한다는 이유에서 최근 10년 간 많은 연구가 이루어지고 있는 대기압 질량분석 기술은 기압차이가 없는 대기압 분위기에서 질량분석이 이루어지기 때문에 시료를 질량분석기 입구 바로 앞에 스테이지를 설치하고서 시료를 이온화하는 경우가 대부분이다. 이 때문에 균질하지 않은 시료의 관심 영역을 모니터링하면서 질량분석을 하기에는 어려움이 있으며, 공간 정보를 추가한 질량분석 이미징에 한계가 있었다. 이에 본 연구팀은 질량분석기 입구에 챔버와 보조 펌프를 장착하여 강제로 기체 흐름 일으켜 시료로부터 발생한 이온을 질량분석기 입구로 유도하여, 원거리에서 시료를 이온화해도 질량분석기 입구까지 이온을 성공적으로 전달시키는 방법을 제안한다. 이를 이용하면 분석하고자 하는 시료를 현미경 스테이지 위에 위치시켜 분석하고자하는 부분을 현미경으로 확인하면서 질량분석을 할 수 있으며, 나아가 대기압 질량 분석 이미징 기술을 구현할 수 있다. 대기압 탈착/이온화원은시료에 열적 손상이 없는 조건으로 시편의 이온화 및 탈착 과정이 이루어지게 하기 위해 저온 대기압 헬륨 플라즈마 젯과 펨토초 레이저를 결합하여 대기압 이온화원을 제작하였다. 이온 전달관은 1/4" (6.35 mm) 외경의 60 cm 길이의 스테인리스 스틸관을 사용하여 질량분석기에서 약 60 cm 떨어진 현미경 위의 시료의 질량분석이 가능하게 했다. 보조 펌프의 계기압과 저온 대기압 헬륨 플라즈마 젯의 헬륨 기체의 유속을 변화시키면서 시료인 PDMS (polydimethylsiloxane) 의 질량 스펙트럼 (m/z 270.314) 세기를 관찰하여 최적의 이온 전달 조건을 찾았다. 추가로 현미경 스테이지에 정밀 2-D 자동 스캐닝 스테이지를 장착하여 질량분석 정보에 공간 정보를 더할 수 있는 질량분석 이미징 기술 방법을 개발하여 생체 시편의 질량분석 이미징을 얻었다.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.7
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• pp.97-103
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• 2019

Mn+1AXn (MAX) phases are a family of nano-laminated compounds that possess unique combination of typical ceramic properties and typical metallic properties. As a member of MAX-phase, $Ti_2AlN$ bulk materials are attractive for some high temperature applications. In this study, $Ti_2AlN$ bulk with high density were synthesized by spark plasma sintering method. X-ray diffraction, micro-hardness, electrical and thermal conductivity were measured to compare the effect of material properties both $Ti_2AlN$ bulk samples and a conventional Ti-6Al-4V alloy. A femto-second laser conditions were conducted at a repetition rate of 6 kHz and laser intensity of 50 %, 70% and 90 %, respectively, laser confocal microscope were used to evaluate the width and depth of ablation. Consequently, the laser ablation result of the $Ti_2AlN$ sample than that of the Ti-6Al-4V alloys show a considerably good ablation characteristics due to its higher thermal conductivity regardless of to high densification and high hardness.

• Applied Chemistry for Engineering
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• v.17 no.2
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• pp.158-162
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• 2006

Poly[4-hydroxystyrene-co-2-(4-methoxybutyl)-2-adamantyl methacrylate] was synthesized and evaluated as a matrix resin for extreme UV (EUV) chemically amplified resist. The resist system formulated with this polymer resolved 120 nm line and space (pitch 240 nm) positive patterns using a KrF excimer laser scanner (0.60 NA). The well defined 50 nm line positive patterns (pitch 180 nm) were obtained using an EUV lithography tool. The dry etching resistance of this resist for a $CF_{4}$-based plasma was 1.1 times better than that of poly(4-hydroxystyrene).

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1954-1956
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• 2004

Nowadays, $CO_2$ lasers are used widely in many applications such as materials fabrication, communications, remote sensing and military purpose etc. Especially, $CO_2$ lasers are in the spotlight at surface handling and heat processing. It is important to control the laser output power and beam Quality in those fields. And those are studied the important parameters deciding the fluctuation of laser beam are smoothing capacitor, frequency and the characteristics of laser resonator. But the study of plasma parameters of $CO_2$ lasers are little. So we detect the $CO_2$ laser from emitted $CO_2$ laser discharge plasma using a non-contact photo tansistor sensor and Low pass filter. In this study, The relativity of the emitted light of discharge plasma and CO2 laser output.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.412-412
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• 2012

갈륨비소(GaAs)는 수직공진표면방출레이저, 발광다이오드, 태양전지 등과 같은 광전소자에 널리 사용되는 물질이다. 그러나 높은 굴절률을 갖는 갈륨비소는 표면에서 30% 이상의 반사율을 갖기 때문에 광손실로 인해 소자의 성능이 저하된다. 따라서 표면 Fresnel 반사율을 낮출 수 있는 효율적인 반사방지막이 필요하다. 최근, 열적 불일치, 물질 선택, 접착력 저하의 단점을 가지고 있는 기존 다중박막을 대체하는 생체모방 서브파장 나노구조가 활발히 연구되고 있다. 이러한 구조는 공기(air)부터 갈륨비소까지 선형적인 유효굴절률 분포를 갖는 유효 단일박막과도 같기 때문에 소자 표면에서의 광손실을 줄일 수 있다. 더욱이, 자연계의 나방의 각막과 나비의 눈의 구조 형태를 모방한 반도체 생체모방 복합 눈(compound eye)은, 즉 마이크로 렌즈모양과 서브파장 나노격자구조의 복합적 형태, 표면에서 우수한 반사방지 특성을 나타낸다. 본 연구에서는, 포토리소그래피와 유도결합플라즈마 식각법을 이용하여 GaAs 기판 표면에 마이크로 렌즈 모양의 패턴을 형성한 후, 스핀코팅을 이용하여 나노 크기를 갖는 실리카 구를 도포하여 건식 식각함으로써 복합 눈 구조를 갖는 갈륨비소 반사방지막을 제작하였다. 제작된 샘플의 표면 및 식각 형상은 전자현미경(scanning electron microscope)을 사용하여 관찰하였으며, UV-vis-NIR spectrophotometer를 사용하여 반사율을 측정하였다.

• Journal of Welding and Joining
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• v.32 no.6
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• pp.64-69
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• 2014

The applications by using fiber laser have increased recently. However, due to high beam quality of fiber laser, it is inappropriate to apply the existing laser welding monitoring technology to the fiber laser welding as it is. On this study, thus, we analyzed emission signal with RMS and FFT for the in-process monitoring during fiber laser welding. 12mm-thick 304L stainless steel sheet was used in fiber laser welding and the result showed as follows: The intensity changes in RMS did not clarify the distinction between full penetration and partial penetration. However, as welding speed increases, specific frequency also increases in regards of frequency analysis by using FFT.

• Journal of Welding and Joining
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• v.32 no.6
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• pp.70-74
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• 2014

On this study, we researched the in-process monitoring during fiber laser welding as well as on the first paper. On the previous/formal study, we analyzed the change of emission signal on thin plate welding. On this study, however, we analyzed RMS and FFT with emission signals in laser welding on lap joint and butt joint of 8mm-thick 316L stainless steel. As the result, the movement of specific frequency peak was observed according to welding speed changes. Furthermore, frequency peak as a result of FFT on the thick plate welding are much clearer than on the thin plate welding. Therefore, it is expected that the welding parameter changes can be predicted in case of applying FFT to in-process monitoring.

• Journal of Welding and Joining
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• v.28 no.6
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• pp.51-57
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• 2010

Fiber laser is a heat source which is introduced recently, and so has a little researched data compare with conventional laser processing. Moreover basic data for welding monitoring are also insufficient. Therefore, in this study, the change of signal with measuring position and angle of plasma emission signals were analysed as a basic experiment for real time monitoring in fiber laser welding. As a result, the signals measured from the side, front and rear had the biggest intensity at $60^{\circ}$, and frequency peak to reflect the behavior of keyhole and swing of plasma by shield gas was detected at $45{\sim}60^{\circ}$. However, both intensity of signal and the result of FFT for monitoring were satisfied at the angle of $45^{\circ}$ from the side.

• Journal of Digital Contents Society
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• v.18 no.1
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• pp.123-132
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• 2017

The physical display technology is the ultimate display technology that human beings aspire, and the world makes use of laser, plasma and reflector plate. Besides, technology development of binocular stereoscopic display has been actively progressed, but there is a limitation to the intact physical representation such as influence of optical ambient light and brightness. In this paper, the display technology using physical deformation different from the existing optical display is approached as a cultural and emotional perspective. The purpose of this paper is to develop the multivariate display technology that can create 3D realistic stereoscopic images through projecting dynamic images on physically diversified screen by overcoming the limitations of 2D planar digital signage and study how to apply them to video, exhibition and performance.