• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.98-98
• /
• 2013

완전화 박막이란 사용자가 원하는 용도에 맞게 최적의 성능을 구현하도록 제조된 박막을 의미하며 금속이나 화합물 박막을 제조하되 각종 구조 제어 Tool이나 증착 공정을 변화시켜 나노화와 다층화 또는 치밀화를 통해 구현될 수 있다. 최근 고성능의 증착 및 제어 Tool이 개발되고 빗각증착(Oblique Angle Deposition)이나 스침각 증착(Glancing Angle Deposition) 방법 등의 기술이 개발되면서 사용자 목적에 최적인 박막 소재를 제공하여 User-friendly한 응용을 위한 연구개발이 활발히 진행되고 있다. 완전화 박막 제조에 대한 시도는 1990년대에 일본에서 시작되었다. 일본에서는 산학연이 공동으로 참여하는 NEDO 프로그램을 통해 경질코팅을 이용한 Protective Layer를 제조하여 차단 방식에 의한 내식성 구현 연구를 수행하였다. 유럽에서는 제 7차 European Framework Program (7th FT)을 통해 2007년부터 CORRAL (Corrosion Protection with Perfect Atomic Layer) 프로젝트를 만들어 완전화 박막 연구를 진행하고 있다. 상기 프로젝트는 얇은 자연 산화막이 Bulk의 부식을 방지해주는 것에 착안하여 HIPIMS나 Filtered Arc 또는 ALD 공정을 이용하여 자연 산화막과 유사한 Defect-free 산화막을 제조하여 Barrier형 내식성 박막을 구현하는 것을 목표로 하고 있다. 본 연구에서는 완전화 박막 구현을 위한 연구동향을 파악하고 완전화 박막 제조를 위한 기술적 과제와 몇 가지의 시도에 대한 기초 연구 자료를 소개한다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.11a
• /
• pp.299-300
• /
• 2005

본 연구에서는 $SiO_2$ 판상체 위에 저굴절 및 고굴절 금속 산화물을 다층 교차 증착하여 Pearl Pigment를 sputtering 공법을 이용하여 증착하였다. Pearl Pigment는 Essential Macleod program 을 이용한 색상과 증착된 pigment의 색상이 파장에 따라 blue, violet, pink, red, orange, yellow, green 등(Wave length : 450$\sim$730 nm)으로 동일하게 나타났고, 기존의 제품에 비해 색상효과가 뛰어나고, 표면 morphology가 우수하였다. 주사전자현미경(SEM)으로 막 두께, 표면 조직 및 입자 크기를 측정하였고, 스펙트로미터를 사용하여 각각의 파장을 분석하였으며 EDS, XRD를 이용하여 정성 및 정량 분석을 하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.456-456
• /
• 2011

최근 차세대 디스플레이, 터치스크린, 전자파 차폐 및 흡수 등의 다양한 응용분야에 적합한 소재를 개발하기 위한 연구가 진행되고 있다. 현재 주로 사용되는 ITO박막은 희소원소인 인듐의 매장량 한계와 높은 비용이 문제시 되고 있기 때문에, 대체 재료의 개발이 시급하게 요구되고 있다. 탄소나노튜브(CNT)는 금속을 능가하는 이론적인 전기전도도를 갖고 있으며 높은 탄성등의 우수한 기계적 성질을 갖고 있어 다양한 차세대 응용에 있어서 최적의 재료로 주목을 받고 있다. 특히, CNT 기반의 투명전도막은 기존의 ITO 박막 보다 우수한 유연성이 기대되어 더욱 기대를 모으고 있다. 본 연구에서는, 최종 고순도 재료를 얻기까지 합성 및 정제에 많은 공정과 시간이 요구되는 고가의 단층벽 나노튜브(SWNT)를 이용하지 않고, 웨이퍼 기판 위에 수직배향 합성한 상태의 다층벽 나노튜브(MWNT)를 별도의 정제과정 없이 초음파 분산한 뒤, 스프레이 코팅법을 이용하여 고분자 기판 위에 투명전도막을 제작하였고, 이때 각기 다른 길이의 수직배향 MWNT를 이용하여 유연성 투명전도막의 전기적 특성에 미치는 MWNT 길이의 영향에 대해 알아보았다. MWNT는 아세틸렌가스를 이용하여 열CVD법으로 합성하였고, 합성시간을 제어함으로써 길이가 다른 MWNT를 얻을 수 있었다. 투명전도막 제조공정의 단순화를 위하여 이용한 MWNT의 초음파 분산 결과, $500{\mu}m$ 이하 길이의 MWNT에서 분산성이 현저히 빨라지는 것을 확인하였다. 한편, 제작한 MWNT 기반의 유연성 투명전도막은 원자간힘현미경 및 면저항 측정기를 이용하여 막 두께에 따른 면저항 특성을 조사하였다. 그 결과 응용 가능한 면저항을 갖는 MWNT 투명전도막의 두께는 최소 50 nm 이상이어야 함을 알았고, 특히 MWNT등의 접촉점(node) 수에 따른 접촉저항 및 전기전도경로(electric conductivity path)를 고려했을 때 최적의 MWNT 길이가 존재하는 것을 확인하였다.

• Membrane Journal
• /
• v.18 no.2
• /
• pp.185-190
• /
• 2008

In a previous study, we probed the potential of poly(styrene sulfonate) (PSS)/poly(diallyldimethylammonium chloride) (PDADMAC) nanofiltration (NF) membranes for the separation of monovalent anions, with an emphasis on the selective rejection of $F^-$. Remarkably, deposition of $(PSS/PBADMAC)_4PSS$ films on porous alumina supports yielded membranes that exhibited $Cl^-/F^-$ selectivity > 3 with minimal $Cl^-$ rejection, and a solution flux of $3.5m^3/m^2$-day at 4.8 bar. When the number of PSS/PDADMAC bilayers was increased from 4.5 to 5.5, however, $F^-$ rejection decreased from 73% to 50% and $Cl^-/F^-$ selectivity dropped to 1.9. Addition of another bilayer to form $(PSS/PDADMAC)_6$ PSS films resulted in a significant increase in $Cl^-$ rejection to give essentially no $Cl^-/F^-$ selectivity. The decrease of selectivity with deposition of more than 4.5 bilayers was not expected and it was unclear whether this characteristic was substrate independent. In this study, to investigate the effect of substrates on NF performance of multilayer polyelectrolyte membranes, PSS/PDADMAC films were deposited on 50 kDa polyethersulfone (PES) ultrafiltration supports instead of porous alumina supports. The results indicate that, although fluoride rejection and the number of bilayers at which a maximum $F^-$ rejection occurs are different, the trend is similar for both types of substrates. Therefore, we can conclude that the M: characteristics of multilayer polyelectrolyte membranes may be substrate independent.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.9
• /
• pp.42-47
• /
• 1998

We have fabricated electron-optical lens for micro E-beam system that can overcome the limitation of current E-beam lithography. Our electron-optical lens consists of multiple silicon electrodes which were fabricated by micromachining technology and assembled by anodic bonding. The assembled system was installed in UHV chamber to observe the emission characteristics of focused electrons by the electro-optical lens. We used STM(Scanning Tunneling Microscope) tip for electron source. By performing lithography with the focused electrons with PMMA(poly-methylmethacrylate) as E-beam resist. We could draw 0.13${\mu}{\textrm}{m}$ nano-scale lines.

• Journal of the Korean Magnetics Society
• /
• v.27 no.3
• /
• pp.87-91
• /
• 2017

Carbon-encapsulated Ni and metal Ni nanoparticles were synthesized by levitational gas condensation (LGC). Methane ($CH_4$) gas was used to coat the surface of the Ni nanoparticles. The Ni particles had a core diameter of 10 nm, and were covered by 2~3 nm thin carbon layers with multi-shells structure.The low magnetization comparing with the Ni nanoparticles without carbon-shell results in the coexistence of nonmagnetic carbon and a large surface spin percentage with disordered magnetization orientation for the nanoparticles. Biginelli reactions in the presence of L-proline and Ni and carbon encapsulated Ni nanoparticles were carried out to change the ratio between stereoisomers. The obtained S-enantiomers for 3,4-dihydropyrimidine (DHPM) using catalysts of Ni, and Ni@C was an excess of about ${\Delta}{\sim}7.4%$ and ${\Delta}{\sim}19.6%$, respectively. The nanopowders were fully recovered using magnet to reuse as a catalyst. The Ni@C was shown at same yield to formation of 3,4-DHPM, though it was recycled for catalyst in the reaction.

• Transactions of the Korean hydrogen and new energy society
• /
• v.26 no.2
• /
• pp.179-183
• /
• 2015

In this study, we propose a catalyst structure including enzyme and metal nano rod for glucose sensing. In the catalyst structure, glucose oxidase (GOx) and gold nano rod (GNR) are alternatingly immobilized on the surface of carbon nanotube (CNT), while poly(ethyleneimine) (PEI) is inserted in between the GOx and GNR to fortify their bonding and give them opposite polarization ($[GOx/GNR]_nPEI/CNT$). To investigate the impact of $[GOx/GNR]_nPEI/CNT$ on glucose sensing, some electrochemical measurements are carried out. Initially, their optimal layer is determined by using cyclic voltammogram and as a result of that, it is proved that $[GOx/GNR/PEI]_2/CNT$ is the best layer. Its glucose sensitivity is $13.315{\mu}AmM^{-1}cm^{-2}$. When it comes to the redox reaction mechanism of flavin adenine dinucleotide (FAD) within $[GOx/GNR/PEI]_2/CNT$, (i) oxygen plays a mediator role in moving electrons and protons generated by glucose oxidation reaction to those for the reduction reaction of FAD and (ii) glucose does not affect the redox reaction of FAD. It is also recognized that the $[GOx/GNR/PEI]_3/CNT$ is limited to the surface reaction and the reaction is quasi-reversible.

• Membrane Journal
• /
• v.25 no.6
• /
• pp.530-537
• /
• 2015

Photovoltaic (PV) modules are environmentally energy conversion devices to generate electricity via photovoltaic effect of semiconductors from solar energy. One of key elements in PV modules is "Backsheet," a multilayered barrier film, which determines their lifetime and energy conversion efficiency. The representative Backsheet is composed of chemically resistant poly(vinyl fluoride) (PVF) and cheap poly(ethylene terephthalate) (PET) films used as core and skin materials, respectively. PVF film is too expensive to satisfy the market requirements to Backsheet materials with production cost as low as possible. The promising alternatives to PVF-based Backsheet are hydrocarbon Backsheets employing semi-crystalline PET films instead of PVF film. It is, however, necessary to provide improved barrier property to water vapor to the PET films, since PET films are suffering from hydrolytic decomposition. In this study, a polyurethane adhesive with reduced water vapor permeation behavior is developed via a homogeneous distribution of hydrophobic silica nanoparticles. The modified adhesive is expected to retard the hydrolysis of PET films located in the core and inner skin. To clarify the efficacy of the proposed concept, the mechanical properties and electrochemical PV performances of the Backsheet are compared with those of a Backsheet employing the polyurethane adhesive without the silica nanoparticles, after the exposure under standard temperature and humidity conditions.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2002.11a
• /
• pp.477-480
• /
• 2002

Si-O-C(-H) thin film with a tow dielectric constant were deposited on a P-type Si(100) substrate by an inductively coupled plasma chemical vapor deposition (ICPCVD). Bis-trimethylsilymethane (BTMSM, H$_{9}$C$_3$-Si-CH$_2$-Si-C$_3$H$_{9}$) and oxygen gas were used as Precursor. Hybrid type Si-O-C(-H) thin films with organic material have been generated many voids after annealing. Consequently, the Si-O-C(-H) films can be made a low dielectric material by the effect of void. The surface characterization of Si-O-C(-H) thin films were performed by SEM(scanning electron microscope). The characteristic analysis of Si-O-C(-H) thin films were performed by X-ray photoelectron spectroscopy (XPS).

• Journal of Korean Society of Environmental Engineers
• /
• v.35 no.9
• /
• pp.636-642
• /
• 2013

In order to overcome drawbacks (i.e., filtration and recovery) of conventional powder type photocatalysts, nano-ZnO/Laponite/PVA (ZLP) photocatalyzed adsorption balls were developed by using in situ mixing of nanoscale ZnO as a photocatalyst, and Laponite as both adsorbent and supporting media in deionized water, followed by the poly vinyl alcohol polymerization with boric acid. The optimum mixing ratio of nano-ZnO:Laponite:PVA:deionized water was found to be 3:1:1:16 (by weight), and the mesh and film produced by PVA polymerization with boric acid might inhibit both swelling of Laponite and detachment of nanoscale ZnO from ZLP balls. Drying ZLP balls with microwave (600 watt) was found to produce ZLP balls with stable structure in water, and various sizes (55~500 ${\mu}m$) of pore were found to be distributed based on SEM and TEM results. In the initial period of reaction (i. e., 40 min), adsorption through ionic interaction between methylene blue and Laponite was the main removal mechanism. After the saturation of methylene blue to available adsorption sites for Laponite, the photocatalytic degradation of methylene blue occurred. The effective removal of methylene blue was attributed to adsorption and photocatalytic degradation. Based on the results from this study, synthesized ZLP photocatalyzed adsorption balls were expected to remove recalcitrant organic compounds effectively through both adsorption and photocatalytic degradation, and the risks of environmental receptors caused by detachment of nanoscale photocatalysts can be reduced.