• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.139-144
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• 2008

Micro electrochemical machining was investigated to machine micro internal features. This method uses a micro disk tool electrode and can easily machine micro features inside of a micro hole, which are very difficult to make by the conventional processes. In order to limit the machining area and localize the electrochemical dissolution, ultra short pulses were used as power source and a micro disk electrode with insulating layer on its surface was used as a tool electrode. By electrochemical process, internal features, such as groove array, were fabricated on the stainless steel plate.

• Korean Journal of Materials Research
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• v.9 no.12
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• pp.1245-1251
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• 1999

Phase-change optical disk very rapid recording, high densification of data, resulting in high feedback rate and good C/N(carrier to noise) ratio of a feedback signal. However, repetitive thermal energy may cause the deformation of a disk or the lowering of an eliminability and a cyclability of the recording. The lowering of the cyclability can be reduced by insertion of thin layer of ZnS-$SiO_2$ dielectric thin film in appropriate disk structure between the upper and lower part of the recording film. Using the Taguchi method, optimum conditions satisfying both the optimized quality characteristic values and the scattering values for film formation were found to be the target R.F. power of 200W, the substrate R.F. power of 20W, the Ar pressure of 6mTorr, and the electrode distance of 6cm. From the refractive index data, the existence of the strong interaction between the electrode distance and Ar pressure was confirmed, and so was the large effect of the electrode distance on transmittance. According to the analysis of TEM and XRD, the closer the electrode distance was, the finer was the grain size due to the high deposition rate. However, the closer electrode distance brought the negative effect on the morphology of the film and caused the reduction of transmittance. AFM and SEM analyses showed that the closer the electrode distance was, the worse was the morphology due to the high rate of the deposition. Under optimum condition, the deposited thin film showed a good morphology and dense microstructure with less defects.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.46-46
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• 2010

최근 상압 저온 플라즈마에서 발생되는 UV와 화학적 활성종들을 이용한 체내 조직 분해 처리, 피부 및 혈관 표면 처리, 대기 및 액체 정화 처리 등의 생체 의료적 응용이 활발하게 연구되고 있다. 이러한 플라즈마에서는 처리 대상 외의 생체 조직의 손상을 최소화 할 수 있는 기술이 필요하며, 이 조건이 확보된 상태에서 처리 목표 대상에 따른 플라즈마 특성, 즉 선택적 생성종 제어와 플라즈마 온도를 안정적으로 관리할 수 있어야 한다. 인체 내부 조직에 대하여 유효 활성종 등의 직접적인 작용이 필요할 경우 밀리미터 크기 이하의 미세침습성 플라즈마를 활용하게 된다. 이 경우 방전 특성을 간접적으로만 관측 가능하여 주변 조직과 플라즈마 간의 상호 영향 등이 고려되어야 하므로 직접적인 관측이 가능한 인체 외부에서 발생된 플라즈마에 비해서 더욱 정교한 제어가 필요하다. 본 연구에서는 미세 침습성 플라즈마의 발생 메커니즘 및 특성 분석을 수행하여 척추 디스크 탈출 치료 시술에 활용하기 위한 연구를 수행하였다. 처리 대상 조직으로의 접근 시 주변 조직의 손상을 막기 위하여 수 밀리미터 이하의 미세한 전극을 이용하였으며 전기 전도성을 띄는 인체 내부에서 절연공간의 확보를 위해 전극 표면에서 기포를 발생시켜 플라즈마 방전이 가능한 조건을 확보하였다. 또한 플라즈마 방전이 중단되거나 혹은 갑작스런 열 플라즈마로의 천이로 인해 생체에 심각한 열 손상을 초래하는 현상을 방지하기 위하여 발생 플라즈마와 주변 디스크간의 상호 영향을 통한 플라즈마의 동적인 특성 변화 및 안정적인 플라즈마 발생을 위한 조건을 도출하였다. 이를 실제 임상 실험에 활용한 결과를 소개하고 아울러 차세대 의료용 플라즈마 발생 장치 개발을 위한 플라즈마 학계의 관심을 이끌어 보고자 한다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.2
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• pp.835-840
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• 2011

In this study, a disk-type piezoelectric transformer was fabricated. Its diameter was 50 mm and thickness was 4.5 mm. The driving and generating electrode with their gap of 1mm were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface of driving and generating part on the top surface was divided into 2, 4 and 8 pieces. The electrical characteristics with its electrode variation was measured in the range of load resistance of $100{\Omega}{\sim}10_{K\Omega}$. We investigated quantitively the influence of the set-up voltage ratio.

• 한국전기화학회:학술대회논문집
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• 2002.10a
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• pp.35-35
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• 2002

• Journal of Sensor Science and Technology
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• v.3 no.2
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• pp.40-49
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• 1994

Potentiometric cell oxygen sensors using $CaF_{2}$ were fabricated for monitering the oxygen partial pressure in the low temperature range ($300^{\circ}C{\sim}$500^{\circ}C). The disk type oxygen sensors consist of a reference electrode: Air($O_{2}:21%$)|Pt, a solid electrolyte $CaF_{2}$, and a sensing metel Pt electrode. And the change in open circuit emf of the disk type cell was about 45mV for the oxygen concentration range, $0.1%{\sim}10%$, at the cell temperature of $400^{\circ}C$. Also, the reference electrode incorporated type sensor showed the change of 40mV for 0.1% to 10% oxygen partial pressure range.

• Journal of the Korean Electrochemical Society
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• v.6 no.2
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• pp.145-152
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• 2003

Capacitance of a hybrid capacitor that has characteristics of both electrolyte capacitor and supercapacitor is determined by anode surface covered with oxide layer. In this study, optimal condition processes for anode to fabricate a high voltage hybrid capacitor was investigated. We mixed aluminum powder having mean particle size of $40{\mu}m$ with NaCl powders at weight ratio of 4 : 1 and prepared a disk type electrode after annealing at various temperature. After dissolving NaCl in $50^{\circ}C$ distilled water, heat treatment, eletropolishing, chemical treatment, and the first and the second etching of Al disk were conducted. In each process, capacitances and resistances of the disk measured by ac-impedance analyzer were compared to find its optimum treatment condition. Also, the surface morphology of treated disks were observed and compared by SEM. After the second etching, the Al disk was anodized at 365V to make an anode of hybrid supercapacitor that can be operated at 300V, Capacitance and resistance of the anodized Al disk electrode was compared with those of commercialized conventional aluminum electrolytic capacitor at different frequencies.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.167-172
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• 2005

In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.5
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• pp.17-22
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• 2005

In this study, a disk-type piezoelectric transformer was fabricated. Its diameter was 50[mm] and thickness was 4.5[mm]. The driving and generating electrode with their gap of 1[mm] were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface ratio of driving and generating part on the top surface was the range of 1.4:1 to 3:1. We investigated the electrical characteristics with the variation of its thickness and the electrode surface ratio of driving and generating part in the range of load resistance of 100${[\Omega]}\~70{[k\Omega]}$.. Form the experimental results, their influence on the set-up voltage ratio were investigated quantitively and qualitatively.