• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.63-63
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• 2003

플라즈마 공정은 DRAM, 이종접합 양극성 트랜지스터(HBTs), 레이저, 평면도파로(planar lightwave circuit)와 같은 전자소자 및 광조자 제작에 있어서 핵심 공정중의 하나이다. 최근 미세 구조의 크기가 극도로 감소하게 됨에 따라 실제 소작 제작에 있어서 미세한 모양을 식각하는 공정이 매우 중요하게 되었다. 그 중에서 고밀도 유도결합 플라즈마(high density inductively coupled plasma)를 이용한 기술은 빠르고 정확한 식각률, 우수한 식각 균일도와 높은 재현성 때문에 습식식각 기술보다 선호되고 있다. 본 연구는 평판형(planar) 고밀도 유도결합 플라즈마 식각장치를 이용하여 BCl$_3$와 BCl$_3$/Ar 플라즈마에 따른 AlGaAs/GaAs의 식각결과를 비교 분석하였다. 공정 변수는 ICP 소스(source power)파워, RIE 척(chuck) 파워, 공정 압력, 그리고 Ar 조성비(0-100%)이었다. BCl$_3$에 Ar을 첨가하게 되면 순수한 BCl$_3$ 플라즈마에서의 AlGaAs/GaAs 식각률(> 3000 $\AA$/min) 보다 분당 약 1000$\AA$ 이상 높은 식각률(>4000 $\AA$/min)을 나타내었다. 이 결과는 Ar 플라즈마의 이온보조(ion-assisted)가 식각률 증가에 기인한다고 예측된다. 그리고 전자주사 현미경(SEM)과 원자력간 현미경(AFM)을 사용하여 식각 후 표면 거칠기 및 수직 측벽도 둥을 분석하였다. 마지막으로 XPS를 이용하여 식각된 후에 표면에 남아 있는 잔류 성분 분석을 연구하였다. 본 결과를 종합하면 BCl$_3$에 기초한 평판형 유도결합 플라즈마는 AlGaAs/GaAs 구조의 식각시 많은 우수한 특성을 보여주었다.79$\ell/\textrm{cm}^3$, 0.016$\ell/\textrm{cm}^3$, 혼합재료 2는 0.045$\ell/\textrm{cm}^3$, 0.014$\ell/\textrm{cm}^3$, 혼합재료 3은 0.123$\ell/\textrm{cm}^3$, 0.017$\ell/\textrm{cm}^3$, 혼합재료 4는 0.055$\ell/\textrm{cm}^3$, 0.016$\ell/\textrm{cm}^3$, 혼합재료 5는 0.031$\ell/\textrm{cm}^3$, 0.015$\ell/\textrm{cm}^3$, 혼합재료 6은 0.111$\ell/\textrm{cm}^3$, 0.020$\ell/\textrm{cm}^3$로 나타났다. 3. 단일재료의 악취흡착성능 실험결과 암모니아는 코코넛, 소나무수피, 왕겨에서 흡착능력이 우수하게 나타났으며, 황화수소는 펄라이트, 왕겨, 소나무수피에서 다른 재료에 비하여 상대적으로 우수한 것으로 나타났으며, 혼합충진재는 암모니아의 경우 코코넛과 펄라이트의 비율이 70%:30%인 혼합재료 3번과 소나무수피와 펄라이트의 비율이 70%:30%인 혼합재료 6번에서 다른 혼합재료에 비하여 우수한 것으로 나타났으며, 황화수소의 경우 혼합재료에 따라 약간의 차이를 보였다. 4. 코코넛과 소나무수피의 경우 암모니아가스에 대한 흡착성능은 거의 비슷한 것으로 사료되며, 코코넛의 경우 전량을 수입에 의존하고 있다는 점에서 국내 조달이 용이하며, 구입 비용도 적게 소요되는 소나무수피를 사용하는 것이 경제적이라고 사료된다. 5. 마지막으로 악취제거 미생물균주를 접종한 소나무수피 70%와 펄라이트 30%의 혼합재료를 24시간동안 장기간 운전

• Korean Journal of Optics and Photonics
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• v.11 no.4
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• pp.271-278
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• 2000

We have fabricated and analyzed the lasing characteristics of 1.3$\mu\textrm{m}$ Spot-Size-Converter (SSC) integrated Fabry-Perot (FP) laser diodes, which are very promising light sources for optical subscriber networks. SSC-LDs has been developed by BIB (buttjoint-built-in) coupling and selective MOVPE growth. High-performances were achieved such as the slope efficiency from the SSC facet of 0.23-0.32 mW/mA, the full-width at the half maximum of the far-field pattern (FFP) of 9.5$^{\circ}$~12.3$^{\circ}$, the alignment tolerances of $\pm$2.3$\mu\textrm{m}$ and $\pm$2.5$\mu\textrm{m}$ within the extra-coupling loss of 1 dB for the vertical and parallel directions, respectively. These experimental results were compared to theoretical ones in order to clarify the operational problems and give a good design direction of the fabricated SSC-LDs. It was revealed that an asymmetric output power from the facets, an irrelevancy of FFP and the waveguide structure around SSC facet region, and a poor temperature characteristics were originated from the scattering in the BIB and SSC sections and SHB effect in the active section for the first time.t time.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.8
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• pp.735-741
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• 2016

Increasing the total length of waveguide-below-cutoff array(WBCA) as it is used to the duct in order to enhance shielding effectiveness, the design could cause higher cost, higher levels of difficulties in construction and the interruption a flow velocity. The multi-layered WBCA can compensate for this problem, which can be designed by crossing each waveguide layer. By conducting simulations from 2-layer to 8-layer structure, it can be observed that the shielding effectiveness increases from 52 dB to 75 dB. Comparing with the original WBCA in a shape of mono layer rectangular, our proposed waveguide becomes similar with the original value as the number of crossing layer increases. In addition, the analysis with the flow of fluid in the duct installed multi-layered WBCA are required. We demonstrate this analysis by doing the flow of fluid simulation, and concluded that the multi-layered WBCA has loss of flow of fluid less than unit rectangular WBCA.

• Journal of Genetic Medicine
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• v.6 no.2
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• pp.146-154
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• 2009

Multiplex ligation dependent probe amplification (MLPA) is a PCR-based method to detect gene dosage. Since its introduction, MLPA has been used to test a large number of genes for major deletions or duplications. Genetic testing, as a diagnostic tool for genetic disease, has been used primarily to identify point mutations, including base substitutions and small insertions/deletions, using PCR and sequence analysis. However, it is difficult to identify large deletions or duplications using routine PCR- gel based assays, especially in heterozygotes. The MLPA is a more feasible method for identification of gene dosage than another routine PCR-based methods, and better able to detect deleterious deletions or duplications. In addition to detection of gene dosage, MLPA can be applied to identify methylation patterns of target genes, aneuploidy during prenatal diagnoses, and large deletions or duplications that may be associated with various cancers. The MLPA method offers numerous advantages, as it requires only a small amount of template DNA, is applicable to a wide variety of applications, and is high-throughput. On the other hand, this method suffers from disadvantages including the possibility of false positive results affected by template DNA quality, difficulties identifying SNPs located in probe sequences, and analytical complications in quantitative aspects.

• Journal of Chest Surgery
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• v.39 no.10 s.267
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• pp.765-769
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• 2006

Background: Nuss procedure is a minimally invasive technique for correcting the pectus excavatum. But there are some limitations of correcting the complex anomaly or grown-up patients. Material and Method: we retrospectively reviewed 135 consecutive patients who underwent repair of pectus excavatum by the Nuss procedure and its modifications between November 1999 and December 2004. We analyzed the computed tomography, age on operation, operative technique, and complications. Result: We operated 135 patients of pectus excavatum during 62 months. Total number of operations about Nuss procedure is 216, including bar removal procedure of 64 cases, redo Nuss procedures of 47 cases. We modified the point of bar insertion to the hinge point, made a shoulder in the bar to prevent a displacement. And then we changed the fixation material from Vicryl to steel wire. If the patients are old, we retract the sternum during bar rotation and fixation. Until 2002, the number of redo Nuss operations were 17, complications were 23. but, after modifications, the number of redo Nuss operation were 0, complications were 2. Conclusion: This result indicates that our modifications of Nuss operation is effective, and could decrease the number of redo Nuss operation and complications.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.27 no.4
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• pp.421-428
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• 2009

In Korea, the change of river flux due to seasons change is so considerable because of the mountainous terrain with the sharp slope and leaned rainfall. This unfavorable natural condition and the difficulties in precise grasping of the river status made the water resource management difficult so that the necessity of the precise river management has been continuously increased. In this study, a precise river-region DEM using the latest equipments of ALS and MBES is constructed. After acquiring DEM from each senor on the river region, a single DEM was generated by combining them. Also, the field inspection was carried out in the overlapped region of ALS and MBES in order to verify the quality of DEM. The verification of DEM was carried out by comparison between TINs obtained from the combined result of ALS and MBES and the surveying result from total station at more than 10 points in the selected two test areas. As a result, NO.1-area's RMSE of 0.322m and 0.113m are obtained for NO. 1 and NO. 2 areas, respectively. The result of this study shows the feasibility of DEM construction for river region using ALS and MBES as seen in the case of NO. 2 area. At the same time, it was appeared that a better method on the data fusion should be developed as seen in the result of NO. 1 area.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.147-153
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• 1998

The strain characteristics of a fiber optic Fabry-Perot pressure sensor with high sensitivity using a $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ (N/O/N) diaphragm is experimentally investigated. A 600 nm thick N/O/N diaphragm was fabricated by silicon anisotropic etching technology in 44 wt% KOH solution. An interferometric fiber optic pressure sensor has been manufactured by using a fiber optic Fabry-Perot intereferometer and a N/O/N diaphragm. The 2 cm length fiber optic Fabry-Perot interferometers in the continuous length of single mode fiber were produced with two pieces of single mode fiber coated with $TiO_{2}$ dielectric film utilizing the fusion splicing technique. The one end of the fiber optic Fabry-Perot interferometer was bonded to a N/O/N diaphragm. and the other end was connected to an optical setup through a 3 dB coupler. For the N/O/N diaphragm sized $2{\times}2\;mm^{2}$ and $8{\times}8\;mm^{2}$, the pressure sensitivity was measured 0.11 rad/kPa and 1.57 rad/kPa, respectively, and both of the nonlinearities were less than 0.2% FS.

• Journal of Sensor Science and Technology
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• v.11 no.3
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• pp.155-162
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• 2002

The sensing properties of carbon monooxide were investigated as a function of mixing ratio and the lamination structure of 3mol% ZnO-doped $SnO_2$ and 3mol% $SnO_2$-doped ZnO. The lamination structures were fabricared monolayer, double layer, and hetero layer of $SnO_2$, Zno, and theirs mixture composition using thick film process. There was no second phase by the reaction of $SnO_2$ and ZnO. The conductance was decreased by the addition of ZnO in $SnO_2$, but it was increased with the addition of $SnO_2$ in ZnO. The conductance was increased with temperature and the inlet of CO. There was no improvement of sensitivity in the structure of mono- and double-layer. The hetero-layer structure, however, of $SnO_2$ 3ZnO-ZnO $3SnO_2$ showed the higher resistivity and the highest sensitivity. Ohmic characteristics was confirmed by the linear properties for I-V measurements.

• Korean Journal of Optics and Photonics
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• v.9 no.6
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• pp.428-432
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• 1998

We fabricated 1$\times$8 array of GaAs/AlGaAs quantum well infrared photodetectors for the long wavelength infrared detection which is based on the bound-continuum intersubband transition, and characterized its electrical and optical properties. The device was grown on SI-GaAs(100) by the molecular beam epitaxy and consisted of 25 period of 40 ${\AA} $ GaAs well and 500 ${\AA} $ $Al_{0.28} Ga_{0.72}$ As barrier. To reduce the possibility of interface states only the center 20 ${\AA} $ of the well was doped with Si ($N_D=2{\times}10^{18} cm^{-3}$). We etched the sample to make square mesas of 200$\times$200 $\mu\textrm{m}^2$ and made an ohmic contact on each pixel with Au/Ge. Current-voltage characteristics and photoresponse spectrum of each detector reveal that the array was highly uniform and stable. The spectral responsivity and the detectivity $D^＊$ were measured to be 180,260 V/W and $4.9{\times}10^9cm\sqrt{Hz}/W$ respectively at the peak wavelength of $\lambda$ =7.8 $\mu\textrm{m}$ and at T=10 K.

• Composites Research
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• v.33 no.6
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• pp.371-376
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• 2020

The adhesive strength can be improved through surface treatment. The most common method is to improve physical bonding by varying the surface conditions. This study presents the effect of laser surface treatment on the adhesive strength of CFRP. The surface roughness was patterned using a 1064 nm laser. The effects of the number of laser shots and the direction and length of the pattern on the adhesion of the CFRP/CFRP single joint were investigated through tensile tests. Tests according to ASTM D5868 were performed, and the bonding mechanism was determined by analyzing the damaged surface after a fracture. The optimized number of the laser shots and the optimized depth of the roughness should be required to increase the bonding strength on the CFRP surface. When considering the shear stress in the tensile direction, the roughness pattern in the direction of 45° that increases the length of the fracture path in the adhesive layer resulted in an increase of the adhesive strength. The surface treatment of the bonding surface using a laser is a suitable method to acquire a mechanical bonding mechanism and improve the bonding strength of the CFRP bonding joint. The study on the optimized laser process parameters is required for utilizing the benefits of laser surface processing.