• Title/Summary/Keyword: 균일률

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아산화질소 플라즈마 처리를 이용하여 형성한 실리콘 옥시나이트라이드 박막의 특성과 어플리케이션

  • Jeong, Seong-Uk;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.142-142
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    • 2010
  • 본 논문은 단결정 및 다결정 실리콘 기판 상에 아산화질소 플라즈마 처리를 통하여 형성한 초박형 실리콘 옥시나이트라이드 박막의 특성과 이의 어플리케이션에 관한 것이다. 초박형 절연막은 현재 다양한 전자소자의 제작과 특성 향상을 위하여 활용되고 있으나 일반적인 화학 기상 증착 방법으로는 균일도를 확보하기 어려운 문제점을 가지고 있다. 디스플레이의 구동소자로 활용되는 박막 트랜지스터의 특성 향상과 비휘발성 메모리 소자의 터널링 박막에 응용하기 위하여 초박형 실리콘 옥시나이트라이드 박막의 증착과 이의 특성을 분석하였고, 실제 어플리케이션에 적용하였다. 실리콘 산화막과 실리콘 계면상에 존재하는 질소는 터널링 전류와 결함 형성을 감소시키며, 벌크 내에 존재하는 질소는 단일 실리콘 산화막에 비해 더 두꺼운 박막을 커패시턴스의 감소없이 이용할 수 있는 장점이 있다. 아산화질소 플라즈마를 이용하여 활성화된 질소 및 산소 라디칼들이 실리콘 계면을 개질하여 초박형 실리콘 옥시나이트라이드 박막을 형성할 수 있다. 플라즈마 처리 시간과 RF power의 변화에 따라 형성된 실리콘 옥시나이트라이드 박막의 두께 및 광학적, 전기적 특성을 분석하였다. 아산화질소 플라즈마 처리 방법을 사용한 실리콘 옥시나이트라이드 박막을 시간과 박막 두께의 함수로 전환해보면 초기적으로 증착률이 높고 시간이 지남에 따라 두께 증가가 포화상태에 도달함을 확인할 수 있다. 아산화질소 플라즈마 처리 시간의 변화에 따라 형성된 박막의 전기적인 특성의 경우, 플라즈마 처리 시간이 짧은 실리콘 옥시나이트라이드 박막의 경우 전압의 변화에 따라 공핍영역에서의 기울기가 현저히 감소하며 이는 플라즈마에 의한 계면 손상으로 계면결합 전하량이 증가에 기인한 것으로 판단된다. 또한, 전류-전압 곡선을 활용하여 측정한 터널링 메카니즘은 2.3 nm 이하의 두께를 가진 실리콘 옥시나이트라이드 박막은 직접 터널링이 주도하며, 2.7 nm 이상의 두께를 가진 실리콘 옥시나이트라이드 박막은 F-N 터널링이 주도하고 있음을 확인할 수 있다. 결론적으로 실리콘 옥시나이트라이드 박막을 활용하여 전기적으로 안정한 박막트랜지스터를 제작할 수 있었으며, 2.5 nm 두께를 경계로 터널링 메커니즘이 변화하는 특성을 이용하여 전하 주입 및 기억 유지 특성이 효과적인 터널링 박막을 증착하였고, 이를 바탕으로 다결정 실리콘 비휘발성 메모리 소자를 제작하였다.

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According to the Wavelength, the Analysis of Individual Eye Model's Aberration Change (파장에 따른 개별모형안의 수차변화 분석)

  • Kim, Se-Jin;Lim, Hyeon-Seon;Kim, Bong-Hwan;Kouh, Jeong-Hwi
    • Journal of Korean Ophthalmic Optics Society
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    • v.13 no.3
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    • pp.61-64
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    • 2008
  • Purpose: The analysis of individual eye model designed from clinical demonstration about emmetropia shows that the aberration would be changed by the wave change. Method: The model on the basis of clinical demonstration of eye ball is designed in a form of having 4 refraction surfaces and a constant refractive index. We analyzed designed twelve individual eye model into aberrations changes, as giving changes Fraunhofer lines's six wavelengths. Result: About individual eye model, change in the wavelength of the wavefront aberrations analysis using the Zernike coefficient. This data indicate that the shorter wave is, the more defocus increases and the deviation value of spherical aberration and RMS are widened. Conclusion: As quantity of defocus according to result wavelength change is shorter and shorter, inclination which is similar twelve individual eye model is bigger and bigger and individual eye model majority of cases, little change, and change is shown in part individual eye model is a significant performance degradation can be raised.

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Stress-Strain-Strength Characteristics of Frozen Sands with Various Fine Contents (세립분 함유량에 따른 동결 사질토의 응력-변형률-강도 특성)

  • Chae, Deokho;Hwang, Bumsik;Cho, Wanjei
    • Journal of the Korean GEO-environmental Society
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    • v.16 no.6
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    • pp.31-38
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    • 2015
  • Recently, the participation on the development of the natural gas pipeline in Russia as well as the recent construction of the second Korean Antarctic research station, the Jangbogo station provide the research interests on the behavior of the permafrost ground. To investigate the effect of fines on the mechanical responses of frozen sands, unconfined compression tests were performed on the frozen sands with 0, 5, 10 and 15% of fine contents at -5, -10 and $-15^{\circ}C$. The poorly graded (SP) Joomunjin sand and kaolinite, silt with low plasticity (ML) were used for the preparation of the frozen soil specimens. The mechanical responses of the tested soils were investigated via unconfined compression tests in the temperature controlled laboratory and analyzed in terms of peak unconfined compressive strength and secant modulus at 50% of the peak strength. As the fine contents increase, the unfrozen water contents increase and thus the strength and stiffness of frozen soils decrease. The increment of the stiffness and strength due to the temperature decrease vary with the fine contents.

Metal Oxide Multi-Layer Color Glass by Radio Frequency Magnetron Sputtering for Building Integrated Photovoltaic System (RF Magnetron 스퍼터링 공정을 이용한 BIPV용 산화 금속 다중층 컬러 유리 구현 기술 연구)

  • Gasonoo, Akpeko;Ahn, Hyeon-Sik;Kim, Min-Hoi;Lee, Jae-Hyun;Choi, Yoon-seuk
    • Journal of IKEEE
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    • v.22 no.4
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    • pp.1056-1061
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    • 2018
  • In this study, we propose the structure of color glass for BIPV (Building Integrated Photovoltaic System) and develop process technology to realize it. It was verified through computer simulation based on wave optics that two different kinds of metal oxide thin films with different refractive indices could be integrated to realize different colors with good transmittance. To fabricate the structure, we used RF Magnetron deposition method to achieve the target thickness uniformly. The optical analysis of the samples was carried our by comparing with the results of computer simulations and it was found that this technique can be stably implemented on lab scale. The stability test over weeks was confirmed at room temperature. This method is expected to be very useful in BIPV buildings.

MSER-based Character detection using contrast differences in natural images (자연 이미지에서 명암차이를 이용한 MSER 기반의 문자 검출 기법)

  • Kim, Jun Hyeok;Lee, Sang Hun;Lee, Gang Seong;Kim, Ki Bong
    • Journal of the Korea Convergence Society
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    • v.10 no.5
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    • pp.27-34
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    • 2019
  • In this paper, we propose a method to remove the background area by analyzing the pattern of the character area. In the character detection result of the MSER(Maximally Stable External Regions) method which distinguishes a region having a constant contrast background regions were detected. To solve this problem, we use the MSER method in natural images, the background is removed by calculating the change rate by searching the character area and the background area which are not different from the areas where the contrast values are different from each other. However, in the background removed image, using the LBP(Local Binary Patterns) method, the area with uniform values in the image was determined to be a character area and character detection was performed. Experiments were carried out with simple images with backgrounds, images with frontal characters, and images with slanted images. The proposed method has a high detection rate of 1.73% compared with the conventional MSER and MSER + LBP method.

Direct Preparation of Dichloropropanol from Glycerol over Acetin Catalyst (아세틴 촉매상에서 글리세롤로부터 디클로로프로판올의 직접 제조)

  • Song, Sun-Ho;Park, Dong-Ryul;Woo, Sung-Yul;Song, Won-Seob;Kwon, Myong-Suk;Song, In-Kyu
    • Clean Technology
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    • v.15 no.1
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    • pp.42-46
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    • 2009
  • Solvent-free direct preparation of dichloropropanol (DCP) from glycerol (by-product of bio-diesel production) and hydrochloric acid gas was carried out over acetin catalyst in a gas-liquid batch reactor. For this purpose, acetin mixture and triacetin were used as a homogeneous acetin catalyst. Performance in the acetin-catalyzed reaction was compared to that in the non-catalytic reaction under the same reaction conditions ($110^{\circ}C$, 3 bar, 3 h). Conversion of glycerol in the acetin-catalyzed reactions was ca. 3% higher than that in the non-catalytic reaction, and selectivity for dichloropropanol in the acetin-catalyzed reactions was ca. 50% higher than that in the non-catalytic reaction. It was also revealed that the catalytic performance of triacetin was ca. 2% higher than that of acetic mixture.

Ti Deposition using Atmospheric Pressure Plasma Technology (상압플라즈마 공정을 이용한 Ti 증착 연구)

  • Kim, Kyoung-Bo
    • Journal of Convergence for Information Technology
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    • v.12 no.2
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    • pp.149-156
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    • 2022
  • In this paper, it was attempted to form a titanium (Ti: Titanium) thin film using the atmospheric pressure plasma process technology for the conductor, which is the main component of the optical sensor. The atmospheric plasma equipment was remodeled. A 4-inch Ti target for sputter was etched using CF4 gas, and the by-product was coated on a glass sample. These by-products were formed up to about 2 cm, and could be divided into 15 areas according to color. Surface shape and constituent elements were analyzed using scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS), respectively. Electrical properties using 4-point probe equipment were also measured. If the process is performed by positioning the sample at about 4.5 mm to 5 mm from the target, a uniform Ti thin film will be deposited. However, it was found that the thin film contained a significant amount of fluorine, which greatly affects the electrical properties of the thin film. Therefore, additional experiments and studies should be performed to remove or minimize fluorine during deposition.

Numerical Analysis of Dam-Break Flow in an Experimental Channel using Cut-Cell Method (분할격자기법을 이용한 실험수조 댐붕괴파의 수치모의)

  • Kim, Hyung-Jun;Kim, Jung-Min;Cho, Yong-Sik
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.2B
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    • pp.121-129
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    • 2009
  • In this study, dam-break flows are simulated numerically by using an efficient and accurate Cartesian cut-cell mesh system. In the system, most of the computational domain is discretized by the Cartesian mesh, while peculiar grids are done by a cutcell mesh system. The governing equations are then solved by the finite volume method. An HLLC approximate Riemann solver and TVD-WAF method are employed to calculation of advection flux of the shallow-water equations. To validate the numerical model, the model is applied to some problems such as a steady flow convergence on an ideal bed, a steady flow over an irregular bathymetry, and a rectangular tank problem. The present model is finally applied to a simulation of dam-break flow on an experimental channel. The predicted water surface elevations are compared with available laboratory measurements. A very reasonable agreement is observed.

Evaluation of Multi-axis Robotic Manufactured Thermoplastic Composite Structure Using Stamp-forming Process (다관절 로봇 암 기반 고속 열 성형 공정을 활용한 열가소성 복합재 부품 평가)

  • Ho-Young Shin;Ji-Sub Noh;Gyu-Beom Park;Chang-Min Seok;Jin-Hwe Kweon;Byeong-Su Kwak;Young-Woo Nam
    • Composites Research
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    • v.36 no.5
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    • pp.321-328
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    • 2023
  • This study developed the in-situ stamp-forming process using the multi-axis robotic arm to fabricate thermal composite parts. Optimal fabrication parameters with the multi-axis robotic arm were determined using finite element analysis and these parameters were further refined through the practical manufacturing process. A comparison between the manufactured parts and finite element analysis results was conducted regarding thickness uniformity and wrinkle distribution to confirm the validity of the finite element analysis. Additionally, to evaluate the formability of the manufactured composite parts, measurements of crystallinity and porosity were taken. Consequently, this study establishes the feasibility of the In-situ stamp-forming consolidation using a robotic arm and verifies the potential for producing composite parts through this process.

A Study on Drone Nozzle Design for Greenhouse Shading (온실차광을 위한 드론 전용노즐 설계에 관한 연구)

  • Ungjin Oh;Jin-Taek Lim
    • Journal of the Institute of Convergence Signal Processing
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    • v.24 no.4
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    • pp.249-254
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    • 2023
  • Recently, the distribution of drones is being activated by saving farmers' working time and protecting them from harmful human bodies from pesticides due to the mission of spraying pesticides using drones. It is possible to compensate for various shortcomings derived from the existing pesticide spraying method, wide-area control and helicopter control. Recently, the smart farm expansion policy has actively used it to generate profits for farmers by increasing harvests by monitoring growth information of various crops based on IoT in real time and collecting big data on key variables, and related drone industry technologies are also being developed. In this study, drones were applied to the work of shading greenhouses to secure diversity in agricultural application fields, and basic research on the greenhouse environment was conducted to materialize the technology related to shading. In order to provide high-quality light in consideration of the internal and external environment of the green house, basic research was conducted to enable light-shielding missions using drones through nozzle design for uniform spraying of nozzles of drones, light-transmitting rate analysis of green houses, and light-shielding agent application experiments.