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산화아연 투명전극의 패터닝 및 나노막대 구조를 이용한 질화갈륨계 LED의 광추출효율 향상에 대한 연구

  • Park, Ji-Yeon;Son, Hyo-Su;Choe, Nak-Jeong;Lee, Jae-Hwan;Han, Sang-Hyeon;Lee, Seong-Nam
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.313-313
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    • 2014
  • GaN계 물질 기반의 광 반도체는 조명 및 디스플레이 관련 차세대 광원으로 많은 관심을 받고 있고, 효율 증대를 위한 에피, 소자 구조 및 패키지 등의 많은 연구가 진행되고 있다. 특히, 투명 전극을 이용한 광 추출 효율의 증가에 대한 연구는 전체 외부양자효율을 증가시키는 중요한 기술로 각광을 받고 있다. 이러한 투명전극은 가시광 영역의 빛을 투과하면서도 전기 전도성을 갖는 기능성 박막 전극으로 산화인듐주석이 널리 사용되고 있으나 인듐 가격의 상승과 산화인듐주석 전극 자체의 크랙 특성으로 인하여 많은 문제점이 지적되고 있다. 이러한 문제를 극복하기 위하여 GaN계 발광 다이오드에 있어서 산화인듐주석 투명 전극의 대체 물질들에 대한 많은 연구들이 활발하게 이루어 지고 있다. 특히, 투명전극 층으로 사용되는 산화인듐주석 대체 박막으로 산화아연에 대한 연구가 각광을 받고 있는 실정이다. 또한, 발광 다이오드의 효율 증가를 위해 발광소자에 표면 요철 구조 형성과 나노구조체 형성 등 박막 표면의 구조 변화를 통한 광추출효율 향상에 대한 많은 연구가 진행되고 있다. 본 연구에서는 산화아연 박막을 투명전극으로 사용하였으며 광추출효율 향상을 위해 산화아연 투명전극에 패터닝을 형성하고, 그 위에 산화아연 나노막대를 형성하여 기존에 사용하던 산화아연 투명전극보다 우수한 추출효율 및 전류 퍼짐 향상 구조를 제안하고 이에 따른 LED 소자의 광추출효율 향상을 연구하였다. 금속유기화학증착법을 이용하여 c-면 사파이어 기판에 n-GaN, 5주기의 InGaN/GaN 다중양자우물 구조 및 p-GaN의 간단한 LED구조를 성장한 후, p-GaN층 상부에 원자층 증착법을 이용하여 투명전극인 산화아연 박막을 60 nm 두께로 증착하였다. 산화아연 투명전극만 증착한 LED-A와 이후 0.1% HCl을 이용한 습식식각을 통하여 산화아연 투명전극에 육각형 모양의 패턴을 형성한 LED-B, 그리고 LED-B위에 전기화학증착법을 이용하여 $1.0{\mu}m$의 산화아연 나노 막대를 증착한 LED-C를 제작하였다. LED-A, -B 및 -C에 대한 표면 구조는 SEM이미지를 통하여 확인한 바 산화아연의 육각 패턴과 그 상부에 산화아연의 나노막대가 잘 형성된 것을 확인하였다. I-L 분석으로부터 패턴이 형성되지 않은 산화아연 투명전극으로만 구성된 LED-A에 비하여 산화아연 투명 전극에 육각 패턴을 형성한 LED-B의 전계 발광 세기가 더욱 큰 것을 확인하였다. 또한, 육각 패턴에 산화아연 나노막대를 성장시켜 융합구조를 형성한 LED-C에서는 LED-B와 -A보다 더 큰 전계 발광세기를 확인할 수 있었다. 특히, 인가 전류가 고전류로 갈수록 LED-C의 발광세기가 더욱 강해지는 것으로 효율저하현상 또한 나노융합구조의 LED-C에서 확인할 수 있었다. 이는 기존 산화아연 투명전극에 육각형의 패턴 및 나노막대융합구조를 형성할 경우 전류퍼짐현상을 극대화 할 뿐 아니라, 추가적인 광추출효율 향상 효과에 의해 질화갈륨 기반LED 소자의 광효율이 증가된 것으로 판단된다.

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Fabrication and Device Characteristics of Infrared Photodetector Based on InAs/GaSb Strained-Layer Superlattice (InAs/GaSb 응력초격자를 이용한 적외선검출소자의 제작 및 특성 연구)

  • Kim, J.O.;Shin, H.W.;Choe, J.W.;Lee, S.J.;Kim, C.S.;Noh, S.K.
    • Journal of the Korean Vacuum Society
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    • v.18 no.2
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    • pp.108-115
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    • 2009
  • The superlattice infrared photodetector (SLIP) with an active layer of 8/8-ML InAs/GaSb type-II strained-layer superlattice (SLS) of 150 periods was grown by MBE technique, and the proto-type discrete device was defined with an aperture of $200-{\mu}m$ diameter. The contrast profile of the transmission electron microscope (TEM) image and the satellite peak in the x-ray diffraction (XRD) rocking curve show that the SLS active layer keeps abrupt interfaces with a uniform thickness and a periodic strain. The wavelength and the bias-voltage dependences of responsivity (R) and detectivity ($D^*$) measured by a blackbody radiation source give that the cutoff wavelength is ${\sim}5{\mu}m$, and the maximum Rand $D^*$ ($\lambda=3.25{\mu}m$) are ${\sim}10^3mA/W$ (-0.6 V/13 K) and ${\sim}10^9cm.Hz^{1/2}/W$ (0 V/13 K), respectively. The activation energy of 275 meV analyzed from the temperature dependent responsivity is in good agreement with the energy difference between two SLS subblevels of conduction and valence bands (HH1-C) involving in the photoresponse process.

A Study of Gamma-ray Irradiation Effects on Commercially Available Single-mode Optical Fiber (국내외 상용 단일모드 광섬유의 감마선 영향 분석 연구)

  • Kim, Jong-Yeol;Lee, Nam-Ho
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.05a
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    • pp.564-567
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    • 2012
  • Optical fibers are going to be used for telecommunication, image fibers, sensors under irradiation in nuclear power plants and various irradiation facilities. Especially, Temperature detection sensors using Raman light scattering, temperature or strain sensors using fiber gratings, magnet-optical sensors using photo-magnetic effect, are already commercialized. However, When fibers are exposed to ionizing radiation, color centers are formed in fibers which reduces their light transmission, and it is limited in applying under radiation environments. In this study, $Co^{60}$ gamma-ray induced optical attenuation on Ge-doped single mode(SM) fiber has been measured. Gamma-ray is irradiated for 4hours at the dose rate of 0.5kGy/hr, 2kGy/hr, 8kGy/hr. Consequently, gamma-ray induced loss based on radiation effects in Ge-doped SM fiber occur precisely. Furthermore, dose rate effect that the higher dose rate in the same total dose, the more increase loss of optical fiber and annealing effect that the higher the loss after irradiation, the more increase the recovery rate of the loss are observed in the fiber. This results plan to make use of bases in the study of the radiation-hardened optical fiber.

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CASE REPORTS OF TREATMENT OF ERUPTION-DISTURBED MX. FIRST MOLAR BY SURGICAL EXPOSURE (맹출 장애를 가진 상악 제1대구치의 외과적 노출을 이용한 치험례)

  • Seok, Choong-Ki;Nam, Dong-Woo;Kim, Hyun-Jung;Kim, Young-Jin;Nam, Soon-Hyeun
    • Journal of the korean academy of Pediatric Dentistry
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    • v.31 no.1
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    • pp.11-18
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    • 2004
  • The eruption of permanent teeth represents the movement in the alveolar bone before appearance in oral cavity, to the occlusal plane after appearance in oral cavity, and additive movement after reaching th the occlusal plane. Tooth eruption is mostly controlled by genetic signals. The eruption stage is divided to preeruptive alveolar stage, alveolar bone stage, mucosal stage according to the process of growth and development. If the disturbance is occured in any stage of eruption, tooth does not erupt. The cause of eruption disturbance are ectopic position of the tooth germ, obstruction of the eruption path and defects in the follicle or PDL. In the treatment of eruption disturbance, surgical procedures are commonly used. There are three kind of surgical procedure ; surgical exposure, surgical repositioning, surgical exposure and traction Surgical exposure is basic procedure. This involves removal of mucosa, bone, lesion that are surrounding the teeth, dental sac when necessary to maintain a patent channel between the crown and the normal eruptive path into the oral cavity. To ensure this patency, many techniques including cementation of a celluloid crown, packing with gutta-percha or zinc oxide-eugenol, or a surgical pack, are used. When surgical exposure is conducted, operators should not expose any part of cervical root cement and not injure periodontium or root of adjunct tooth. After surgical exposure, tooth should be surrounded by keratinized gingiva. There is direct relationship between the extent of development of pathophysiologic aberrations and the intensity of the manipulative injury inflicted on the tooth by surgical treatment, so operator should consider this thing. In these cases, surgical exposure is conducted on Maxillary 1st milars that have a eruption disturbance and improve the eruption disturbance effectively.

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Formation of Al0.3Ga0.7As/GaAs Multiple Quantum Wells on Silicon Substrate with AlAsxSb1-x Step-graded Buffer (AlAsxSb1-x 단계 성분 변화 완충층을 이용한 Si (100) 기판 상 Al0.3Ga0.7As/GaAs 다중 양자 우물 형성)

  • Lee, Eun Hye;Song, Jin Dong;Yoen, Kyu Hyoek;Bae, Min Hwan;Oh, Hyun Ji;Han, Il Ki;Choi, Won Jun;Chang, Soo Kyung
    • Journal of the Korean Vacuum Society
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    • v.22 no.6
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    • pp.313-320
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    • 2013
  • The $AlAs_xSb_{1-x}$ step-graded buffer (SGB) layer was grown on the Silicon (Si) substrate to overcome lattice mismatch between Si substrate and $Al_{0.3}Ga_{0.7}As$/GaAs multiple quantum wells (MQWs). The value of root-mean-square (RMS) surface roughness for 5 nm-thick GaAs grown on $AlAs_xSb_{1-x}$ step-graded buffer layer was ~1.7 nm. $Al_{0.3}Ga_{0.7}As$/GaAs MQWs with AlAs/GaAs short period superlattice (SPS) were formed on the $AlAs_xSb_{1-x}$/Si substrate. Photoluminescence (PL) peak at 10 K for the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure showed relatively low intensity at ~813 nm. The RMS surface roughness of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure was ~42.9 nm. The crystal defects were observed on the cross-sectional transmission electron microscope (TEM) images of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure. The decrease of PL intensity and increase of RMS surface roughness would be due to the formation of the crystal defects.