• Journal of the Korean Electrochemical Society
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• v.10 no.2
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• pp.94-103
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• 2007

The transition of interconnection metal from aluminum alloy to copper has been introduced to meet the requirements of high speed, ultra-large scale integration, and high reliability of the semiconductor device. Since copper, which has low electrical resistivity and high resistance to degradation, has different electrical and material characteristics compared to aluminum alloy, new related materials and processes are needed to successfully fabricate the copper interconnection. In this review, some important factors of multilevel copper damascene process have been surveyed such as diffusion barrier, seed layer, organic additives for bottom-up electro/electroless deposition, chemical mechanical polishing, and capping layer to introduce the related issues and recent research trends on them.

• Journal of the Korean Chemical Society
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• v.21 no.5
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• pp.339-352
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• 1977

The authors' theory developed in the preceding Paper 1 was applied to plastic deformation of ceramics, metals, alloys and single crystals. For polycrystalline substances, the flow mechanisms due to dislocation movement and grain boundary movement appear together or separately according to the experimental conditions whereas for single crystals, only the mechanism of dislocation movement appears. The parameters appearing in the flow equations $({\alpha}_{d1},\;1/{\beta}_{d1})and\;({\alpha}_{gj}/X_{gj},\;1/{\beta}_{gj})$ (j = 1 or 2), and the activation enthalpies ${\Delta}H_{k1}^{\neq}$ (k = d or g) were determined and tabulated. Here, the subscript d1 indicates the first kind of dislocation flow units and gj expresses the jth kind of grain boundary flow units. The predictions of the theory were compared with experiment with good agreement. Concerning the activation enthalpies, it was found that ${\Delta}H_{d1}^{\neq}$ 〉{\Delta}H_{g1}^{\neq}$ and that the former agrees with the activation enthalpy for bulk self-diffusion whereas the latter agrees with the activation enthalpy for grain boundary self-diffusion. These facts support the adequacy of the authors' theory which is considered as a generalized theory of plastic deformation.

• Proceedings of the KWS Conference
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• 2010.05a
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• pp.21-21
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• 2010

AISI 316L 용접금속의 크롬/니켈 당량비에 따른 시그마상의 영향을 알아보기 위하여 응고모드가 다른 3종류의 플럭스 코어드 와이어를 제작하였다. AISI 316L 시편에 FCAW 프로세스를 적용한 용접재를 $650^{\circ}C$, $750^{\circ}C$, $850^{\circ}C$, $950^{\circ}C$에서 각 각 1H, 5H, 24H, 72H동안 열처리하였다. 크롬/니켈 당량비가 높을수록 즉, 크롬의 함량이 높아질수록 $\delta$-페라이트 함량은 증가하였으며, $\delta$-페라이트는 고온에서 시그마상으로 변태되었다. $\delta$-페라이트는 $650^{\circ}C$에서 가장 느리게 분해되었으며 $850^{\circ}C$에서 가장 활발히 분해되었다. 용접부의 특성상 크롬과 니켈 등의 합금원소에 의하여 응고온도범위가 넓어져 $950^{\circ}C$에서도 시그마상이 석출되었으며, 5시간 이상 유지 시 구형으로 존재하였다. 충격시험 시 시그마상에 의해 취약해진 inter-dendrite 를 따라 파면이 형성되었으며, $-100^{\circ}C$이하의 극저온에서는 시그마상의 양과 무관하게 충격흡수에너지는 0에 가까워졌다. 하지만 3%미만의 $\delta$-페라이트를 함유하는 AF모드에서 발생한 DDC와 미량의 시그마상은 충격흡수에너지에 결정적인 영향을 미치지 않았다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.213-213
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• 1999

현재 LCD용 기판재료는 ITO/glass를 전극으로 사용하고 있다. 그러나 유리기판은 무겁고 깨지기 쉽기 때문에 사용상 곤란한 점이 많다. 최근 flexible하고 가공성 및 생산성이 우수한 플라스틱한 ITO를 성막하여 EL용, Touch panel, plastic LCD용 사용하려는 시도로, roll-to-roll 연속 스퍼터링에 의한 ITO성막공정에 대한 연구가 최근 활발하게 이루어지고 있다. 폴리머는 유리에 비해 Tg 온도가 낮고, 기판으로부터의 수분 및 여러 종류의 가스방출이 심하기 때문에 유리와는 달리 ITO막의 제조에 있어 큰 차이점이 있다. 따라서, 폴리머에 반응성 스퍼터링을 하기 위해서는 표면처리가 중요한 변수가 되며, roll to roll sputter로 ITO 필름을 얻기 위해서는 폭과 길이 방향으로 균일한 막을 얻는 것이 중요하다. 두께 75$\mu\textrm{m}$, 폭 190mm, 길이 400m로 권취된 광학용 Polyethylene terephthalate(PET:Tg:8$0^{\circ}C$)위에 In-10%Sn의 합금타겟과 Unipolar pulsed DC power supply를 사용하여 반응성 마그네트론 스퍼터링 방법으로 0.2m/min의 속도로 연속 스퍼터링 하였다. PET를 Ar/O2 혼합가스로 플라즈마 전처리를 한 후, AFM, XPS를 이용하여 효과를 분석을 하였고, 성막전에 가스방출을 막기 위해 TiO를 코팅하였다. Pilot 연속 생산공정에서 재현성을 위해 PEM(Plasma Emission Monitor)의 optical emission spectroscopy를 이용, 금속과 산화물의 천이구역에서 sprtter된 I/Sn 이온과 산소 이온의 반응에 의한 최적의 플라즈마의 강도값을 입력하여 플라즈마의 radiation을 검출하고, 스퍼터링 공정중 실질적인 in-situ 정보로 이용하였다. PEM을 통하여 In/Sn의 플라즈마 강도변화를 조사하였다. 초기 In/Sn의 플라즈마 강도(intensity)는 강도를 100하여, 산소를 주입한 결과, plasma intensity가 35 줄어들었고, 이때 우수한 ITO 박막을 얻을 수 있었다. Pulsed DC power를 사용하여 아크 현상을 방지하였다. PET 상에 coating 된 ITO 박막의 표면저항과 광투과도는 4-point prove와 spectrophotometer를 이용하여 분석하였고, AES로 박막의 두께에 따른 성분비를 확인하였다. ITO 박막의 광투과도는 산소의 유량과 sputter 된 In/Sn ion의 plasma emission peak에 따라 72%-92%까지 변화하였으며, 저항은 37$\Omega$/$\square$ 이상을 나타내었다. 박막의 Sn/In atomic ratio는 0.12, O/In의 비율은 In2O3의 화학양론적 비율인 1.5보다 작은 1.3을 나타내었다.

• Journal of the Korean Ceramic Society
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• v.39 no.8
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• pp.769-774
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• 2002

The powder mixture in which Fe-Ni alloy particles of 20 nm were homogeneously dispersed on $Al_2O_3$ particle surfaces was prepared by hydrogen reduction of $Al_2O_3$ and metal oxide powders. $Al_2O_3$/Fe-Ni nanocomposites fabricated by pressureless sintering were only composed of $Al_2O_3$ and ${gamma}$-Fe-Ni phases and achieved over 98% of the theoretical density at the sintering temperature above $1350^{\circ}C$. The highest strength and toughness of the composites were 574 MPa and 3.9 MP$a{\cdot}m1/2$, respectively. These values were about 20% higher than these of monolithic $Al_2O_3$ sintered at the same conditions. Nanocomposites showed ferromagnetic properties and coercive force was increased with decrease of the average particle size of dispersions.

• Journal of Technologic Dentistry
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• v.27 no.1
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• pp.97-104
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• 2005

The effect of Nb on interfacial bonding characteristics of Ni-Cr alloy for porcelain fused to metal crown (PFM) has been studied in order to investigate oxide layer. A specimens, which is 0.8mm in thickness, were fired at 1,000$^{\circ}C$ with four tests such as air, vacuum, air for 5 minutes and vacuum for 5 minutes in order to examine an oxide behavior of alloy surface generated by the adding of Nb to be controlled at a rate of 0, 1, 3 and 5. It observed oxide film form of the fired specimens with optical microscope and scanning electron microscope (SEM), and chemical formation of them with energy disperse X-ray spectroscopy (EDX). The other specimens, which is 2mm in thickness, were fired at 1,000$^{\circ}C$ with air and vacuum in order to analyze the diffusion behaviors of alloy-porcelain interface by X-ray dot mapping. The results of this study were as follows: 1. The observation of microstructure of specimens by SEM showed that the more Nb content is high, the more much intermediate compound of rich Nb is observed. 2. The surface morphology of oxide film is most dense in 3% Nb. The heat treatment in air constitutes denser oxide film than heat treatment under vacuum. 3. The diffusion behavior of oxide layer by X-ray dot mapping showed that Si, Al of porcelain diffuse toward metal.

• Journal of Technologic Dentistry
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• v.25 no.1
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• pp.9-20
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• 2003

Using a nickel-chrome casting alloy called 'Rexillium V' which is also available as base metal alloy for dental ceramic crown, 4 types of mixtures(A, B, C, D) with old and new metal were prepared for cyclic casting. The results of cyclic casting can be outlined as follows: 1. For Vickers hardness after casting, specimen A and D tended to have lower hardness in the course of cyclic casting, while specimen B and C tended to higher hardness. 2. The results of X-ray diffraction analysis showed that major crystal phase contained nickelchrome compounds and carbide. 3. The observation results of SEM photographs after cyclic casting show that there was a significant tendency to have similar structures among experimental groups. 4. The results of EDX analysis after cyclic casting showed that there were little differences in chemical composition between parent metal and base metal alloy. Although industrial nickel-chrome cast alloy did not show any significant change in material properties even through cyclic casting over several times, it is recommended that more there be more in-depth studies on how to detect any potential corrosion, discoloration and toxication of dental ceramic crown implanted in patient's oral cavity.

• Transactions of the Korean hydrogen and new energy society
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• v.24 no.5
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• pp.367-372
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• 2013

Hydrogen storage as a metal hydride is the most promising alternative because of its relatively large hydrogen storage capacities near room temperature. TiMn2-based C14 Laves phases alloys are one of the promising hydrogen storage materials with easy activation, good hydriding-dehydriding kinetics, high hydrogen storage capacity and relatively low cost. In this work, multi-component, hyper-stoichiometric $Ti_{0.85}Zr_{0.13}(Fe_x-V)_{0.56}Mn_{1.47}Ni_{0.05}$ C14 Laves phase alloys were prepared by a vacuum induction melting for a hydrogen storage tank. Since pure vanadium (V) is quite expensive, the substitution of the V element in these alloys has been tried and some interesting results were achieved by replacing V by commercial ferrovanadium (FeV) raw material. In addition, the melt-spinning process, which was applied to the manufacturing of some of these alloys, could make the plateau slopes much flatter, which resulted in the increase of reversible hydrogen storage capacity. The improvement of sloping properties of melt-spun $Ti_{0.85}Zr_{0.13}(Fe_x-V)_{0.56}Mn_{1.47}Ni_{0.05}$ alloys was mainly attributed to the homogeneity of chemical composition.

• The Journal of Korean Academy of Prosthodontics
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• v.33 no.4
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• pp.685-692
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• 1995

The effect of five different surface treatments on the shear bond strength of the resin bond to Type IV Gold alloy was studied by bonding resin to metal. The metal surface was subjected to one of the following treatments and bonded ;(1) air abraded with $50{\mu}m$ alumina particles,(2) beads(3) beads and tin-plated at curreant density of 300mA/$cm^2$,(4) tin-plated at current density of 300mA/$cm^2$,(5) silicacoating with sililink, and bonded with an MDP Opaque primer, CESEAD resin system. The bonded specimens were immersed in water for 23 hours after 1 hour resin curing and shear bond strength were recorded. On the basis of this study, the following conclusions can be drawn; 1. Difference were found in the shear bond strength among all experimental groups. And bead glroup exihibited the highest shear bond strength and sand blasting group exhibited the lowest shear bond strength on five groups. 2. Bead group, mechanical bonding was significantly higher than that obtained with the samples, tinplating, silicacoating, and chemical bonding. 3. No statistically signiflcant difference was found between the shear bond strengths obtained with bead and bead-tinplating, and between tinplating and sili cacoating.

• Conservation Science in Museum
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• v.16
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• pp.32-45
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• 2015

The bronze incense burner, discovered in Chungung-dong, Hanam, Gyeonggi-do in 1971, is a hanging incense burner dating from the Goryeo period. The incense burner was covered with a thick layer of clay. The object was in a severely deteriorated state, affected by bronze disease which resulted in extensive corrosion. Numerous cracks were present across its surface, and some parts had been broken off. To preserve and display the bronze incense burner in a stable condition, deposits of foreign material were removed from the surface, and the weakened metal was strengthened. Cracked and broken areas were reinforced using woven glass fiber, followed by the application of epoxy resin to restore the shape. To investigate the method of production, a chemical analysis was performed, and the microstructure was examined. The chemical analysis revealed that the body of the incense burner as well as the ear, loop, lid and the knob were cast in a ternary alloy of Cu-Sn-Pb. Moreover, copper nails with high copper content were used to securely join the ear to the body of the incense burner. The microstructure was mainly α-phase, and non-intermetallic inclusions composed of Cu and S were detected.