• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.27-28
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• 2006

This study performs to investigate deformation of wall thinning pipe and to find out the position of the internal thinning defect by shearography. Shearography is one of optical methods those have applied to nondestructive testing (NDT) and the strain/stress analysis. This technique has the merit of the directly measuring the first derivative of displacement, sensitivity of which can be adjusted by the handling of optical component in interferometer. In this paper, we tested carbon steel pipe locally wall thinned and loaded internal pressure and developed the nondestructive out-of-plane deformation analysis technique fur internal thinning defect of elbow by shearography. From the results, it was confirmed that this technique is proper to the practical application on the pipe line system with internal defect.

• 한국생산제조학회지
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• 제23권6호
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• pp.642-646
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• 2014

This research describes the measurement of roll parallelism by a laser interferometer. Parallelism among rolls is an important factor for improving the precision of printing devices. A laser interferometer, which is a device for the precise measurement of distance, can be utilized to measure parallelisms between rolls. To measure distance between two rolls by using a laser interferometer, the laser must not be severed during measurement. To achieve this condition, a linear motion guide was installed to each roll being measured, and continuous measurement of distance between two rolls was implemented by the simultaneous control of two mirrors installed on the guides. The method to measure parallelism between two rolls presented in this research can be utilized to improve printing precision by enhancing parallelism between rolls in printing devices.

• 대한기계학회논문집
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• 제17권6호
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• pp.1431-1440
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• 1993

This paper presents a new NC machine performance test and calibration system. In order to measure NC machine erros in simpler, and less time-comsuming way, some indirect measuring systems such as circular disk system and double ball bar system have been developed instead of laser interferometer. But these indirect measuring systems have shown their limits in identifying each of NC machine error sources in absolute numerical value. Therefore, we developed an unique NC machine error measurement system which provides a simple measuring process like other conventional indirect methods and still can indentify each of NC machine error sources in absolute numerical value.

• Journal of Welding and Joining
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• 제17권1호
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• pp.71-76
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• 1999

The real-time holographic interferometer with digital high-speed camera is applied to the experimental study of laser induced plasma/plume in pulsed Nd:YAG laser welding. A pulsed Nd:YAG laser with 1.2 kW average power is applied to generate laser induced plume. The recording speed of the high-speed camera is 3,000 f/s. The high speed photographs of weld plume without another visualization method, are compared with the visualization photographs with holographic interferometer. The radiation intensity from the laser induced plume is recorded by the high speed photographs, which fluctuated during laser radiation and disappeared after laser end. The density distribution of the plume is recorded by the holographic visualization method. The experimental results show the process of generation of the laser induced plasma/plume, and give the feasibility of quantitative measurement of laser induced plume in laser welding.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.35-40
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• 2004

The total relaxed stress in annealing and the thermal strain/stress were obtained from the identification of the residual stress-free state using electronic speckle pattern interferometry (ESPI). The residual stress fields in case of both single and film / substrate systems were modeled using the thermo-elastic theory and the relationship between relaxed stresses and displacements. We mapped the surface residual stress fields on the indented bulk Cu and the 0.5 $\mu\textrm{m}$ Au film by ESPI. In indented Cu, the normal and shear residual stress are distributed over -1.7 GPa to 700 MPa and -800 GPa to 600 MPa respectively around the indented point and in deposited Au film on Si wafer, the tensile residual stress is uniformly distributed on the Au film from 500 MPa to 800 MPa. Also we measured the residual stress by the x-ray diffractometer (XRD) for the verification of above residual stress results by ESPI...

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.397-402
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• 2003

The FM demodulation method for a bulk homodyne laser interferometer is presented. The Doppler frequency that represents the surface velocity of a vibrating object is obtained by using the bulk homodyne laser interferometer, and converted to the voltage signal by using the proposed analogue FM demodulation circuit. The DC offsets of the interferent signals that are obtained from the bulk homodyne interferometer are eliminated by using a simple subtraction. The new method for compensation of the asymmetry of each channels is presented. The light power variation of the interferometer is normalized by using the Auto Gain Controller(AGC). The proposed FM demodulation algorithm is proved by the theoretical method, and validated by the experimental results. In experiments, the proposed FM demodulation algorithm is compared with the conventional demodulation methods.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.225-226
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted environmental error which is caused from refraction in the air. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on Data Fusion method which reduces the environmental error in the heterodyne laser interferometer. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.271-272
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• 2007

In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, called cross talks. This fact limits the usefulness of an laser interferometer. To compensate the error, we propose a WLS(weighted least square) algorithm, which will reduce nonlinearity error and make a better optimization in heterodyne laser interferometer.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.170-174
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• 1999

The main scale of linear scale greatly affects on the precision of displacement measurement. Especially when needing the long range measurement, the length of main scale should be increased accordingly. In this paper, we propose a linear scale that uses laser interference pattern as main scale for long range measurement. The linear scale is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase differences of 0, $\pi$ /4, $\pi$ /2, 3 $\pi$ /4 are arranged on the panel. The experimental results show that signals of - quadratic photo diode, A, B,$\overline{A}$ and $\overline{B}$ are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.