• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1993.04a
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• pp.80-84
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• 1993

공기베어링은 기체으 압축성에 의한 평균화 효과로 운전정밀도가 우수하고 기체의 낮은 점도에 의한 효과로 마찰력과 열발생량이 매우 적으며, 사용가능 온도구간이 저온에서 고온까지 넓고 프로세스 계통내의 기체를 윤활제로 사용할 수 있기 때문에 그 경우 불순물에 의한 오염이 문제되지 않는 장점등이 있다. 이와 같은 특성과 더불어 공기베어링은 지지 물체를 완전히 부상시켜 운전하므로써 마찰$\cdot$마모와 온도변화에 다른 열변형이 문제되지 않는다. 이러한 장점으로 인해서 공기베어링은 현재 정밀기기의 미끄럼면, 각종 측정장치의 테이블지지 기구로 많이 사용되고 있다. 반면 공기베어링의 단점으로는 기체의 낮은 점성계수로 인해서 부하능력이 적고 강성, 감쇄계수 또한 적다. 그리고 기체의 압축성으로 인해 뉴메틱 헤머라는 불안정 현상이 생기기도 한다. 본 연구에서는 스퀴즈 효과를 이용한 능동 공기베어링을 설계, 제작하여 실험하였다. 본 연구의 목적은 강성과 감쇄 계수가 작은 공기 베어링의 단점을 보완하기 위해 드러스트베어링을 대상으로 능동베어링을 설계, 제작하여 그 특성을 연구하고 기초 설계자료를 축적하는데 있다.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1996.04b
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• pp.99-105
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• 1996

공기 베어링은 마찰과 열 발생이 적고 회전 정밀도가 우수하여 고속 회전하는 축을 지지하는 용도로 많이 사용되고 있다. 그러나 공기 베어링도 유체 베어링이라면 어느것이나 갖는 Whirl 불안정성이라는 치명적인 결점을 갖는데 현재 이것의 발생 시점이 공기 베어링을 사용하는 시스켐에 있어서 고속화의 한계로 되어있다. 본 논문에서는 불안정성의 원인이 되는 동압 발생을 억제할 수 있는 방법으로 베어링의 위치가 축의 위치에 대해 일정한 각도 지연을 갖도록 제어되는 것을 제안하고 여러 각도지연 크기와 제어게인에 따른 안정특성을 이론 해석을 통해 조사하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.8
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• pp.2501-2507
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• 1996

In this paper actively controlled air bearing is investigated to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled air beairng is composed of an air bearing, a gap sensor, a controller, and a piezo actuator. By controlling the position of air bearing with piezo actuator, the position of floating object is controlled. In this study the proportional-Integral-Derivative controller is employed. Active air bearing is investigated numerically and experimentally. There is good agreement between the simulation and the experimental results. It is shown that the stiffness and damping characteristics and positioning experimental results. It is shown that the stiffness and damping characteristics and positioning accuracy of air bearing can be improved by means of adopting actively controlled air bearing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.73-74
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.269-275
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• 2005

This article describes the development on a new style active hybrid bearing system including both merits of an aerostatic bearing system and a magnetic bearing system. The developed active hybrid bearing system has several advantages: exact rotation, robust controller against the variation of a disturbance, improvement of stiffness and a damper of the system at a high-speed operation, and constraints of the heat generated by a bias current. In order to measure a rotating error due to the change of a cutting force and the variation of a system parameter, a CCS (Cylindrical Capacity displacement Sensor) was used.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.32-39
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• 2001

This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external force can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the vapidity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.3 s.174
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• pp.543-549
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• 2000

Results of theoretical investigations of the stability characteristics of an actively controlled externally pressurized air journal bearing are presented. Proportional control and derivative control are used for the control algorithm of active air bearing. The stability characteristics of the actively controlled bearing operating at zero steady-state eccentricity is investigated with the step jump method. The speed at onset of instability is raised for both proportional control and derivative control of bearing. Proportional control increased the stability threshold without affecting the whirl ratio. But for derivative control of bearing, stability threshold increase is accompanied by a parallel reduction of the whirl ratio. Results show active control of bearing can be adopted for the stability improvement of air journal bearing.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1321-1325
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• 2013

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.