• Journal of the KSME
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• v.29 no.5
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• pp.525-537
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• 1989

본교에서는 정압 공기베어링의 특성 및 다공질 정압 공기베어링의 현황, 문제점등에 대한 개괄적 인 소개를 하였다. 이상에서와 살펴본 바와 같이 정압 공기베어링은 고속, 고정도를 요하는 각종 산업용기기의 부품으로써 연구개발, 응용되어 왔으며 결과적으로 기술한계극복에 많은 기여를 하 였다. 앞으로의 첨단기술을 위주로 한 각종 가공, 측정분야에 있어서도 공기베어링은 많은 역할을 할 것이며 특히 다공질베어링을 중심으로 한 고강성 정압 공기베어링에 대한 기대는 매우 크다고 할 수 있다.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.157.1-157.1
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• 2005

• Korea lubricating oil industries association bulletin
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• no.34
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• pp.4-10
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• 1989

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.19.2-19.2
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• 2009

금속을 용해 응고시킬 때 생성되는 소위, 주조 결함이나 소결금속 내의 기공은 재료의 성능이나강도를 현저하게 낮추는 결함으로서 예전부터 기피되어 왔다. 또한, 재료공정에있어서도 여하의 기공이나 기포가 없는 치밀한 고강도 및 고기능성 재료를 개발하는 것에 최대한의 주의와 관심을 기울여 왔다. 그렇지만, 우리가 자연계의 천연물이나 인공물을 둘러보면 그 대부분이다공질임을 쉽게 눈치챌 수 있다. 예를 들어 목재, 지엽등의 생물을 시작해서 콘크리트 등의 인공물, 우리 체내의 뼈도 전형적인 다공질구조로 구성되어 있다. 이러한 구조로부터 재료의 재질제어 이외에 구조제어라는 새로운 어프로치를 고려할 수 있고, 최근 들어, 금속재료에 있어서도 이러한 다공질구조에 관한 연구가활성화되어 충격흡수재, 생체재료, 베어링재료 등의 다양한응용이 전개되고 있다. 특히, 원주상의 방향성 기공을 갖는 로터스금속은 기존의 복잡한구조의 다공질금속보다 뛰어난 기계적 성질을 갖는다. 이러한 다공질금속은 일방향응고할 때 생성하는 과포화가스원자를 석출시켜 기공을 일방향으로 성장시킨다. 즉, 융점에서의 고상과 액상의 가스 용해도 차를 이용하는 것으로서 응고시에 고용할 수 없는 가스원자가 기공을 형성한다. 이와같이 제조한 방향성 다공질금속은 BT (인플란트, 생체적합성, 저탄성, 경량), ST (초음속기엔진부품, 경량), IT (고성능수냉모듈), ET(고온촉매, 필터)의 분야로의 응용이 기대된다. 본 강연에서는 방향성 다공질금속의 제조법, 특성 및 응용을 포함하여그 동안의 연구성과 및 앞으로의 과제 등을 소개하고자 한다.

• Journal of computational fluids engineering
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• v.13 no.2
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• pp.62-67
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• 2008

This study aims to investigate numerically the static stiffness characteristics of porous air bearing and to estimate appropriate permeability values of porous medium. In particular, a new roughness model is proposed and implemented into the commercial CFD code (FLUENT Ver. 6.2) by using C language based user subroutine. The predicted results are extensively compared with experimental data. The roughness model is also validated through comparison with the results from open literature. It is found that the predictions for static stiffness are in good agreement with experimental data. Therefore, the suggested model based on the roughness Reynolds number can be used in studying the stiffness characteristics of porous air bearing effectively. In addition, numerical simulations of various diameter size and conditions are conducted. According the results, it is expected that the static stiffness of porous air bearing has the non-linear characteristics.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.75-78
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• 2005

In this paper, an experimental study on porous air bearing stiffness for ultra precision positioning system was performed. In general manufacturer provide bearing stiffness under specific air pressure, but the air pressure used in the field is different. Therefore it is necessary to know the stiffness of air bearing under the pressure used in the field. In order to know that, experimental device which can realize actual operating conditions was made. Using this device, static and dynamic stiffness of air bearing can be obtained. As a result, displacement error occurred around 1 $\mu$m at recommended load.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.48-52
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• 2007

A lot of researches have been done in order to investigate the dynamic characteristics of the aerostatic porous bearing, most of them used analytical approaches and only a few used experimental approaches. However the experimental condition used in the previous experimental approaches was not realistic, where the porous bearing has been fixed and only the mass supported by the bearing was allowed to move vertically. The dynamic stiffness obtained by those experimental setups may be different with the real case where the mass and the bearing move together in horizontal direction. In this paper, the dynamic characteristics of the horizontally moving aerostatic circular porous air bearings are investigated by the experimental approach. The experimental apparatus was designed to realize its real operating condition used in most industrial applications. The experimental results were compared with the previous experimental ones.

• 연구논문집
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• s.34
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1170-1176
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• 2006

This study aims to investigate numerically the static and dynamic stiffness characteristics of porous air bearing and to estimate appropriate permeability values of porous medium. In particular, a new roughness model is proposed and implemented into the commercial CFD code (FLUENT Ver.6.2). The predicted results are extensively compared with experimental data for static cases. The roughness model is also validated through comparison with the results from open literature. For the dynamic cases, the deforming and re-meshing technique is used for describing fluid-solid interactions. It is found that the predictions for static stiffness are in good agreement with experimental data and the dynamic stiffness appears to be relatively smaller than the static stiffness. In addition, moving and dynamic analysis of air bearing seems to be possible to provide qualitative predictions even if there are somewhat discrepancies quantitatively, compared to experimental data.