• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.287-288
• /
• 2006

This paper introduces an approach of method to compensate accuracy error of diagonal direction. The measurement of squareness error is an important parameter in performance test of two axis Linear Motor and this exerts influence on accuracy error of diagonal test. However, previous knowledge management approaches are limited in deviation measurement of optical axis or restrictive elements of diagonal measurements using laser interferometer. But this proposed method calculated diagonal accuracy error which was occurred by squareness error and compensated squareness error using orthogonal correction method of PMAC. From this result, diagonal accuracy error is significantly reduced. This experimental results show that geometric error of squareness error is easily corrected by dynamic coordinate correction.