• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.263-266
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• 2000

This paper is focused on the fabrication of reliable Al/$TiO_2-SiO_2$/Mo antifuse, which could operate at low voltage along with the improvement in on/off state properties. Mo metal as the bottom electrode had smooth surface and high melting point, and was being kept as-deposited $SiO_2$film stable. The breakdown voltage of TiO_2-SiO_2$ stacked antifuse was better than that of same-thickness (100 $\AA$) $SiO_2$antifuse because of Ti diffusion in $SiO_2$. The improving breakdown-voltage and on-resistance can be obtained as well as the influence of hillock in the bottom metal is reduced by using double insulator. Low on-resistance (65 $\Omega$) and low programming voltage (9.0 V) can be obtained in these antifuses with 250 $\AA$ double insulator.

• Membrane Journal
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• v.15 no.1
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• pp.15-21
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• 2005

The integrally skinned asymmetric PAN ultrafiltration membranes were annealed for reducing the pore size. The effect of the chemical structure of two PAN polymers (homo- and copolymer) on annealing was investigated. The annealing of PAN polymer was strongly affected by the chemical structure of the polymer. In other words, the annealing effect of the copolymer was much larger than that of the homopolymer due to its less rigid structure of the main chain. Before annealing, the membranes were usually preheated in water in terms of the complete removal of remained solvents in the membranes. The annealing effect was bigger when no preheating. However, the preheating of the membrane before annealing at high temperatures leads to an increase in the pore size of membranes. The surface of the membranes was slightly negative and the salt rejection of PAN nanofiltration membrane was in the following order: R(Na₂SO₄) > R(NaCl) > R(MgSO₄) > R(CaCl₂). This salt rejection behavior could be explained by the Donnan equilibrium and the electroneutrality.

• Membrane Journal
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• v.24 no.5
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• pp.409-415
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• 2014

This study is aimed to separate propylene and propane using membrane process instead of NCC(Naphtha Cracking Center) $C_3$ splitter. Membrane process is a low energy consumption and eco-friendly process while $C_3$ splitter requires high energy consumption in petrochemical processes. In this study, high performance facilitated transport membrane (FTM) is used for propylene/propane separation. FTM module was prepared on top of porous polyetherimide hollow fiber using PVP/$AgBF_4$/TCNQ. We developed simulation program predicting the membrane separation properties under operation conditions. Separation properties of FTM module for propylene and propane were obtained from the simulation program based on the pure gas permeation data. Based on these results, it is predicted that an one-stage membrane process provides 99.5% of propylene at permeate side from a binary gas mixture of 95/5 vol% $C_3H_6$ / vol% $C_3H_8$ supplied as a feed gas.

• The korean journal of orthodontics
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• v.32 no.3 s.92
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• pp.227-234
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• 2002

In order to investigate the action mechanism of protein kinase C on $K^+$ channel in osteoblastic cell, effects of phorbol 12, 13-dibutyrate on human osteoblast-like cells (G292) were studied by patch clamp technique with cell-attacked configuration. 111 this experiment, 45pS ion channel was dominant in G292 cell line according to their approximate conductances in symmetrical 140mM KCl saline at holding potential of 60mV. In torrent-voltage relationship, reversal potential was 5.5mV at the condition of potassium enriched saline in the pipette and -27 mV at the condition of standard extracellular saline In the pipette. Phorbol 12, 13-dibutyrate 10nM increased the open probability of 45pS channel and staurosporine, an inhibitor of protein kinase C, suppressed this effect. Phorbol 12,13-dibutyrate moved the reversal potential of 45pS channel to more negative potential and increased the single channel current at the same membrame potential. In order to check the activation of protein kinase C in G292 cell by phorbol 12,13-dibutyrate, western blot of protein kinase C was performed. Phorbol 12,13-dibutyrate $0.1{\mu}M$ translocated protein kinase C from cellular compartment to membrane compartment of the cell. These findings suggest that phorbol 12,13-dibutyrate, one of phorbol esters, activate 45pS channel In G292 cell and affect cell membrane potential, that regulate cellular function.

• Membrane Journal
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• v.22 no.1
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• pp.46-53
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• 2012

Low-temperature carbon dioxide stripping by a vacuum membrane stripping technology was studied as a substitute for the stripping process in a conventional aqueous amine process. Composite membranes with $5{\mu}m$ thickness of PDMS (polydimethylsiloxane) dense layer on a PE (polyethylene) support layer were prepared by a casting method and used as a membrane contactor for $CO_2$ stripping. Aqueous amine solutions of 30 wt% MEA (monoethanolamine) were used as absorbents. $CO_2$ flux was examined under various operating conditions by varying the vacuum pressure (60~360 mmHg (abs.)), stripping temperature ($25{\sim}80^{\circ}C$), $CO_2$ loading (0.5~0.7). $CO_2$ stripping flux increased with increasing temperature and $CO_2$ loading as well as decreasing vacuum pressure. PDMS-PE composite membrane has stability for vacuum stripping process compared with PTFE porous membrane.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.93.1-93.1
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• 2010

반사방지막은 태양전지 표면에서의 광 반사를 낮춰주며, Si wafer 표면에서의 carrier의 재결합을 줄이는 passivation 역할을 한다. 이를 위한 다양한 물질이 반사방지막으로 사용된다. 단일박막은 passivation 효과가 미미하여 최근 passivation 향상에 도움이 되는 이중구조 반사방지막이 널리 연구되어지고 있다. 하지만 물질이 다양해짐에 따라 공정시간 및 비용이 늘어나고, passivation에 최적화된 물질사용이 필수적으로 요구되는 단점이 있다. 따라서 본 연구에서는 기존에 passivation 효과가 뛰어나다고 알려진 SiNx의 굴절률 가변을 통하여 이중구조를 갖는 박막을 반사방지막으로 이용하여 그 특성을 비교, 분석하였다. SiNx 이중반사방지막은 0.8 Torr~1 Torr의 압력에서 $450^{\circ}C$의 기판온도로 PECVD를 이용하여 증착되었으며 이때의 plasma power는 180mW/$cm^2$으로 고정 하였다. 굴절률 1.9 및 2.3을 갖는 가스 조성비를 이용하여 각 layer의 두께를 20/60nm, 30/50nm, 40/40nm로 가변하였다. 샘플 제작 후 Sun-Voc 측정을 통하여 implied Voc 및 효율을 측정하였다. 단일반사방지막을 사용한 샘플의 경우 608mV의 implied Voc가 측정되었으며, FF는 82.8%, 효율은 17.6%로 측정되었다. 가장 우수한 특성을 나타낸 20/60nm의 두께로 증착된 샘플의 경우 implied Voc는 625mV, FF는 84.1%, 효율은 18.3%로 우수한 결과를 나타내었다. 반사도 측정 결과 단일반사방지막은 2.27%로 높았으나 SiNx 이중구조를 이용한 반사방지막은 1.67%로 낮은 값을 확인 하여 이중구조의 반사방지막이 반사도 저감 및 passivation 효과 향상에 도움이 되는 것을 확인할 수 있었다.

• Proceedings of the Korean Fiber Society Conference
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• 1998.10a
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• pp.469-472
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• 1998

상업적으로 유용한 대부분의 합성고분자막들은 상전환법(phase inversion process)이라는 방법에 의해서 제조된다. 이 제조공정에서는 단일 고분자(homogeneous polymer)용액에 존재하는 용매를 비용매와 교환함으로써 액체로부터 고체로 상이 전환된다. 그리고 pore의 크기나 pore의 크기분포와 같은 막의 구조를 결정하는 요인은 일반적으로 용질의 입자크기 또는 분자크기 및 화학적 성질에 기인한다[1-3]. (중략)

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.37-37
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• 2008

고온에서 안정적인 DLC막을 성막하기 위해 PECVD공정에서 실리콘을 첨가하여 제조하였다. 기존의 실리콘첨가 DLC막과는 다르게 고온에서 생성됨으로 마이크로 클러스터 형태의 DLC구조로서 disordered 영역이 넓게 존재하고 있어 I(D)/I(G)비에서의 변화가 있는 것이 관찰되었다. 실리콘 양이 증가할수록 값이 낮아지는 것이 관찰되는데 이는 실리콘량이 증가하면서 수소의 위치에 실리콘이 결합하면서 sp3 단일구조형태의 코팅 막을 만드는 것이 관찰된다. 고온 어닐링효과로 내부구조에서 다량의 sp2구조가 관찰되는 것으로서 DLC막이 어느 정도 흑연화되지만, 실리콘이 SiC에서 SiOx로 $SiO_2$와 SiOH막으로 바뀌는 면서 마찰계수가 낮은 DLC막을 유지할 것으로 기대되며, XPS와 FT-IR분석에 의해 이러한 상들의 존재를 관찰할 수 있었다. 특히 공정상 TMS이 증가하면 첨가된 Si에 의해 형성되는 막이 초기부터 OH기를 다량 포함하고 있는 것을 알 수 있었고, 온도 상승에 의해서 실리콘표층에 더욱 많은 SiOx계열의 물질이 생성되는 것이 명확하게 발견되었다.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.178-179
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• 2003

단일기본모드 수직공진표면광레이저(VCSELs)는 광네트워크, 광연결, 광저장 및 레이저 프린팅 등 다양한 분야에 응용이 가능한 소자로서 많은 관심과 연구가 증대되고 있다. 일반적으로 VCSELs은 공간홀버닝(spatial hole burning)과 열 렌즈효과(thermal lensing)로 인하여 단일기본모드로 동작하기가 쉽지 않다. 지금까지 여러 가지 연구가 진행되고 있는데 대표적인 예로서 VCSEL의 공진기를 길게 하거나 출력경 표면을 정교하게 식각하는 방법, 그리고 이온 주입구경과 산화막을 함께 사용한 것들이 있다. (중략)

• Journal of the Korean Magnetics Society
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• v.12 no.4
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• pp.127-131
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• 2002

We fabricated MTJ devices that have doubly oxidized tunnel barrier using plasma oxidation method to from oxidized AlO$\sub$x/ tunnel barrier. Doubly oxidation I, which sputtered 10 ${\AA}$-bottom Al layer and oxidized it with oxidation time of 10 s. Subsequent sputtering of 13 ${\AA}$-Al was performed and the metallic layer was oxidized for 50, 80 and 120 s., respectively. Doubly oxidation II, which sputtered 10 ${\AA}$-bottom Al layer and oxidized it varying oxidation time for 30∼120 s. Subsequent sputtering of 13 ${\AA}$-Al was performed and the metallic layer was oxidized for 210 sec. Double oxidation process specimen showed MR ratio of above 27％ in all experiment range. Singly oxidation process. 13 ${\AA}$-Al layer and oxidized up to 210 s, showed less MR ratio and more narrow process window than those of doubly oxidation. Cross-sectional TEM images would that doubly oxidized barrowers were thinner and denser than singly oxidized ones. XPS characterization confirmed that doubly oxidation of Fe with bottom insulating layer. As a result, doubly oxidation could have superior MR ratio in process extent during long oxidation time because of preventing oxidation of bottom magnetic layer than singly oxidation.