• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.256-256
• /
• 2012

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• Korean Journal of Agricultural and Forest Meteorology
• /
• v.12 no.3
• /
• pp.183-196
• /
• 2010

Increasing human activity due to rapid economic growth and land use change alters the patterns of the Asian monsoon, which is key to crop yields in Asia. In this study, we tested the performance of regional climate model (RegCM3) by simulating important components of Indian summer monsoon, including land-ocean contrast, low level jet (LLJ), Tibetan high and upper level Easterly Jet. Three contrasting rain years (1994: excess year, 2001: normal year, 2002: deficient year) were selected and RegCM3 was integrated at 60 km horizontal resolution from April 1 to October 1 each year. The simulated fields of circulations and precipitation were validated against the observation from the NCEP/NCAR reanalysis products and Global Precipitation Climatology Centre (GPCC), respectively. The important results of RegCM3 simulations are (a) LLJ was slightly stronger and split into two branches during excess rain year over the Arabian Sea while there was no splitting during normal and deficient rain years, (b) huge anticyclone with single cell was noted during excess rain year while weak and broken into two cells in deficient rain year, (c) the simulated spatial distribution of precipitation was comparable to the corresponding observed precipitation of GPCC over large parts of India, and (d) the sensitivity experiment using NIMBUS-7 SMMR snow data indicated that precipitation was reduced mainly over the northeast and south Peninsular India with the introduction of 0.1 m of snow over the Tibetan region in April.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.4 no.4
• /
• pp.329-334
• /
• 2006

The depth distributions of total $^3H$ and $^{14}C$ activities were characterized for the activated shielding concrete from a decommissioning of KRR-2 using the commercially available tube furnace and a liquid scintillation counter. The correlation of measurement results between $^3H,\;^{14}C$ and gammer emitter was evaluated to apply for estimating radionuclide inventory of the concrete waste generated from decommissioning KRR-2. The detection limits for $^3H$ and $^{14}C$ are 0.048 and 0.028 Bq/g respectively. The specific activities of the $^3H$ and $^{14}C$ tend to decrease exponentially as the depth of the concrete becomes deeper from the surface. In addition, the $^3H$ and $^{14}C$ activities were in good correlation with the $^{60}CO$ activities analysed for the shielding concrete of KRR-2.

• Archives of design research
• /
• v.16 no.1
• /
• pp.63-72
• /
• 2003

The purpose of this study is to understand the character of concerned local area through using roadside space that is space for daily experience of citizen as target, extracting symbolic image reconsidering the historical and cultural character and clarifying the local identity on the basis of it. Through applying image of local symbolism and future-oriented roadside to street furniture, I tried to express local symbolism and through composing symbolic roadside of local that can be newly recognized as unique street, I tried to give a local symbolism and compose active roadside environment. Through providing basic material and actual design example, this paper tried to activate characterized local culture. As the method to approach design of symbolic roadside, the researcher divided local symbolic image into present local image and future-oriented image through selecting the roadside that historical element is lost and urbanization is achieved as target. The researcher characterized local roadside, using street furniture as symbolic tool of future-oriented roadside on the basis of symbolic image extracted from image evaluation testing. This paper has the meaning to suggest one direction for extracting symbolism when organizing distinguished roadside through applying symbolic image to roadside environmental facility, helping for of local resident's sense of place, his self-esteem and love for his hometown and public authority's establishing and promoting the policy concerned to the context of this paper.

• Korean Journal of Ecology and Environment
• /
• v.33 no.1 s.89
• /
• pp.31-37
• /
• 2000

For the purpose of surveying the physicochemical composition of sediment collected from Kwangyang Bay, the percentage of water loss, COD, $H_2S$, grain size and 10 heavy metals were studied at 17 sites. During the surveying period, the changes of the percentage of water loss were appeared $35.5\;{\sim}\;53.8%$. COD and $H_2S$ were showed $3.8\l{\sim}\;12.9\;mg/g$, and $0.1\;{\sim}11.4\;{\mu}g/g$, respectively, In composition of grain size on the sediment, percentages of grain sizes under $74\;{\mu}m$ were varied from 40.5% to 86.7% and above $74\;{\mu}m$ were varied from 11.5% to 43.0%. From the spatial distribution of heavy metal using contour map, we can suppose some heavy metal discharges which affect sediment of Kwangyang Bay, It was estimated that Shinpung creek, Ssang-bong creek, and draining area of sewange treatment plant were the main discharge among the heavy metal output sources. By comparison between present study and heavy metal guideline of nonpolluted sea sediment that is provided by EPA, US, it was showed that the contents of Pb and Hg were acceptable but contents of Mn, Zn, Cu, Fe, As, and Cr were higher than those of EPA guideline.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.4
• /
• pp.361-372
• /
• 2016

The purpose of this study was to develop a STEAM-based science education program for children and to verify its effectiveness. An S-STEAM-based science education program for young children was developed through careful analysis of prior research on science education for young children and S-STEAM. The participants were 29 four-year-old children from daycare centers located in Seoul (an experimental group of 14 and comparative group of 15). The S-STEAM program was applied to the experimental group, while the control group went through a general science education course provided by the government. TTCT of Creative Thinking (TTCT: Figures A and B) was used as a research tool, and a multiple intelligence test tool was applied to teachers of the groups. Afterwards, analysis of covariance was implemented to find the S-STEAM program's effects. First, the results showed positive effects on overall creativity, as well as in fluency, originality, abstractness, elaboration, and openness components of creativity. Second, the results showed positive effects on overall multiple intelligences and its components of linguistic, musical, spatial, logical/mathematical, physical exercise, interpersonal, and naturalist intelligence.

• Proceedings of the Korean Society of Broadcast Engineers Conference
• /
• 2005.11a
• /
• pp.29-32
• /
• 2005

3차원 비디오는 차세대 정보 통신 서비스 분야의 하나로, 사용자에게 시각적으로 고차원적인 서비스를 제공하는 것을 목적으로 한다. 이 가운데 다시점 비디오는 같은 시간, 여러 시점에서 영상 정보를 획득하여 사용자에게 원하는 시점의 영상 정보를 제공하는 3차원 비디오이며, 현재 방송 관련 연구 기관에서 차세대 실감방송 멀티미디어 서비스 개발을 목적으로 하는 연구가 활발히 진행되고 있다. 최근 MPEG 표준화 그룹에서는 다시점 비디오 부호화 (multi-view video coding, MVC) 방법에 관한 표준화 작업이 진행 중이며, 최신 비디오 압축 표준인 H.264를 이용한 여러 가지 방법들이 제안되었다. 현재 MVC 표준화 작업의 평가 기준이 되는 방법은 각 시점을 H.264로 부호화하는 방법인데, 이는 다시점 비디오 영상의 중요한 특성인 인접시점들 사이의 공간적 상관도를 전혀 고려하지 않았다. 본 논문에서는 시점 보간법을 이용하여 얻어진 중간 영상과 원영상과의 차분 영상을 부호화하는 알고리즘을 제안하고자 한다. 여기서 시점 보간법이란 좌우 두 시점 영상으로부터 변이값을 얻은 다음, 이를 이용하여 중간 시점 영상을 합성하는 방법을 말한다. 예를 들면,다시점 비디오의 홀수 번째 시점의 영상은 기존의 방법을 따르고, 짝수 번째 시점의 영상은 이미 부호화된 홀수 번째 시점의 영상을 이용하여 보간적으로 예측하여 원래 영상과 차분 영상을 구하여 부호화한다. 차분 영상은 영상의 복잡도가 많이 감소되어 원영상에 비해 보다 나은 부호화 효율을 보인다. 그러나 합성 영상이 각 장면마다 독립적으로 생성되므로 원영상에 비해 차분 영상의 시간적인 상관도가 줄어들어 I장면의 경우 부호화 효율이 크게 향상되었으나, 시간적인 상관도를 이용하는 P장면과 B장면에서는 오히려 좋지 않은 결과를 보였다. 통계는 전 국민에 대한 패널자료이기 때문에 통계적 활용의 범위가 방대하다. 특히 개인, 가구, 사업체 등 사회 활동의 주체들이 어떻게 변화하는지를 추적할 수 있는 자료를 생산함으로써 다양한 인과적 통계분석을 할 수 있다. 행정자료를 활용한 인구센서스의 이러한 특징은 국가의 교육정책, 노동정책, 복지정책 등 다양한 정책을 정확한 자료를 근거로 수립할 수 있는 기반을 제공한다(Gaasemyr, 1999). 이와 더불어 행정자료 기반의 인구센서스는 비용이 적게 드는 장점이 있다. 예를 들어 덴마크나 핀란드에서는 조사로 자료를 생산하던 때의 1/20 정도 비용으로 행정자료로 인구센서스의 모든 자료를 생산하고 있다. 특히, 최근 모든 행정자료들이 정보통신기술에 의해 데이터베이스 형태로 바뀌고, 인터넷을 근간으로 한 컴퓨터네트워크가 발달함에 따라 각 부처별로 행정을 위해 축적한 자료를 정보통신기술로 연계${cdot}$통합하면 막대한 조사비용을 들이지 않더라도 인구센서스자료를 적은 비용으로 생산할 수 있는 근간이 마련되었다. 이렇듯 행정자료 기반의 인구센서스가 많은 장점을 가졌지만, 그렇다고 모든 국가가 당장 행정자료로 인구센서스를 대체할 수 있는 것은 아니다. 행정자료로 인구센서스통계를 생산하기 위해서는 각 행정부서별로 사용하는 행정자료들을 연계${cdot}$통합할 수 있도록 국가사회전반에 걸쳐 행정 체제가 갖추어져야 하기 때문이다. 특히 모든 국민 개개인에 관한 기본정보, 개인들이 거주하며 생활하는 단위인 개별 주거단위에 관한 정보가 행정부에 등록되어 있고, 잘 정비되어 있어야 하며, 정보의 형태 또한 서로 연계가 가능하도록 표준화되어있어야 한다. 이와 더불어, 현재 인구센서스에서 표본조사를 통해 부가적으로 생산하는 경제활동통계를 생산하기 위해서는 개인이

• Ecology and Resilient Infrastructure
• /
• v.6 no.4
• /
• pp.250-257
• /
• 2019

Recently, 357 water-friendly space were established near the main streams of the country through the Four Major Rivers Project, which was used as a resting and leisure space for the citizens, and the river environment and ecological health were improved. We are working hard to reduce the number of points and plan and manage the water-friendly space. In particular, attempts are being made to utilize mobile big data to make more scientific and systematic research on the number of users. However, when using mobile big data compared to the existing method of conducting field surveys, it is possible to easily identify spatial user movement patterns, but it is different from the actual amount of use, so various verifications are required to solve this problem. Therefore, this study evaluated the accuracy of estimating the number of users using mobile big data by comparing the number of visitors using mobile big data and the number of visitors using drone for Samrak ecological park located in the mouth of Nakdong River. As a result, in the river hydrophilic district, it was difficult to accurately estimating the usage pattern of each facility due to the low precision of pCELL, and it was confirmed that the usage patterns in the park could be distorted due to the signals stopped at roads and parking lots. Therefore, it is necessary to improve the number of pCELLs in the water-friendly space and to estimate the number of visitors excluding facilities such as roads and parking lots in future mobile big data processing.

• Applied Chemistry for Engineering
• /
• v.7 no.4
• /
• pp.743-749
• /
• 1996

A new static contractor using capillary phenomena induced by a highly packed fiber bundle was developed for the solvent extraction. When two immiscible phases being cocurrently and forcedly fed into the packed fiber bundle, the contactor brings about a very large liquid-liquid contact area for mass transfer within a small definite space without any turbulence and drop phenomena. In order to test the characteristics and stability of the static contractor system, continuous extraction experiments of TBP-uranyl ion-nitric acid system were done and compared with the batch extraction experiment of the same chemical system. The performance of the static contractor were the same as that of the ideal batch extractor with the same extraction condition. For the increase of the extraction yield by the contactor, the increase of organic flow rate was required at a fixed aqueous flow rate, and a certain residence time of the aqueous phase flow within the contactor system had to be maintained to meet the performance of the batch system of the same phase ratio. The residence time in the case of TBP-uranyl ion-nitric acid system was about 1.9 minutes. This system was confirmed to be effective and stable enough for purposes of the kinetic study of solvent extraction as well as the mutual separation and purification of ordinary materials because of good reproducibility and the stable and large static liquid-liquid contact area.

• Journal of Food Hygiene and Safety
• /
• v.25 no.4
• /
• pp.333-340
• /
• 2010

This study was conducted to evaluate the microbial contamination levels in the processing company of Nuroong-ji. Microbial contamination levels were examined for sanitary indication bacteria such as aerobic plate count, coliforms and fungi, and pathogenic bacteria such as Escherchia coli O157:H7, Salmonella spp., Staphylococcus aureus, and Listeria monocytogenes. Contamination levels were detected differently according to handling materials and purposing work-space. The equipments and raw materials were not seriously contaminated but there were necessary to attend the cross-contamination. A high contamination level was detected at the process where the interference of the employees was relatively higher than the other process. Standardization of the roasting process (l20~$170^{\circ}C$, about 10 min) could be necessary to control the microbial organism effectively on Nuroong-ji manufacturing process. At small/medium size foodstuff manufacturers, it is the most important to improve the recognition level of individual hygiene but also expand a hygiene facility.