• Korean Journal of Optics and Photonics
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• v.31 no.3
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• pp.125-133
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• 2020

An innovative method for separating overlapping latent fingerprints, using laser-induced plasma spectroscopy (LIPS) combined with multivariate analysis, is reported in the current study. LIPS provides the capabilities of real-time analysis and high-speed scanning, as well as data regarding the chemical components of overlapping fingerprints. These spectra provide valuable chemical information for the forensic classification and reconstruction of overlapping latent fingerprints, by applying appropriate multivariate analysis. This study utilizes principal-component analysis (PCA) and partial-least-squares (PLS) techniques for the basis classification of four types of fingerprints from the LIPS spectra. The proposed method is successfully demonstrated through a classification example of four distinct latent fingerprints, using discrimination such as soft independent modeling of class analogy (SIMCA) and partial-least-squares discriminant analysis (PLS-DA). This demonstration develops an accuracy of more than 85% and is proven to be sufficiently robust. In addition, by laser-scanning analysis at a spatial interval of 125 ㎛, the overlapping fingerprints were separated as two-dimensional forms.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.5
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• pp.451-457
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• 2011

A short laser pulse irradiates a sample to create the highly energetic plasma that emits light of a specific wavelength peak according to the material. By identifying different peaks for the analyzed samples, its chemical composition can be rapidly determined. The LIBS (Laser-Induced Breakdown Spectroscopy) has great advantages as an elemental analyzer on board a space rover, namely real-time rapid analysis and stand-off detection. The LIBS signal intensity is remarkably increased by using double-pulse LIBS system for component analysis of lunar environments where the surrounding pressure is low. Also the angle of target is adjusted for replicating arbitrary shapes of the specimen.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.46 no.6
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• pp.519-526
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• 2018

In order to analyze space resources, it had to be brought to earth. However, using laser-induced breakdown spectroscopy(LIBS) and Raman spectroscopy, it is possible to analyze qualitative and quantitative analysis of space minerals in real time. LIBS is a spectroscopic method in which a high energy laser is concentrated on a material surface to generate a plasma, and the emitted light is acquired through a spectroscope to analyze the atomic composition. Raman spectroscopy is a spectroscopic method that analyzes the molecular structure by measuring scattered light. These two spectroscopic methods are complementary spectroscopic methods for analyzing the atoms and molecules of unknown minerals and have an advantage as space payloads. In this study, data were analyzed qualitatively by using principal component analysis(PCA). In addition, a mixture of two minerals was prepared and a quantitative analysis was performed to predict the concentration of the material.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.11a
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• pp.114-121
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• 2005

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.12
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• pp.1013-1020
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• 2020

Spark-induced breakdown spectroscopy (SIBS) utilizes an electric spark to induce a strong plasma for collecting atomic emissions. This study analyses the potential for usinga compact SIBS instead of conventional laser-induced breakdown spectroscopy (LIBS) in discriminating rocks and soils for planetary missions. Targeting bulky solids using SIBS has not been successful in the past, and therefore a series of optimizations of electrode positioning and electrode materials were performed in this work. The limit of detection (LOD) was enhanced up to four times compared to when LIBS was used, showing a change from 78 to 20 ppm from LIBS to SIBS. Because of the higher energy of plasma generated, the signal intensity by SIBS was higher than LIBS in three orders of magnitude with the same spectrometer setup. Changing the electrode material and locating the optimum position of the electrodes were considered for optimizing the current SIBS setup being tested for samples of planetary origin.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.285-289
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• 2017

Laser-induced breakdown spesctroscopy (LIBS) is a technique that complements the disadvantages of conventional laser-based combustion diagnosis techniques such as weak signal strength, complex equipment configuration, and low accuracy. In this study, basic research was carried out to measure the combustion gas temperature of scramjet engines using LIBS. Spray flames were generated from Jet A-1 fuel used in scramjet engines and gas temperatures were measured at the top of the flames with a calibrated thermocouple. The LIBS signals were acquired at the same points as the temperature measurement positions of the thermocouple. The LIBS spectra were analyzed to obtained a calibration curve between the LIBS signal and the reference temperature measured at the thermocouple. Therefore, it was confirmed that the combustion gas temperature can be measured in-situ using LIBS.

• Analytical Science and Technology
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• v.26 no.4
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• pp.235-244
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• 2013

Detection of halogens using laser-induced breakdown spectroscopy (LIBS) in open air is very difficult since their strong atomic emission lines are located in VUV region. In NIR region, there are other emission lines of halogens through electronic transitions between excited states. However, these lines undergo Stark broadening severely. We report the observation of the emission lines of halogens in laser-induced plasma (LIP) spectra in NIR region using a helium gas flow. Particularly, the emission lines of iodine at 804.374 and 905.833 nm from LIPs have been observed for the first time. In the helium ambient gas, Stark broadening of the emission lines and background continuum emission could be suppressed significantly. Variations of the line intensity, plasma temperature, and electron density with the helium flow rate was investigated. Detection of chlorine and bromine in flame retardant of rubbers was demonstrated using this method. Finally, we suggest a pulsed helium gas jet as a practical and ecomonical helium gas source for the LIBS analysis of halogens in open air.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.4
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• pp.346-353
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• 2012

The Laser-Induced Breakdown Spectroscopy (LIBS) has great advantages as an analytical technique, namely real-time analysis without sample preparation, ideal for mobile chemical sensor for space exploration. The LIBS plasma characteristics are strongly dependent on the surrounding pressure. In this study, seven types of target (C, Ti, Ni, Cu, Sn, Al, Zn) were investigated for their elemental lifetime. The target was located in vacuum chamber which has the pressure range of 760 to $10^{-5}$ torr. As the pressure is decreased, the elemental lifetimes of carbon and titanium declined, while all other targets showed increased lifetimes until reaching 1 torr and declined with continued pressure decrease. The boiling point and electronegativity amongst the physicochemical properties of the samples are used to explain this peculiarity.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.16 no.1
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• pp.83-89
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• 2017

The corrosion of metal specimens was analyzed in this study using laser-induced breakdown spectroscopy. The samples used in the study were magnesium alloys and corrosion, and standard specimens were prepared and analyzed using surface and depth analysis. The spectral wavelengths used in the oxide layer analysis were 777.196 nm, 777.421 nm, and 777.543 nm. The spectral line of the surface corrosion was confirmed by experimentation, and surface micro morphology analysis was performed using an optical microscope. Approximately $100{\mu}m$ corrosion depth was confirmed via laser irradiation in the depth direction. The results of laser-induced breakdown spectroscopy and the SEM-EDS analysis were compared and analyzed.