A Study on the Structural Dynamic Design of TFT-LCD FAB using Frequency Response Function (주파수 전달함수를 이용한 차세대 TFT-LCD FAB 구조물의 동적설계)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 2004.11a
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- pp.184-187
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- 2004