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http://dx.doi.org/10.5762/KAIS.2014.15.8.4815

Vibration Analysis on the Inspection Equipment Frame of a Semiconductor Test Handler Picker  

Kim, Young-Choon (Division of Mechanical & Automotive Engineering, Kongju University)
Kim, Young-Jin (Testopia Co. Ltd.)
Kook, Jeong-Han (School of Mechanical Engineering, Korea University of Technology and Education)
Cho, Jae-Ung (Division of Mechanical & Automotive Engineering, Kongju University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.15, no.8, 2014 , pp. 4815-4820 More about this Journal
Abstract
As semiconductor chips are on a small scale, large content and high integratation, it is essential to develop the device of pick and place at the system of the semiconductor test handler to ensure its high precision and durability. In this study, inspection equipment frame model of a semiconductor test handler picker was investigated by vibration analysis with the property of the natural frequency and harmonic response. As 3 kinds of analysis case models, the device of pick and place was located at the left side (Case 1), the center (Case 2) and the right side (Case 3) of the upper guideline. The range of natural frequencies until the 6th order on this frame model ranges from 80Hz to 500Hz. As the analysis of the harmonic response when the frame is resonant, Case 2 showed the maximum equivalent stress of 52.802 MPa more than Cases 1 or 3. Case 2 was the most intensive among the three cases. Using the analysis result of this study, the design of the frame model, which can be applied to the safe working environment of the system is believed to be possible.
Keywords
Inspection equipment frame; Semiconductor test handler picker; Device of pick and place; Natural frequency; Harmonic response;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
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