Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2006.05a
  • /
  • Pages.1170-1176
  • /
  • 2006
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Numerical Investigation on Static and Dynamic Stiffness Characteristics of Porous Air Bearing Considering Roughness Effects

조도효과를 고려한 다공질 공기베어링의 강성 특성에 관한 수치 해석 연구

  • 권혁록 (중앙대학교 대학원) ;
  • 노경철 (중앙대학교 대학원) ;
  • 정순철 (중앙대학교 대학원) ;
  • 심형섭 (중앙대학교 대학원) ;
  • 홍사훈 (중앙대학교 대학원) ;
  • 이성혁 (중앙대학교 기계공학부) ;
  • 이재응 (중앙대학교 기계공학부) ;
  • 지홍규 (삼성전자(주) 생산기술 연구소) ;
  • 이동진 (삼성전자(주) 생산기술 연구소) ;
  • 류제형 (삼성전자(주) 생산기술 연구소) ;
  • 최형길 (삼성전자(주) 생산기술 연구소) ;
  • 김혁 (삼성전자(주) 생산기술 연구소)
  • Published : 2006.05.01
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Abstract

This study aims to investigate numerically the static and dynamic stiffness characteristics of porous air bearing and to estimate appropriate permeability values of porous medium. In particular, a new roughness model is proposed and implemented into the commercial CFD code (FLUENT Ver.6.2). The predicted results are extensively compared with experimental data for static cases. The roughness model is also validated through comparison with the results from open literature. For the dynamic cases, the deforming and re-meshing technique is used for describing fluid-solid interactions. It is found that the predictions for static stiffness are in good agreement with experimental data and the dynamic stiffness appears to be relatively smaller than the static stiffness. In addition, moving and dynamic analysis of air bearing seems to be possible to provide qualitative predictions even if there are somewhat discrepancies quantitatively, compared to experimental data.

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