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Low-temperature synthesis of graphene structure using plasma-assisted chemical vapor deposition system

  • Lee, Byeong-Ju;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.212-212
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    • 2016
  • 2차원 탄소나노재료인 그래핀은 우수한 물성으로 인하여 광범위한 분야로 응용이 가능할 것으로 예상되어 많은 주목을 받아왔다. 이러한 그래핀의 응용가능성을 실현시키기 위해서는 보다 손쉽고 신뢰할 수 있는 합성방법의 개발이 필요한 실정이다. 그래핀의 합성 방법들로 흑연을 물리적 및 화학적으로 박리하거나, 특정 결정표면 위에 방향성 성장의 흑연화를 통한 합성, 그리고 열화학기상증착법(Thermal chemical vapor deposition; T-CVD) 등의 합성방법들이 제기되었다. 이중 T-CVD법은 대면적으로 두께의 균일성이 높은 그래핀을 합성하기 위한 가장 적합한 방법으로 알려져 있다. 그러나 일반적으로 T-CVD공정은 원료 가스인 탄화수소가스를 효율적으로 분해하기 위하여 $1000^{\circ}C$부근의 온공정이 요구되며, 이는 산업적인 응용의 측면에서 그래핀의 접근성을 제한한다. 따라서 대면적으로 고품질의 그래핀을 저온합성 할 수 있는 공정의 개발은 필수적이다. 본 연구에서는, 플라즈마를 이용하여 원료가스를 효율적으로 분해함으로써 그래핀의 저온합성을 도모하였다. 퀄츠 튜브로 구성된 수평형 합성장치는 플라즈마 방전영역과 T-CVD 영역으로 구분되며, 방전되는 유도결합 플라즈마는 원료가스를 효율적으로 분해하는 역할을 한다. 합성을 위한 기판과 원료가스로는 각각 전자빔 증착법을 통하여 300nm 두께의 니켈 박막이 증착된 실리콘 웨이퍼와 메탄가스를 이용하였다. 저온합성공정의 변수로는 인가전력과 합성시간으로 설정하였으며, 공정변수의 영향을 확인함으로써 그래핀의 저온합성 메커니즘을 고찰하였다. 연구결과, 인가전력이 증가되고 합성시간이 길어짐에 따라 원료가스의 분해효율과 공급되는 탄소원자의 반응시간이 보장되어 그래핀의 합성온도가 저하가능함을 확인하였으며, $400^{\circ}C$에서 다층 그래핀이 합성됨을 확인하였다. 또한 플라즈마 변수의 보다 정밀한 제어를 통해 합성온도의 저온화와 그래핀의 결정성 향상이 가능할 것으로 예상된다.

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CdTe/ZnTe 이중 양자점의 결합에 따른 광학적 특성

  • Kim, Su-Hwan;Jin, Seong-Hwan;Choe, Jin-Cheol;Lee, Hong-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.197.1-197.1
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    • 2015
  • 현재 화합물 반도체 나노구조는 적외선 검출기, 레이저, 발광 다이오드, 단전자 트랜지스터, 태양전지 등과 같은 고효율 광전자 소자에서의 응용을 위해 활발한 연구가 진행 되고 있다. 특히 양자점은 3차원으로 구속되어 있는 상태 밀도를 갖고 있어 레이저 응용 시 낮은 문턱 전류 밀도, 높은 이득, 높은 열적 안정성을 기대되고 있다. 하지만 양자점의 크기가 불규칙적이고 운반자 수집의 한계로 인하여 기대 이하의 온도 안정성을 갖고 있어 이를 극복하기 위해 양자점의 크기와 운반자 수집을 제어하기 위해 다양한 방법이 연구되고 있다. 본 연구에서는 분자 선속 에피 성장법(Molecular Beam Epitaxy; MBE)과 원자 층 교대 성장법(Atomic Layer Epitaxy; ALE)으로 크기가 다른 CdTe/ZnTe 이중 양자점을 ZnTe 장벽층의 두께에 변화하면서 성장 후 광학적 특성을 연구하였다. 저온 광루미네센스 측정(Photoluminescence; PL) 측정 결과 장벽층 두께가 작아질수록 작은 양자점의 광 루미네센스의 세기가 감소하면서 큰 양자점의 세기가 증가하는 것을 관찰할 수 있었는데, 이는 장벽층 두께가 작아질수록 작은 양자점의 운반자들이 큰 양자점으로 이동되는 양이 많아지기 때문이다. 또한 장벽층 두께가 작아질수록 큰 양자점의 반치폭(Full Width at Half Maximum; FWHM)이 단층 양자점의 반치폭 보다 감소하는 것을 관찰 할 수 있었는데 이는 작은 양자점과 결합된 큰 양자점이 작은 양자점의 strain을 받아 크기의 균일함이 증가했기 때문이다. 이와 같은 결과 두 양자점이 결합된 이중 양자점 구조가 단층 양자점의 한계인 운반자 수집과 크기의 균일함을 향상할 수 있는 좋은 구조임을 제시하고 있다.

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Optimal Design of Controller for Ultra-Precision Plane X-Y Stage (초정밀 평면 X-Y 스테이지의 최적제어기 설계)

  • Kwak, L. K.;kim, J. Y.;Yang, D. J.;Ko, M. S.;You, S.;Kim, K. T.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.342-347
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    • 2002
  • After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

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Photocatalytic Property of Nano-Structured TiO$_2$ Thermal Sprayed Coating - Part II: TiO$_2$ -WO$_3$ Coating - (나노구조 TiO$_2$용사코팅의 미세조직 제어 공정기술 개발과 광촉매 특성평가 - Part II: TiO$_2$- WO$_3$ 코팅 -)

  • 이창훈;최한신;이창희;김형준;신동우
    • Journal of Welding and Joining
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    • v.21 no.4
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    • pp.46-55
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    • 2003
  • TiO$_2$-WO$_3$(8.2wt%) coatings were prepared by the APS (Atmospheric Plasma Spraying) process to clarify the relationship between the process parameters(H$_2$ gas flow rate of plasma 2nd gas and spraying distance) of the APS coating and photo-decomposition efficiency kinetics of the MB(methylene blue) aqueous solution decomposition and to understand the effect of addition of WO$_3$ on photocatalytic properties of TiO$_2$ sprayed coating. Further, the temperature and velocity of flying particles were measured by DPV-2000 to investigate the relationship between microstructure of coatings and process parameters. Properties of coatins were investigated by XRD, SEM, XPS, RAMAN, UV/VIS spectrometer. In case of the TiO$_2$-WO$_3$(8.2wt%) coating, it had a lower anatase fraction than that of pure-TiO$_2$ coatings because of flying in the higher temperature plasma plume by the heavy weight of TiO$_2$, WO$_3$. And, when WO$_3$ added powders were spayed, the doping effects of W ions substituted into the Ti ion sites was not occured during melting and solidification cycles of spraying. It was found that the addition of WO$_3$ was ineffective effective on increasing photo-decomposition efficiency of TiO$_2$ sprayed coating.

The Mobile Health-Care Garment System for Measurement of Cardiorespiratory Signal (ECG와 호흡 측정이 가능한 모바일 헬스케어 의류 시스템)

  • Kim, Jeong-Do;Kim, Kap-Jin;Chung, Gi-Su;Lee, Jung-Hwan;Ahn, Jin-Ho;Lee, Sang-Goog
    • The KIPS Transactions:PartA
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    • v.17A no.3
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    • pp.145-152
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    • 2010
  • Most wearable system for mobile healthcare applications consists of three parts. The first part is the sensing elements based on bio-signal, the second is the circuit module for control, data acquisition and wireless communication and control and the third is garment with a built-in electrodes and circuits. The existing healthcare garment systems have to find a solution to signal-wire and uncomfortable and inappropriate electrode to long-term attachment. Even if the wireless communication is used for healthcare garment system, the interface between sensors and circuits have to use wires. To solve these problems, this paper use electrode using PEDOT coated PVDF nanoweb for ECG signal and PVDF film sensor for respiratory signal. And, we constructed garment network using digital yarn of 10um, and transmitted ECG and respiratory signal to mobile phone through the integrated circuit with bluetooth called station To evaluate feasibility of the proposed mobile healthcare garment system, we experimented with transmission and measurement of ECG and respiratory signal using nanoweb electrode and digital yarn. We got a successful result without noise and attenuation.

Control of Metal-Oxide Nanostructures for $H_{2}-Alcohol$ Fuel Cells (수소-알코올연료전지를 위한 금속-산화물 나노구조제어)

  • Park, Kyung-Won;Song, You-Jung;han, Sang-Beom;Lee, Jong-Min
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.06a
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    • pp.141-145
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    • 2007
  • Due to their excellent catalytic activity with respect to methanol oxidation on platinum at low temperature, platinum nanosized catalysts have been a topic of great interest for use in direct methanol fuel cells (DMFCs). Since pure platinum is readily poisoned by CO, a by-product of methanol electrooxidation, and is extremely expensive, a number of efforts to design and characterize Pt-based alloy nanosized catalysts or Pt nanophase-support composites have been attempted in order to reduce or relieve the CO poisoning effect. In this review paper, we summarize these efforts based upon our recent research results. The Pt-based nanocatalysts were designed by chemical synthesis and thin-film technology, and were characterized by a variety of analyses. According to bifunctional mechanism, it was concluded that good alloy formation with $2^{nd}$ metal (e.g., Ru) as well as the metallic state and optimum portion of Ru element in the anode catalyst contribute to an enhanced catalytic activity for methanol electrooxidation. In addition, we found that the modified electronic properties of platinum in Pt alloy electrodes as well as the surface and bulk structure of Pt alloys with a proper composition could be attributed to a higher catalytic activity for methanol electooxdation. Proton conducting contribution of nanosized electrocatalysts should also be considered to be excellent in methanol electrooxidation (Spillover effect). Finally, we confirmed the ensemble effect, which combined all above effects, in Pt-based nanocatalsyts especially, such as PtRuRhNi and $PtRuWO_{3}$, contribute to an enhanced catalytic activity.

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Effect of Grain Size Control and Binder Additions on the Soft Magnetic Properties of Fe-based Nanocrystalline Powder Cores (Fe계 나노결정 분말코아의 연자성특성에 미치는 입도제어 및 바인더 첨가의 영향)

  • Cho E.K.;Cho H.J.;Kwon H.T.;Cho E.M.;Ryu H.H.;Sohn K.Y.;Park W.W.
    • Journal of Powder Materials
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    • v.13 no.4 s.57
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    • pp.256-262
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    • 2006
  • The amorphous $Fe_{73}Si_{16}B_7Nb_3Cu_1$ alloy strip was pulverized to get a flake-shaped powder after annealing at $425^{\circ}C$ for 90 min and subsequently ground to obtain finer flake-shaped powder by using a ball mill. The powder was mixed with polyimide-based binder of $0.5{\sim}3wt%$, and then the mixture was cold compacted to make a toroidal powder core. After crystallization treatment for 1 hour at $380{\sim}600^{\circ}C$, the powder was transformed from amorphous to nanocrystalline with the grain size of $10{\sim}15nm$. Soft magnetic characteristics of the powder core was optimized at $550{\sim}600^{\circ}C$ with the insulating binder of 3wt%. As a result, the powder core showed the outstanding magnetic properties in terms of core loss and permeability, which were originated from the optimization of the grain size and distribution of the insulating binder.

Coloration Study of Red/Yellow β-FeOOH Nanorod using NH4OH Solution (NH4OH를 이용한 적황색 β-FeOOH 나노로드 길이에 따른 색상제어 연구)

  • Yu, Ri;Kim, IllJoo;Yun, JiYeon;Choi, Eun-Young;Pee, Jae-Hwan;Kim, YooJin
    • Journal of Powder Materials
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    • v.23 no.5
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    • pp.343-347
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    • 2016
  • Fe-based pigments have attracted much interest owing to their eco-friendliness. In particular, the color of nanosized pigments can be tuned by controlling their size and morphology. This study reports on the effect of length on the coloration of ${\beta}$-FeOOH pigments prepared using an $NH_4OH$ solution. First, rod-type ${\beta}$-FeOOH is prepared by the hydrolysis of $FeCl_3{\cdot}6H_2O$ and $NH_4OH$. When the amount of $NH_4OH$ is increased, the length of the rods decreases. Thus, the length of the nanorods can be adjusted from 10 nm to 300 nm. The color of ${\beta}$-FeOOH changes from orangered to yellow depending on the length of ${\beta}$-FeOOH. The color and phase structure of ${\beta}$-FeOOH is characterized by UV-vis spectroscopy, CIE Lab color parameter measurements, transmission electron microscopy (TEM), scanning electron microscopy (SEM), and powder X-ray diffraction (XRD).

Modeling, Simulation, and Control of a Polyaniline/Carbon-Nanotube Polymer Actuator (폴리아닐린/탄소나노튜브 폴리머 액츄에이터의 모델링, 시뮬레이션 및 제어)

  • Sohn, Ki-Won;Yi, Byung-Ju;Kim, Sean-Jeong;Kim, In-Young;Kim, Sun-I.
    • Journal of Biomedical Engineering Research
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    • v.28 no.3
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    • pp.348-354
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    • 2007
  • Polymer actuators, which are also called as smart materials, change their shapes when electrical, chemical, thermal, or magnetic energy is applied to them and are useful in wide variety of applications such as microelectromechanical systems (MEMS), machine components, and artificial muscles. For this study, Polyaniline/carbon-nanotube polymer actuator that is one of electroactive polymer actuators was prepared. Since the nonlinear phenomena of hysteresis and a step response are essential considerations for practical use of polymer actuators, we have investigated the movement of the Polyaniline/carbon-nanotube polymer actuator and have developed an integrated model that can be used for simulating and predicting the hysteresis and a step response during actuation. The Preisach hysteresis model, one of the most popular phenomenological models of hysteresis, were used for describing the hysteretic behavior of Polyaniline/carbon-nanotube polymer actuator while the ARX method, one of system identification techniques, were used for modeling a step response. In this paper, we first expain details in preparation of the Polyaniline/carbon-nanotube polymer then present the mathematical description of our model, the extraction of the parameters, simulation results from the model, and finally a comparison with measured data.

Change of Calcium Carbonate Crystal Size at steady state in CMSMPR(Continuous Mixed Suspension Mixed Produce Removal) Crystallizer (연속식결정화기 정상상태에서 탄산칼슘 결정크기 변화)

  • Han, Hyun Kak
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.7
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    • pp.714-719
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    • 2017
  • The controlled synthesis of inorganic materials with a specific size and morphology is an important factor in the development of new materials in many fields, such as nanoparticles, medicine, electronics, semiconductors, pharmaceutical sand cosmetics. Solution crystallization is one of the most widely used separation processes in the chemical and pharmaceutical industries. Calcium carbonate has attracted a great deal of attention in industry because of its numerous applications. The mean crystal size, crystal size distribution and morphology are important factors in the continuous crystallization process. In this study, the continuous crystallization of calcium carbonate by the calcium chloride process was investigated. The mean crystal size and crystal size distribution data were obtained by a particle size analyzer. The morphological imaging of the crystalswasper formed by SEM. Under steady state operation, the mean crystal size change was small, but increasing the input concentration and mixing rate increased the crystal size. In this operation, some aragonite was found, but the main crystal phase was calcite.