• 대한기계학회논문집B
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• 제25권3호
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• pp.422-432
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• 2001

An analytical characterization is presented on the transient heat transfer by an oscillating flow through a porous slab. Based on a two-equation model, analytic solutions are obtained for both the fluid and solid temperature variations. Two parameters are identified as the Stanton number for the internal heat exchange and the ratio of the thermal capacities between the solid and fluid phases. The heat transfer characteristics are shown to be classified into four regimes according to the two parameters and physical interpretation is presented on the particular heat transfer processes within each regime. In addition, the condition for the local thermal equilibrium between the phases is examined and the relevant criterion is suggested.

• 대한기계학회논문집B
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• 제26권8호
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• pp.1172-1182
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• 2002

In the present study a general criterion for local thermal equilibrium is presented in terms of parameters of engineering importance which include the Darcy number, the effective Prandtl number of fluid, and the Reynolds number. For this, an order of magnitude analysis is performed for the case when the effect of convection heat transfer is dominant in a porous structure. The criterion proposed in this study is more general than the previous criterion suggested by Carbonell and Whitaker, because the latter is applicable only when conduction is the dominant heat transfer mode in a porous medium while the former can be applied even when convection heat transfer prevails. In order to check the validity of the proposed criterion for local thermal equilibrium, the forced convection phenomena in a porous medium with a microchanneled structure subject to an impinging jet are studied using a similarity transformation. The proposed criterion is also validated with the existing experimental and numerical results for convection heat transfer in various porous materials that include some of the parameters used in the criterion such as a microchannel heat sink with a parallel flow, a packed bed, a cellular ceramic, and a sintered metal. It is shown that the criterion presented in this work well-predicts the validity of the assumption of local thermal equilibrium in a porous medium.

• 한국진공학회지
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• 제15권6호
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• pp.581-586
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• 2006

차세대 리소그래피 기술인 극자외선(EUV : Extreme Ultraviolet) 빛샘 연구의 기초단계로써, 동축타입의 전극구조가 설치된 다이오드 챔버를 통해 Ar 플라스마를 생성하였으며, 방출 분광기술(emission spectroscopy)를 이용하여 방출된 가시광선 영역의 빛을 조사하였다. 장치의 입력 전압을 0.5kV씩 변화를 주어 $2\sim3.5kV$까지 인가를 했으며 이극챔버의 최적 압력인 330mTorr 일 때 각 전압에 따른 방출 분광선 데이터를 얻었다. 이때 Ar I과 Ar II 방출선을 관측하였으며 국소적인 열적평형 (LTE ; Local Thermodynamic Equilibrium) 상태의 가정 하에 볼츠만 도표(Boltzmann plot)와 사하(Saha) 방정식을 이용해 Ar I 및 Ar II의 전자온도와 이온 밀도를 각각 계산하였다. 각 입력전압에 대해 이온밀도는 Ar I과 Ar II에서 각각 $\sim10^{15}/cc$ 및 $\sim10^{13}/cc$의 값으로 계산되었다.