• Title/Summary/Keyword: 공초점 주사현미경

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공초점 원리를 이용한 현미경 자동초점

  • 박정재;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.169-169
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    • 2004
  • 현미경을 이용한 자동화된 검사 공정에 있어서 무엇보다 중요한 과정은 초점조절이며, 피 측정물의 선명한 현미경 영상을 얻기 위한 빠르고 신뢰도가 높은 자동초점조절 방법들은 일련의 검사공정에 있어서 필수 불가결한 요소로 자리매김 하고 있다. 일반적으로 널리 사용되고 있는 수동형 자동초점조절 방법들은 측정물체 표면의 영상대비 정보를 이용하는 방법으로 구성이 비교적 간단하지만, 최대대비 위치를 찾기 위한 주사과정이 필요하므로 시간 소요가 크고, 시편에 대한 의존도가 높다는 단점이 있다.(중략)

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공초점 주사 현미경에서 고속, 고품질 3차원 영상복원을 위한 최적조건

  • Kim, Tae-Hun;Kim, Tae-Jung;Gwon, Dae-Gap
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.5-9
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    • 2006
  • 공초점 주사 현미경(Confocal Scanning Microscope, CSM)은 Bio-cell 및 특정 형태를 가지는 object의 고분해능 3차원 영상복원이 가능하여 3차원 측정장비로 주로 사용된다. 특히 LCD 패널 및 반도체 웨이퍼의 불량 검사 장비로의 활용이 가능하여 3차원 영상으로부터 불량 여부와 원인을 알아낼 수 있다. 하지만 생산 공정에서 불량 검사를 하기 위해서는 고속, 고품질의 성능이 요구된다. 따라서 이 논문에서는 공초점 주사 현미경을 이용하여 고분해능으로 고속, 고품질의 3차원 영상복원을 할 때 어떠한 조건이 요구되는지 알아보고 시뮬레이션 하도록 하겠다.

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THE ANALYSIS OF REMINERALIZATION EFFECT IN FLUORIDE VARNISH USING CONFOCAL LASER SCANNING MICROSCOPE (공초점 레이저 주사 현미경을 이용한 불소 바니쉬 재광화 효과의 분석)

  • Kwon, Ji-Hoon;Park, Ho-Won;Lee, Ju-Hyun;Seo, Hyun-Woo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.35 no.1
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    • pp.57-64
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    • 2008
  • It is well established that fluoride products play an important role in the prevention and remineralization of carious lesion. Fluoride varnish is a concentrated topical fluoride and varnishes adhere to tooth surface, permitting prolonged fluoride exposure and uptake. In this study, the artificial initial enamel caries was caused on the sound human enamel and divided 60 specimens into three groups. Group 1 and group 2 were treated with the topical application of fluoride varnish and stored in artificial saliva for 1 and 2 weeks. Group 3 was stored in artificial saliva for 2 weeks, which acted as control group. Changes in mineral contents were analysed with the confocal laser scanning microscope. The following results were obtained: 1. In group 1 and group 2, the total fluorescence of the lesion(TFL) was reduced in remineralized area compared to in demineralized area(p<0.05). 2. The total fluorescence of the lesion of remineralized area was more reduced in group 2 than in group 1(p<0.05). 3. The total fluorescence of the lesion was more reduced in group 2 than in control group(p<0.05). 4. Confocal laser scanning microscope can be used in quantitative analysis of remineralization by fluoride varnish.

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Flow Visualization in Microchannel Using Confocal Scanning Microscope (공초점 주사현미경을 통한 미세 유로에서의 유동 가시화)

  • Chang Jun Keun;Park Sung-Jin;Kim Jung Kyung;Han Dong Chul
    • Journal of the Korean Society of Visualization
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    • v.1 no.1
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    • pp.28-33
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    • 2003
  • This paper presents the visualization method in which 3-dimensional(3D) microchannel flow can be detected using a confocal scanning microscope. By soft-lithography, we fabricated various Bio-MEMS(Micro Electro-Mechanical System) devices such as a disposable microchip for a flow cytometer and a micro-mixer, which have 3D structures. Injecting aqueous fluorescent solution in the microfluidic devices, we measured the flow in a steady state by the confocal scanning microscope. At first, we explain the principle of the confocal scanning microscope. And then we show the results from 3D visualization of microscopic flow structures using the confocal scanning microscope.

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Proposal and design of reflecting optical system to improve detection intensity in fluorescence confocal scanning microscopy (형광 공초점 주사 현미경의 측정 강도 향상을 위한 반사 광학계의 제안 및 설계)

  • 강동균;서정우;권대갑
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.187-190
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    • 2002
  • Confocal microscopy is very popular technology in bio-medical inspection due to its ability to reject background signals and to measure very thin slide of thick specimens, which is called optical sectioning. But intensity of detected signal in fluorescence type confocal microscopy is so small that only 0.2% of emitted fluorescence light can be detected in the best case. In this paper, we proposed the reflecting optical system to improve the detection intensity and designed the optical system by optimal design method. At the end of the paper, we analyzed the characteristics of the proposed reflecting optical system.

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Surface profiling by the phase shifting method in fiber-optical confocal scanning interference microscopes (광섬유 공초점 간섭 현미경과 위상 변위법을 결합한 표면 검색)

  • 김대찬;이승걸
    • Korean Journal of Optics and Photonics
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    • v.10 no.3
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    • pp.201-207
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    • 1999
  • The fiber-optical confocal scanning interference microscope with a simple configuration was constructed with a 4-port fiber-optic coupler, and the new method based on the phase shifting method was proposed for surface profiling by the system. In the method, the height of a specimen was determined from the phase of confocal beam. It was verified experimentally that the method was applicable to even the confocal interference microscope with a long-wavelength source and a low NA objective, and that the scanning time could be drastically reduced compared with the conventional method. Finally, it was found that our method is less sensitive to the variation of surface reflectivity than the conventional method.

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Error Analysis and Alignment Tolerancing for Confocal Scanning Microscope using Monte Carlo Method (Monte Carlo 방법을 이용한 공초점 주사 현미경의 오차 분석과 정렬 공차 할당에 관한 연구)

  • 유홍기;강동균;이승우;권대갑
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.2
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    • pp.92-99
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    • 2004
  • The errors can cause the serious loss of the performance of a precision machine system. In this paper, we proposed the method of allocating the alignment tolerances of the parts and applied this method to get the optimal tolerances of a Confocal Scanning Microscope. In general, tight tolerances are required to maintain the performance of a system, but a high cost of manufacturing and assembling is required to preserve the tight tolerances. The purpose of allocating the optimal tolerances is minimizing the cost while keeping the high performance of the system. In the optimal problem, we maximized the tolerances while maintaining the performance requirements. The Monte Carlo Method, a statistical simulation method, is used in tolerance analysis. Alignment tolerances of optical components of the confocal scanning microscope are optimized to minimize the cost and to maintain the observation performance of the microscope. We can also apply this method to the other precision machine system.