• Proceedings of the KIEE Conference
• /
• 2001.07c
• /
• pp.1334-1336
• /
• 2001

In this study, laser ablation atomic fluorescence (LAAF) spectroscopy has been applied for a nanometer-scale surface analysis of Na-doped polymethyl methacrylate (PMMA). LAAF spectroscopy is a new sensitive element detection technique which involves atomizing of a sample by the laser ablation and detection of ablated plume by laser-induced fluorescence (LIF) spectroscopy. Using this technique in the detection of Na atoms with Na-doped PMMA, a detection limit is obtained as 36 fg for single laser shot. Further, the depth distribution in the sample is measured with a very high spatial resolution using a two-layer PMMA sample by observing the shot-by-shot LIF intensity from the Na atoms.

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.1
• /
• pp.21-26
• /
• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.36 no.4
• /
• pp.266-272
• /
• 2016

This paper presents the investigation of the propagation behavior of bulk longitudinal waves generated by an ultrafast laser system in thin films. A train of femtosecond laser pulses was focused onto the surface of a 150-nm thick metallic (chromium or aluminum) film on a silicon substrate to excite elastic waves, and the change in thermoreflectance at the spot was monitored to detect the arrival of echoes from the film/substrate interface. The experimental results show that the film material characteristics such as the wave velocity and Young's modulus can be evaluated through curve-fitting in numerical solutions. The material properties of nanoscale thin films are difficult to measure using conventional techniques. Therefore, this research provides an effective method for the nondestructive characterization of nanomaterials.

• Proceedings of the Optical Society of Korea Conference
• /
• 2002.07a
• /
• pp.108-109
• /
• 2002

Optical tweezers는 광압(radiation pressure)을 사용하여 입자들을 포획하거나 조절할 수 있다는 점에서 마이크로스케일의 유전체구뿐만 아니라 세포에서도 널리 사용되고 있다. 일반적으로 빛이라는 것은 광자들의 집합체로서 광자의 입자성으로 인하여 외부의 물체와 충돌시 운동량을 전달하게 되고 이것을 광압(radiation pressure)이라고 하며 optical tweezers [1]는 이 광압을 이용한 방법중 하나이다. 레이저빔을 입자에 집속 시켜 주게 되면 입자는 광압에 의해서 gradient force와 scattering force의 힘을 받게 된다. (중략)

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.05a
• /
• pp.165-165
• /
• 2004

정밀한 3차원 좌표측정을 위한 삼차원좌표측정기(Coordinate Measuring Machine)는 광학 스케일이나 헤테로다인 레이저 간섭계를 이용해서 x, y, z 축의 좌표를 측정한다. 이 경우 측정 정밀도에 가장 큰 영향을 주는 요인은 아베 오차(Abbe's error)이다. 인공위성용 광학계를 비롯해서 첨단 산업부품에 이르기까지 현재의 3차원 좌표측정은, 높은 정밀도와 대영역 측정을 동시에 요구하는 추세이다. 대영역으로 갈수록 _아베 오차의 영향은 더 커지므로 보다 근본적인 해결책이 필요하다.(중략)

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2002.10a
• /
• pp.393-398
• /
• 2002

This study proposes a method to reduce error scanning data of laser scanner. The method co of 3 stages. First, there is an error indu difference of the distance between the prob the object. It is possible to reduce the e planning a scanning strategy: object settin path. Second, the scan data loss of the tooli affects calculating the tooling ball con z-direction compensation is given to calculat accurate registration points. Third, three p used to determine a transformation matrix on frame. As merging, the maximum error usually on the third tooling ball in the conven method, which select a point among three po randomly. We find the centroid of 3 points apply it to determine a new transformation mat

• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.2585-2590
• /
• 2007

In this paper, a technique of simultaneously measuring the velocity and the temperature in micro-scale flow is proposed. This method uses particle tracking velocimetry (PTV) for measuring the velocity and laser induced fluorescence (LIF) for measuring the temperature. To measure the accurate velocity and temperature, images for PTV and for LIF are separated by using two light sources and a shutter which is synchronized with a camera. By using only one camera, measurement system can be simplified and the error from complicate optical system can be minimized. Error analyses regarding the concentrations of fluorescent dye and particle and the light source fluctuation are also conducted. It is found that the error of the temperature and the velocity highly depends on the concentration of fluorescent particles which are used for PTV. This technique is applied to the simultaneous measurement of the velocity and the temperature in the electrokinetic flow. It is found that the velocity and temperature vary with the electric field strength and the concentration of electrolyte.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.31 no.7 s.262
• /
• pp.644-652
• /
• 2007

In this paper, a technique of simultaneously measuring the velocity and the temperature in micro-scale flow is proposed. This method uses particle tracking velocimetry (PTV) for measuring the velocity and laser induced fluorescence (LIE) for measuring the temperature. To measure the accurate velocity and temperature, images for PTV and for LIE are separated by using two light sources and a shutter which is synchronized with a camera. By using only one camera, measurement system can be simplified and the error from complicate optical system can be minimized. Error analyses regarding the concentrations of fluorescent dye and particle and the light source fluctuation are also conducted. It is found that the error of the temperature and the velocity highly depends on the concentration of fluorescent particles which are used for PTV. This technique is applied to the simultaneous measurement of the velocity and the temperature in the electrokinetic flow. It is found that the velocity and temperature vary with the electric field strength and the concentration of electrolyte.

• Journal of the Microelectronics and Packaging Society
• /
• v.30 no.2
• /
• pp.65-70
• /
• 2023

Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL technologies is generally limited to the micro level. Here, we introduce a novel hard imprint lithography method, extreme-pressure imprint lithography (EPIL), for the direct nano-to-microscale pattern formation on the surfaces of metal substrates with various thicknesses. The EPIL process allows reliable nanoscopic patterning on diverse surfaces, such as polymers, metals, and ceramics, without the use of ultraviolet (UV) light, laser, imprint resist, or electrical pulse. Micro/nano molds fabricated by laser micromachining and conventional photolithography are utilized for the nanopatterning of Al substrates through precise plastic deformation by applying high load or pressure at room temperature. We demonstrate micro/nanoscale pattern formation on the Al substrates with various thicknesses from 20 ㎛ to 100 mm. Moreover, we also show how to obtain controllable pattern structures on the surface of metallic materials via the versatile EPIL technique. We expect that this imprint lithography-based new approach will be applied to other emerging nanofabrication methods for various device applications with complex geometries on the surface of metallic materials.

• Journal of the Computational Structural Engineering Institute of Korea
• /
• v.31 no.1
• /
• pp.17-21
• /
• 2018

The natural frequency of a laminated cantilever microbeam was studied in the present investigation. The microbeam was made of quartz on a silicon chip, and its top and bottom surfaces were coated with thin(~30nm) gold films. An ultrasonic testing platform was employed to resonate the microbeam, and its time domain signal was optically measured. The natural frequency was quantified through the fast Fourier transform of the waveform, and the result showed good agreement with a theoretical estimation from the classical beam theory. This study is expected to provide a dynamic evaluation technique for micro/nanoscale materials and micromechanical structures.