• Title/Summary/Keyword: 광 측정계

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Development of 3D Inspection Equipment using White Light Interferometer with Large F.O.V. (대시야 백색광 간섭계를 이용한 3차원 검사 장치 개발)

  • Koo, Young Mo;Lee, Kyu Ho
    • Journal of the Korean Institute of Intelligent Systems
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    • v.22 no.6
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    • pp.694-699
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    • 2012
  • In this paper, semiconductor package inspection results using white light interferometer with large F.O.V., in order to apply semiconductor product inspection process, are shown. Experimental 3D data repeatability test results for the same special bumps of each substrate are shown. Experimental 3D data repeatability test results for all the bumps in each substrate are also shown. Semiconductor package inspection using white light interferometer with large F.O.V. is very important for the fast 3D data inspection in semiconductor product inspection process. This paper is surely helpful for the development of in-line type fast 3D data inspection machine.

The Effects of Various Light Intensity on the Polymerization of Resin Composites (광조사 강도의 변화에 따른 광중합 복합레진의 중합반응에 관한 연구)

  • Jun-Gyu Park;Byeong-Hoon Cho;In-Bog Lee;Hyuck-Choon Kwon;Chung-Moon Um
    • Restorative Dentistry and Endodontics
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    • v.26 no.1
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    • pp.86-94
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    • 2001
  • 기존의 광중합기는 높은 광강도를 제공함으로써 광중합 복합레진을 최대한 단축된 시간내의 중합을 목표로 하였다. 이러한 높은 광강도는 복합레진의 중합깊이, 중합률면에서는 우수하나 중합 반응속도가 빠름으로 인해 중합시 응력 발생이 높아진다는 일련의 보고가 있다. 최근에는 광중합 속도를 늦춤으로써 변연적합도 및 중합시 응력 발생을 낮추는 새로운 중합방법들이 제시되고 있다. 이에 본 실험에서는 광조사 강도의 변화가 광중합 복합레진의 중합반응 과정에 미치는 영향 및 중합된 복합레진의 중합률에 대한 영향을 분석하고자 하였다. 5개의 혼합형 광중합 복합레진 (Z-100, Spectrum, Z-250, Clearfil AP-X, P-60)을 사용하였으며 중합시 적용된 광조사 강도에 따라 6개의 실험군으로 정의하였다. 실험군과 이에 따른 광조사 방법은 다음과 같다. 1군은 110mW/$\textrm{cm}^2$로 40초 중합, 2군 210mW/$\textrm{cm}^2$로 40초 중합, 3군 410mW/$\textrm{cm}^2$로 40초 중합, 4군 620mW/$\textrm{cm}^2$로 40초 중합, 5군 110mW/$\textrm{cm}^2$로 10초 중합 후 1분 뒤 620mW/$\textrm{cm}^2$로 30초 중합, 6군 210mW/$\textrm{cm}^2$로 10초 중합 후 1분 뒤 410mW/$\textrm{cm}^2$로 30초 중합하였다. 광중합시 중합 반응 양상에 관한 분석은 시차주사 열계량기를 이용하여 37$^{\circ}C$ 항온상태에서 10분간의 열흐름곡선을 기록하였다. 기록된 열흐름곡선에서 중합 반응시 나타나는 중합열 및 최대 중합열에 이르는 시간을 기록하여 중합반응 속도를 측정하였다. 중합된 복합레진의 중합률은 Fourier Transform Infrared Spectrometer(FTIR)를 이용하였으며 2mm 두께의 복합레진 하방에서의 중합률을 측정하였다. 측정된 결과는 ANOVA 및 Student-Newman-Keuls 방법을 이용하여 유의성을 검증하였다. 실험결과 다음과 같은 결론을 얻었다. 1. 광중합 복합레진 중합시 광조사 강도가 증가할수록 중합열은 증가하였으나 통계적 유의성은 보이지 않았다 (p>0.05). 2. 최대 중합열에 이르는 시간은 광조사 강도가 증가할수록 단축되었다. 이단계 중합방법을 사용한 경우 중합반응 속도를 감소시킬 수 있음을 보였다. 3. 광조사 강도가 증가할수록 중합률은 증가하였다. 이단계 중합방법을 사용한 경우 연속적인 고광강도를 사용한 경우와 유사한 높은 중합률을 보였다. 4. 중합률면에서 광중합복합레진의 중합시 400mW/$\textrm{cm}^2$ 이상의 광강도가 필요한 것으로 나타났다.

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Measurement of Tensile Properties for Thin Aluminium Film by Using White Light Interferometer (백색광간섭계를 이용한 알루미늄 박막의 인장 물성 측정)

  • Kim, Sang-Kyo;Oh, Chung-Seog;Lee, Hak-Joo
    • Journal of the Korean Society for Nondestructive Testing
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    • v.30 no.5
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    • pp.471-478
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    • 2010
  • Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different from the corresponding bulk properties and thus there has been a strong need for the development of a reliable test method to measure the mechanical properties of a thin film. We have developed an alternative and convenient test method to overcome the limitations of previous membrane deflection experiment and uniaxial tensile test by adopting a white light interferometer having sub-nanometer out-of-plane displacement resolution. The freestanding aluminium specimens are tested to verity the effectiveness of the test method developed and get the tensile properties. The specimens are 0.5 rum wide, $1{\mu}m$ thick and fabricated through MEMS processes including sputtering. 1 to 5 specimens are fabricated on Si dies. The membrane deflection experiments are carried out by using a homemade tester consisted of a motor-driven loading tip, a load cell, and 6 DOF alignment stages. The test system is compact enough to set it up beneath a commercial white light interferometric microscope. The white light fringes are utilized to align a specimen with the tester. The Young's modulus and yield point stress of the aluminium film are 62 GPa and 247 MPa, respectively.

Optical property and the Origin of the Zodiacal light

  • Yang, Hongu;Ishiguro, Masateru
    • The Bulletin of The Korean Astronomical Society
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    • v.39 no.1
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    • pp.68.2-68.2
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    • 2014
  • 내행성계의 행성간 공간에는 행성간 티끌이 편재하고 있다. 이 행성간 티끌의 산란이나 열복사로 인하여 황도광이 관측된다. 그러나 빛에 의한 끌림힘이나 행성의 중력적 섭동으로 인하여 행성간 공간의 티끌은 수백만 ~ 수천만 년 이내에 사라질 수 밖에 없다. 따라서 행성간 공간에 티끌을 공급하는 티끌의 공급원이 지속적으로, 또는 최근에 존재하였음이 확실하다. 본 연구에서는 행성간 티끌의 공급원을 밝히기 위하여 황도광의 광학적 특성을 이용하였다. 우리는 혜성, C형 소행성, S형 소행성, X형 소행성의 반사도와 스펙트럼을 합성하여 $4600{\AA}$에서 측정된 황도광의 반사도, 연속 스펙트럼과 비교하였다. 큰 비중의 티끌이 혜성에서 기인하고 나머지가 C형 소행성과 S형 소행성에서 기인한 모형을 통하여 황도광의 광학적 특성을 설명할 수 있었다. 우리의 모형은 독립적으로 측정된 기존의 황도광 분광 관측 결과와 상합한다.

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Virtual White-light Scanning Interferometer (가상의 백색광 주사 간섭계의 개발)

  • 김영식;김승우
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.88-89
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    • 2003
  • 산업이 고도로 발달함에 따라 생산 부품의 소형화와 정밀도가 크게 요구되고 있다. 특히 최첨단 제품인 반도체와 광통신 부품, 그리고 광학 부품 등에 있어 이러한 추세가 두드러지게 나타나고 있다. 이에 따라 이들 부품들에 대한 제조 공정 못지 않게 초정밀 측정에 대한 관심도 꾸준히 늘고 있다. 뿐만아니라 요즘 새롭게 부각되고 있는 생명 공학 기술(Bio-Technology)과 나노기술(Nano-Technology)을 이용한 바이오센서나 칩, 그리고 타소 나노 튜브 등을 제작하거나 검사를 할 때도 초정밀 측정을 필요로 하게 된다. (중략)

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Comparison of Signal to Noise Ratios in different configulation of optical coherence tomography systems (간섭계 형태에 따른 광단층 촬영장치의 SNR 비교)

  • 양승국;박양하;장원석;오상기;김현덕;김기문
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2004.05b
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    • pp.804-806
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    • 2004
  • As a noninvasive imaging meathod, optical coherence tomography system has been extensively studied because it has some advantage such as imaging of high resolution, low cost, and compace size configuration. The optical power of the sample signal reflected from an object is usually very small in optical coherence tomography(OCT) due to absorption and scattering in a sample material. Furthermore, there happens a serious loss of sample signal power in a fiber coupler because it does not transfer to a photodetector but return to the optical source. In order to improve the SNR of OCT system, basic Michelson and Mach-Zehnder interferometer types were configured then, we compared simulation with measurement of reference sample Therefore, an On in configuration of Math-Zehnder interferometer was demonstrated in order to improve the signal to noise ratio

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A Study on Optical Coherence Tomography System by Using the Optical Fiber (광섬유를 이용한 광영상단층촬영기 제작에 관한 연구)

  • 양승국;박양하;장원석;오상기;이석정;김기문
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.18 no.4
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    • pp.34-40
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    • 2004
  • In this paper, we have studied the OCT(Optical Coherence Tomography) system which has been advantages of high resolution, 2-D cross-sectional images, low cost and small size configuration. The characteristics of light source determine the resolution and coherence length. The light source has a commercial SLD with a central wavelength of 1,285 ill11, 35.3 nm(FWHM). The optical delay line is necessary to make equal with the optical path length to scattered light or reflected light from a sample. In order to make equal the optical path length, the stage that is attached to a reference mirror is controled by a step motor. And the interferometer is configured with the Michelson interferometer by using a single mode fiber, and the scanner can be focused on the sample by using a reference ann Also, the 2-dimension cross-sectional images were measured with scanning the transverse direction of the sample by using a step motor. After detecting the internal signal of lateral direction, a scanner is moved to obtain the cross-sectional image of 2-dimension by using step motor. A photodiode, which has high detection sensitivity and excellent noise characteristics has been used. The detected small signal has a noise and interference. After filtering and amplifying the signal, the output signal is demodulated the waveform And then, a cross-sectional image is seen through converting this signal into a digitalized signal by using an AID converter. The resolution of the sample is about 30${\mu}{\textrm}{m}$, which corresponds to the theoretical resolution. Also, the cross-sectional images of onion cells were measured in real time scheme.

Design of the Transceiver for a Wide-Range FMCW Radar Altimeter Based on an Optical Delay Line (광 지연선 기반의 넓은 고도 범위를 갖는 고정밀 FMCW 전파고도계 송수신기 설계)

  • Choi, Jae-Hyun;Jang, Jong-Hun;Roh, Jin-Eep
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.25 no.11
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    • pp.1190-1196
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    • 2014
  • This paper presents the design of a Frequency Modulated Continuous Wave(FMCW) radar altimeter with wide altitude range and low measurement errors. Wide altitude range is achieved by employing the optic delay in the transmitting path to reduce the dynamic range of measuring altitude. Transmitting power and receiver gain are also controlled to have the dynamic range of the received power be reduced. In addition, low measurement errors are obtained by improving the sweep linearity using the Direct Digital Synthesizer(DDS) and minimizing the phase noise employing the reference clock(Ref_CLK) as the offset frequency of the Phase Locked Loop(PLL).

Roughness Measurement of Hole Processing Surface for Mold Steel Using White Light Interferometer (백색광간섭계를 이용한 금형용 강재 구멍가공면의 조도 측정)

  • Lee, Seung-Chul;Kim, Kyeong-Suk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.33 no.1
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    • pp.73-79
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    • 2013
  • In this study, NIMAX material has been processed using the three-dimensional measuring instrument and white light interferometer. they were tested to roundness and surface roughness and results are as follows: As for a cutting characteristic, it indicated that F4 showed a lower result than 2F showed due to the high hardness of the material and showed a good result when spindle rotation speed and tool feed were low. As for the measurement of roundness through 3-Dimensional measuring machine, it indicated that 4F showed a good result like the condition of cutting component and that roundness showed a good result when spindle rotation speed of 1,700 rpm and tool feed speed of 85 mm/min were applied. As for the surface roughness of processing surface, Surface roughness showed better 4F than 2F and conditions of spindle rotation speed 1,700 rpm, tool feed rate 55 mm/min showed good results in the Ra $0.4025{\mu}m$.

Absolute Measurement of the Quantum Efficiency of Photodetectors Using Correlated Photon Pairs (광자쌍을 이용한 광검출기의 양자효율 절대측정)

  • 안경진
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.452-456
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    • 1993
  • The quantum efficiencies of photomultiplier tubes were measured by counting the coincidence photon pairs generated in the process of spontaneous parametric down-conversion. They were measured within 3% accuracy over the range of wavelength from 560 to 850 nm without any standard light source or detector. The values for 633 nm correspond to those obtained with a calibrated laser power meter within the measurement error.

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