• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.442-442
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• 2010

공정 플라즈마 장치에서 이중 주파수법을 이용하여 실시간 유전박막 두께 측정법에 대한 보상연구를 하였다. 이중 주파수법은 유전박막과 플라즈마 쉬스를 간단한 전기적인 등가회로로 모델링하여 유전박막의 두께를 측정하는 방법이다. 이중 주파수법의 문제는 측정탐침의 인가전압에 따른 유전박막의 두께 측정치가 다르다는 점이다. 플라즈마 쉬스를 선형 저항만으로 등가하였기 때문에, 쉬스의 인가전압에 상관없이 쉬스 저항의 값이 일정하다는 가정이 존재한다. 그러나 쉬스 저항은 쉬스의 인가전압에 종속적이면서 비선형적인 특성을 갖는다. 측정 탐침에 출력 전압이 인가될 때 쉬스 양단에서 인가전압에 따른 쉬스의 등가저항의 비선형성을 고려하여 측정 탐침에 증착된 유전박막의 커패시턴스성분에 대한 방정식을 Numerical analysis로 풀어 유전박막의 두께 측정값을 보상하였다. 보상된 위의 방법으로 다양한 RF파워, 압력에 따라 $Al_2O_3$박막의 두께를 실시간으로 측정하여 비교하였다. 그 결과 이 방법은 낮은 플라즈마 밀도(${\sim}10^9cm^{-3}$)에서도 인가전압에 따른 유전 박막두께측정의 오차를 줄일 수 있었다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.10
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• pp.905-913
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• 2017

In this work, a method of size optimization is proposed to maximize the natural frequency of a rod that consists of a hidden shape in one part and an exposed shape in the other. The frequency response function of a rod composed of two parts is predicted by using the frequency response functions of each of the parts instead of the shapes of the parts. The mass and stiffness matrices of the rod are obtained by using the mass and stiffness matrices of the equivalent vibration systems, which are obtained by applying the experimental modal analysis method to the frequency response functions of the parts. Through several numerical examples, the frequency response function obtained by using the proposed method is compared with that of a rod to validate the prediction method based on equivalent vibration systems. A size optimization problem is formulated for maximizing the first natural frequency of a combined rod, which is replaced with an equivalent vibration system, and a rod structure is optimized by using an optimization algorithm.

• Journal of the Korean Vacuum Society
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• v.3 no.4
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• pp.457-465
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• 1994

유도결합 플라즈마의 해석식으로 양극성 확산, 정상상태를 가정한 확산식, 열평형식과 변위전류 를 무시한 맥스웰 식을 사용하였다. 해석기법으로는 유한 차분법과 적분법을 축대칭 2차원(R, Z)모델에 적용하였다. 유도 결합 플라즈마장치의 RF 전력, 압력, 석영창 두께, 차폐부 높이에 따른 전자온도, 전자 밀도, 등가 정항 등가 인덕턴스 효율 결합계수 K, Q-factor의 변화를 구하였다. 특히 등가정항은 진공챔 버, 차폐부 및 코일의 손실저항을 고려하여 구하였다.

• Korean Journal of Optics and Photonics
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• v.23 no.1
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• pp.17-22
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• 2012

An equivalent lens is a lens which has the same total power of refraction and the same paraxial imaging characteristics for the marginal rays as another lens, but has a different axial thickness. In this study, an analytic lens conversion from a thick lens to its equivalent lens is investigated, then it is shown that the equivalent lens is a solution of a quadratic equation. Every thick lens corresponds to one of two real roots of this quadratic equation. Therefore, except in the case of a unique solution, the equation has a conjugate solution, the other of the two roots. The conjugate solution has the same axial thickness, power, and paraxial imaging characteristics, but it has different shape and aberration characteristics. The characteristics of an equivalent lens and its conjugate solution are examined by using a sample lens.

• Korean Journal of Optics and Photonics
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• v.9 no.4
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• pp.251-257
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• 1998

The equivalent lens conversion is extended to lens group conversion, and the more generalized conversion method is developed. The new conversion method can be used for hte direct thick-to-thick lens conversion. By using the equivalent lens conversion, a thin lens system can be converted into various thick lens system which have different axial thicknesses, but those converted lens systems have identical paraxial property and similar aberration characteristic. For an example, the equivalent lens conversion technique is applied to modification of a thelephoto lens design. The axial thicknesses of the front group elements of the system are reduced to 75% of their original values. The modified design by using the equivalent lens conversion has same focal length with original, and it has smaller aberration changes than the other design of which axial thicknesses are changed only.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.506-506
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• 2012

플라즈마 제트 장치를 이용하여 두 개의 플라즈마 plume을 평행하게 발생시킨다. 두 개의 플라즈마 plume의 전위차를 전극에서부터 plume 끝단까지 위치별로 측정한다. 두 개의 플라즈마 제트 장치에 인가하는 전압의 위상이 서로 반대일 경우, 두 개의 플라즈마 plume의 전위차로 인하여 plume사이에 streamer가 발생한다. 대기압에서 streamer가 발생하려면 십여 kV 이상의 전위차가 있어야 한다. 반대로 동일한 위상의 전압을 인가할 경우, 두 개의 플라즈마 plume의 전위차는 없기 때문에 plume사이에 streamer가 발생하지 않는다. 두 개의 플라즈마 제트 장치를 등가회로로 구성하고 위상차로 인한 streamer 발생여부를 확인한다. 그리고 두 개의 플라즈마 plume 사이에 발생한 streamer와 플라즈마 제트 장치를 등가회로로 구성하여 발생시킨 streamer 양을 비교한다. 이를 통해 플라즈마 plume의 전위차를 확인한다.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.56-62
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• 2004

We present a diffraction grating interferometer of large equivalent wavelength specially designed for flatness testing of rough surfaces. Two transmission diffraction gratings are illuminated on the object under test by use of two measurement beams with different angles of incidence, which yields a large equivalent wavelength. This interferometer design minimizes unnecessary diffraction rays and the systematic error caused by the diffraction gratings, and provides a large working distance and easy alignment. To improve the measurement accuracy, phase shifting technique is applied and the equivalent wavelength error caused by defocus is calibrated. Test results obtained from mirror surfaces and machined rough surfaces are discussed.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.4 no.1
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• pp.241-250
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• 2000

Chua's circuit is a simple electronic network which exhibits a variety of bifurcation and attractors. The circuit consists of two capacitors, an inductor, a linear resistor, and a nonlinear resistor. In this paper, a transmitter and a receiver using two identical Chua's circuits are proposed and synchronizations and secure communication of a lossy equivalent transmission are investigated. Since the synchronization of the lossy equivalent transmission system is impossible by coupled synchronization, theory having both the drive-response and the coupled synchronization is proposed. The proposed method is synthesizing the desired information with the chaos circuit by adding the information signal to the chaos signal in the lossy equivalent transmission system.

• Journal of the Society of Naval Architects of Korea
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• v.38 no.1
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• pp.72-85
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• 2001

A study for the structural strength evaluation on the doubler plate subjected to the biaxial in-plane compression has been performed through the systematic evaluation process. In order to estimate the proper static strength of doubler plate, elasto-plastic large deflection analysis is introduced including the contact effect between main plate and doubler. The characteristics of stiffness and strength variation are discussed based on their results. A1so, in order to compare the doubler structure with the original strength of main plate without doubler, a simple formula for the evaluation of the equivalent flat plate thickness is derived based on the additional series analysis of flat plate structure. Using this derived equation, the thickness change of a equivalent flat plate is analyzed according to the variation of various design parameters of doubler plate and some design guides are suggested in order to maintain the original strength of main plate without doubler reinforcement. Finally, correlation between derived equivalent flat plate formula and the developed buckling strength formulas by author et a1. is discovered and these relations are formulated for the future development of simple strength evaluation formula of doubler plate structure.

• Journal of the Society of Naval Architects of Korea
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• v.37 no.4
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• pp.92-105
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• 2000

A study for the structural strength evaluation on the slender doubler plate has been performed through the systematic evaluation process. In order to estimate the proper static strength of doubler plate subjected to the longitudinal in-plane compression, elasto-plastic large deflection analysis is introduced including the contact effect between main plate and doubler. The characteristics of stiffness and strength variation are discussed based on their results. Also, in order to compare the doubler structure with the original strength of main plate without doubler, a simple formula for the evaluation of the equivalent flat plate thickness is derived based on the additional series analysis of flat plate structure. Using this derived equation, the thickness change of a equivalent flat plate is analyzed according to the variation of various design parameters of doubler plate and some design guides are suggested in order to maintain the original strength of main plate without doubler reinforcement. Finally, correlation between derived equivalent flat plate formula and the developed buckling strength formulas by author et al. is discovered and these relations are formulated for the future development of simple strength evaluation formula of doubler plate structure.