• Title/Summary/Keyword: 공진화

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Semiconductor wafer exhaust moisture displacement unit (반도체 웨이퍼 공정 배기가스 수분제어장치)

  • Chan, Danny;Kim, Jonghae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.8
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    • pp.5541-5549
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    • 2015
  • This paper introduces a safer and more power efficient heater by using induction heating, to apply to the semiconductor wafer fabrication exhaust gas cleaning system. The exhaust gas cleaning system is currently made with filament heater that generates an endothermic reaction of N2 gas for the removal of moisture. Induction theory, through the bases of theoretical optimization and electronic implementation, is applied in the design of the induction heater specifically for the semiconductor wafer exhaust system. The new induction heating design provides a solution to the issues with the current energy inefficient, unreliable, and unsafe design. A robust and calibrated design of the induction heater is used to optimize the energy consumption. Optimization is based on the calibrated ZVS induction circuit design specified by the resonant frequency of the exhaust pipe. The fail-safe energy limiter embedded in the system uses a voltage regulator through the feedback of the MOSFET control, which allows the system performance to operate within the specification of the N2 Heater unit. A specification and performance comparison from current conventional filament heater is made with the calibrated induction heater design for numerical analysis and the proof of a better design.

Vibration Analysis on the Inspection Equipment Frame of a Semiconductor Test Handler Picker (반도체 테스트 핸들러 픽커 검사장비 프레임에 대한 진동해석)

  • Kim, Young-Choon;Kim, Young-Jin;Kook, Jeong-Han;Cho, Jae-Ung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.8
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    • pp.4815-4820
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    • 2014
  • As semiconductor chips are on a small scale, large content and high integratation, it is essential to develop the device of pick and place at the system of the semiconductor test handler to ensure its high precision and durability. In this study, inspection equipment frame model of a semiconductor test handler picker was investigated by vibration analysis with the property of the natural frequency and harmonic response. As 3 kinds of analysis case models, the device of pick and place was located at the left side (Case 1), the center (Case 2) and the right side (Case 3) of the upper guideline. The range of natural frequencies until the 6th order on this frame model ranges from 80Hz to 500Hz. As the analysis of the harmonic response when the frame is resonant, Case 2 showed the maximum equivalent stress of 52.802 MPa more than Cases 1 or 3. Case 2 was the most intensive among the three cases. Using the analysis result of this study, the design of the frame model, which can be applied to the safe working environment of the system is believed to be possible.

The Motion Response of an Oil Boom with Flexible Skirt (유연한 스커트를 가진 오일붐의 운동응답해석)

  • 성홍근;조일형;최항순
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.7 no.2
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    • pp.156-162
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    • 1995
  • A numerical method for a 2-D oil boom model considering the flexibility of skirt has been developed The neater is assumed rigid and the skirt is tensioned membrane having a point mass at its end The fluid motion is potential. The kinematic condition which demands the continuity of the displacement is imposed at the joint between the floater and the skirt. The dynamic condition for the point mass is imposed at the bottom end of the skirt. The numerical method is based on the Green's function method in the frame of linear potential theory. It finds it's solution simultaneously from the total system of three equations, integral equation, the equation of motion of the floater and the equilibrium equation of the deformation of the skirt. Integral equation is derived by applying the Green's theorem to radiation potential and Green's function. Proper descretization of those three equations leads to the system of a linear algebraic equation. Due to the flexibility of skirt the motion of floater can be diminished in some range of wave frequency and furthermore the mechanism of resonance of the oil boom can be changed. The motion responses of various oil booms have been compared varying the length of the skirt and the point mass. The numerical method has been validated indirectly from the good correspondence between the motion responses of the flexible skirt model and the rigid skirt model in low frequency limit.

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Sensitivity Analysis of Dynamic Characteristics of Structural Systems by the Transfer Matrix Method and the Combined Finite Element-Transfer Matrix Method (전달매트릭스법 및 유한요소-전달매트릭스 결합방법에 의한 구조계의 동특성 감도해석)

  • D.S. Cho;K.C. Kim
    • Journal of the Society of Naval Architects of Korea
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    • v.29 no.1
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    • pp.143-157
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    • 1992
  • For the design of structural systems having the prescribed or optimum dynamic characteristics, some design changes of the initially designed system are required. In these cases, if the sensitivity analysis which can predict the changes of dynamic characteristics due to the changes of design variables is applied, the design changes can be carried out rationally and very efficiently. For many structural systems, it is well known that the analysis by the transfer matrix method(TMM) and the combined finite element-transfer matrix method(FETMM) is more efficient than the analysis by the finite element method. However, most known studies on the sensitivity analysis of structural systems premise using the finite element method. In this paper, the sensitivity analysis methods by the TMM and the FETMM are presented and some numerical investigations on the beam-column with elastically restrained ends and intermediate contraints and the stiffened plate having subsystems are carried out. The results of the numerical examples show good accuracy and computational efficiency of the presented methods, and show that the application of sensitivity analysis in the dynamic characteristic reanalysis give good results within the practically changeable range of design variables.

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Design and SAR Analysis of Broadband Monopole Antenna Using Loop and T-Shaped Patches (사각 루프와 T자형 패치를 결합한 광대역 평면형 모노폴 안테나 설계 및 SAR 분석)

  • Jang, Ju-Dong;Lee, Seungwoo;Kim, Nam;Choi, Dong-Geun
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.24 no.1
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    • pp.1-10
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    • 2013
  • In this paper, a broadband planar monopole antenna for multi-band services is proposed. The physical size of the proposed antenna is miniaturized by folding a rectangular loop. And a resonance point in the 3.9 GHz band is reduced by a coupling phenomenon with the central part of the T-shaped patch and the folded rectangular loop. In addition, the T-shaped patch is inserted to the rectangular shaped monopole antenna due to deriving the broadband frequency characteristics. The frequency characteristic is optimized by adjusting the gap and length of the folded rectangular loops and a transverse diameter of the T-shaped patch. The antenna dimensions including the ground plane are $40{\times}60{\times}1.6mm^3$. It is fabricated on the FR-4 substrate(${\epsilon}_r$=4.4) using a microstrip line of $50{\Omega}$ for impedance matching. In the measured result, the bandwidth corresponding to the VSWR of 2:1 is 162 MHz(815~977 MHz) and 2,530 MHz(1.43~3.96 GHz). For analyzing the human effect by the proposed antenna, 1 g and 10 g averaged SARs are simulated and measured. As the simulated results, 1 g-averaged SAR is 1.044 W/kg, and 10 g-averaged SAR is 0.718 W/kg. This result are satisfied by the SAR guidelines which are 1.6 W/kg(1 g-averaged) and 2.0 W/kg(10 g-averaged).

Design and manufacture of mini loop coil probe style magnetic curer for peripheral nervous system treatment (말초신경계 치료를 위한 초미니 Loop-코일프로브 삽입형 자기치료기의 설계 및 제작)

  • Kim, Whi-Young;Choi, Jin-Young;Park, Sung-Jun;Kim, Hee-Je
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.2 no.1
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    • pp.153-169
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    • 2007
  • It is as result that study to apply mini magnet nerve curer in peripheral nervous system disease treatment. Design and embodied action power and Control Unit in cylinder form of magnet roof object firstly. Yielded service area about special quality of probe of roof object cylinder style and treatment area dimension and distance of treatment pulse secondly. Embody pulse forming course energy value by Probe's form by third, could embody treatment pulse by disease. Specially, through a special quality experiment, saved Damping pulse form and treatment pulse form etc. variously. Lately, embodied this to aid a little in disease treatment that follow that there is no invasion that there is no stimulation by medicine development. Go amplitude treatment pulse (traditional magneto-therapy of greatly great that strong) does curative effect greatest at short time and becomes thought that demand is magnified greatly at the future in this research.

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Design and Evaluation of a Lung Assist Device for Patients with Acute Respiratory Syndrome using Hollow Fiber Membranes (중공사 막을 이용한 급성호흡곤란증후군 환자용 폐 보조 장치의 설계와 평가)

  • Lee, Sam-Cheol;Kwon, O-Sung;Kim, Ho-Cheol;Hwang, Young-Sil;Lee, Hyun-Cheol
    • Membrane Journal
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    • v.15 no.3
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    • pp.224-232
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    • 2005
  • The use of the lung assist device (LAD) would be well suited for acute respiratory failure (ARF) patients, combining the simplicity of mechanical ventilation with the ability of extracoporeal membrane oxygenators (ECMO) to provide temporary relief for the natural lungs. This study's specific attention was focused on the effect of membrane vibration in the LAD. Quantitative experimental measurements were performed to evaluate the performance of the device, and to identify membrane vibration dependence on blood hemolysis. We tried to decide upon excited frequency band of limit hemolysis when blood hemolysis came to through a membrane vibration action. The excited frequency of the module type 5, consisted of 675 hollow fiber membranes, showed the maximum gas transfer rate. We concluded that the maximum oxygen transfer rate seemed to be caused by the occurrence of maximum amplitude and the transfer of vibration to hollow fiber membranes. It was excited up to $25{\pm}5$ Hz at each blood flow rate of module type 5. We found that this frequency became the 2nd mode resonance riequency of the flexible in blood flow. Blood hemolysis was low at the excited frequency of $25{\pm}5$ Hz. Therefore, we decided that limit hemolysis frequency of this LAD was $25{\pm}5$ Hz.

Design of a Double-Faced Monopole Antenna Using the Coupling Effect of Induced Currents (유도 전류의 커플링 효과를 이용한 모노폴 안테나 설계)

  • Choi, Young;Lee, Seungwoo;Kim, Nam
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.12
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    • pp.1327-1336
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    • 2012
  • In this paper, the dual-faced monopole antenna, which is arranged by numerous rectangular ring patches in sequence for the multi-bands is proposed. The ring type structure of the patch can be increased the bandwidth. Therefore the bandwidth and beam width are improved by using multiple arrayed patches. When the ring type patches are inserted serially, the resonance frequencies are occurred by the current flow from the first ring patch. It is possible because the gap between the patches is very narrow. In addition, if the patches are composed on the same plane as the feed-line, fabrication could be very difficult because the gap between the patches is extremely narrow. The thickness and permittivity of the antenna, moreover, are very important parameters because both sides of the substrate are used. We finally found the optimal thickness and permittivity to generate the coupling effect by simulation. All patches are consisted of 4-steps which the patch size was decreased 85 % by each step. In conclusion, the resonant frequency bands are 1.75~2.6 GHz(850 MHz), 3.24~3.46 GHz(220 MHz), 3.8~4.0 GHz(200 MHz), and 4.4~4.9 GHz(500 MHz).

A Planar Implementation of a Negative Group Delay Circuit (평면 구조의 마이너스 군지연 회로 설계)

  • Jeong, Yong-Chae;Choi, Heung-Jae;Chaudhary, Girdhari;Kim, Chul-Dong;Lim, Jong-Sik
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.21 no.3
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    • pp.236-244
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    • 2010
  • In this paper, a planar structure negative group delay circuit(NGDC) is proposed to overcome the limited availability of the component values required for the prototype lumped element(LE) NGDC design. From the prototype LE circuit analysis, general design equations and the conditions to obtain the NGD are derived and illustrated. Then the LE circuit is converted into the planar structure by applying the transmission line resonator(TLR) theory. As a design example, the LE NGDC and the proposed planar structure NGDC are designed and compared. To estimate the commercial applicability, 2-stage reflection type planar NGDC with -5.6 ns of total group delay, -0.2 dB of insertion loss, and 30 MHz of bandwidth together with 0.1 dB and 0.5 ns of the magnitude and group delay flatness, respectively, for Wideband Code Division Multiple Access(WCDMA) downlink band is fabricated and demonstrated. Also, to show the applicability of the proposed NGDC, we have configured a simple signal cancellation loop and obtained good loop suppression performance.

Flow Safety Assessment by CFD Analysis in One-Touch Insertion Type Pipe Joint for Refrigerant (CFD 해석을 이용한 냉매용 원터치 삽입식 파이프 조인트의 유동 안전성 평가)

  • Kim, Eun-young;Park, Dong-sam
    • Journal of the Society of Disaster Information
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    • v.18 no.3
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    • pp.550-559
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    • 2022
  • Purpose: Pipes are widely used as applied devices in many industrial fields such as machinery, electronics, electricity, and plants, and are also widely used in safety-related fields such as firefighting and chemistry. With the diversification of products, the importance of technology in the piping field is also increasing. In particular, when changing the existing copper pipe to stainless steel, it is necessary to evaluate safety and flow characteristics through structural analysis or flow analysis. Method: This study investigated the safety by flow analysis of the 6.35 inch socket model, which are integrated insert type connectors developed by a company, using CFD analysis technique. For CDF analysis, RAN model and LES model are used. Result: As results of the analysis, amplitude of the pressure fluctuation acting on the wall of the piping system is formed at a level of 3,780 Pa or less, which is a very small level of pressure compared with the operating pressure or design stress of the refrigerant piping. Conclusion: These results mean that the effect of vibration caused by turbulence on the structural safety of the pipe is negligible.