• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.69-71
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• 2009

Meander 형태의 인덕터를 각각 산화마그네슘 (MgO)기판과 산화 알루미늄 ($Al_2O_3$) 기판 위에 구현하여 고주파 특성을 구조 시뮬레이션을 통해 연구하였다. 고주파 시뮬레이션을 통해서 적절한 구조의 meander 형태의 인덕터를 선정하여 시뮬레이션을 수행하였다. 시뮬레이션시 사용된 알루미늄 상부전극은 길이 282 nm, 폭 45 nm, 두께 100 nm, 간격은 15 nm의 구조 였으며, 5, 7, 9, 11, 13턴의 meander 형태 인덕터 소자들을 이용하여 고주파 수동소자 응용을 위한 고주파 구조 시뮬레이션을 50 MHz에서부터 30 GHz까지 수행하였다. 주파수에 따른 인덕턴스와 품질계수를 등가회로를 이용하여 계산하였다. 시뮬레이션으로부터 자기공진주파수 (SRF, self resonance frequency)가 인덕터의 턴 수가 증가함에 따라 저주파 영역으로 이동하는 것을 확인하였고, 고주파 시뮬레이션 결과에서 산란 매개변수 (S-parameter, $S_{21}$)로부터 인덕턴스와 품질계수를 추출해내었다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.10
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• pp.17-23
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• 2003

In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. The materials (96% Al2O3) and shape (I-type) of the core were determined by a Maxwell three-dimensional field simulator to maximize the performance of the inductors. The copper (Cu) wire with 40${\mu}{\textrm}{m}$ diameter was used as the coils. High frequency characteristics of the inductance (L), quality-factor (Q), and capacitance (C) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 11 to 39 nH and quality factors of 28 to 50 over the frequency ranges of 250MHz to 1 GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ that is one of the best chip inductor company in the world. The simulated data predicted the high-frequency data of the L, Q, and C of the inductors developed well.l.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.39 no.12
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• pp.559-565
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• 2002

Today, because a quality factor of the inductor fabricated on silicon substrate for RFIC is under 12, the realization of inductor haying high-Q is essential. In this paper, two inductors having improved Q-factor are proposed and fabricated using a bondwire on silicon substrate. Also for the PGS is applied to the same inductors, four inductors are fabricated finally The bondwire Inductors have the relatively low conductor loss due to wide cross-section area and they can reduce the parastic capacitance very much because they are located in the air. Simulation and measurement results show that the proposed inductors have much more improved Q-factor, 15, than a conventional spiral inductor at 1.5 GHz. Because of the use of an automatic bonding machine, we can fabricate the high - Q inductors very easily, repeatedly.

• Proceedings of the KIPE Conference
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• 2016.07a
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• pp.481-482
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• 2016

병렬 운전 시 인터리빙 기술은 인버터 최종 출력 전류에 포함되는 스위칭 주파수 성분의 고조파를 제거하는 장점을 가지고 있지만 이로 인해 고주파 성분의 영상분 순환 전류를 만든다. 따라서 이 성분을 억제하기 위해 커플드 인덕터가 같이 사용된다. 하지만 커플드 인덕터를 사용할 경우에는 파라메타의 오차로 인해 안정성에 문제가 발생 할 수 있다. 따라서 본 논문에서는 인터리빙 및 커플드 인덕터를 사용한 병렬 운전 인버터 시스템에서 전류 품질 개선을 위해 고조파 보상을 할 경우 발생 할 수 있는 안정성 문제에 대한 원인을 규명하고 새로운 순환전류 제어 방법에 대해 제안하고 실험을 통해 검증하였다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.11 no.3
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• pp.445-453
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• 2000

In this paper, the method of designing an active inductor for MMIC is proposed. The proposed tunable active inductor is composed of a cascade FET with feedback capacitors and resistors. Because of a very low series resistance in the proposed inductor, a very high Q factor can be obtained. Also it has an excellent characteristics suitable for high frequency band. The inductance value can be changed by controlling feedback capacitors, resistors and a bias voltage respectively. When the feedback resistor and parallel resistor within circuits are varied, the inductance value is changed from 0.2 nH to 1.7 nH in the range 1 to 15 GHz. Also we designed bandpass filter using the proposed active inductor and it shows the insertion loss of 0.4 dB and return loss, 20 dB.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.12 s.354
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• pp.75-82
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• 2006

In this paper, we design the meander line inductors with high sensitivity and high quality factor(Q) using high characteristic impedance of aperture ground plate. Sensitivity as a frequency is new defined by variation of effective inductance per analysis frequency range instead of self resonance frequency (SRF). An equivalent lumped circuit is derived to explain the characteristic of high frequency inductor. The 4 nH meander line inductor with aperture ground plate has 0.45 nH/GHz of good sensitivity and 86 of Q at 0.7 GHz.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.6
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• pp.34-42
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• 2000

Recently, there is a growing need to develope small-size RF chip inductors operating to GHz to realize high-performance, micro-fabricated wireless communication products. For the development of high-performance RF chip inductors, however, the ferrite-based chip inductors can not be used above 300MHz due to the limitation of the permeability of this material. In this work, small-size, high-performance RF chip inductors utilizing amorphous $Al_2O_3$ core material were investigated. Copper (Cu) with 40${\mu}m$ diameter was used as the coils and the chip inductor size fabricated in this work is $2.1mm{\times}1.5mm{\times}1.0mm$. The external current source was applied after bonding Cu coil leads to gold pads electro-plated on the bottom edges of a core material. The composition of core materials was measured using a EDX. High frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The developed inductors have the self-resonant frequency (SRF) of 1 to 3.5 GHz and exhibit L of 22 to 150 nH. The L of the inductors decreases with increasing the SRF. The Z of the inductors has the maximum value at the SRF and the inductors have the quality factor of 70 to 97 in the frequency range of 500 MHz to 1.5 GHz.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1521-1523
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• 2002

본 논문에서는 1.58 ${\times}$ 0.82 ${\times}$ 0.94 $mm^3$크기의 H 형태의 솔레노이드형 RF 칩 인덕터를 코일의 직경과 권선수를 변화시키면서 제작하였고, 그들의 고주파 성능을 비교 분석하였다. 저손실 $Al_2O_3$재료를 코아로 $30{\mu}m{\sim}40{\mu}m$의 여러 직경을 가진 Cu를 코일로 사용하였다. 인덕터의 인덕턴스(L), 품질계수(Q), 저항(R), 임피던스(Z) 그리고 커패시턴스(C) 등의 주파수 특성은 HP4291B로 측정하였다. 실험결과 동일권선수에 대해 코일직경이 자을수록 L, Q, R, 그리고 Z등이 증가하였고, 그 증가폭은 권선수가 클수록 커지는 경향이 있음을 알 수 있었다. 그러나 코일직경이 작을수록 기생 커패시턴스 효과가 빨리 나타나 자기 공진주파수 효과가 감소하는 경향을 보이고 있음을 확인하였다. 코일직경이 $3{\mu}m$이고 권선수가 6인 경우에 대표적인 값들은 다음과 같다. L=31.4nH(at 250MHz), Q=49.6(at 700MHz), R=0.362${\Omega}$(at 1MHz)

• Journal of IKEEE
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• v.11 no.4
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• pp.145-151
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• 2007

In this work, small-size, high-performance solenoid-type RF chip inductors utilizing a low-loss ${Al_2}{O_3}$ core material were investigated. The size of the chip inductors fabricated in this work were $0.86{\times}0.46{\times}0.45m^3$, $1.5{\times}1.0{\times}0.7m^3$, $2.1{\times}1.5{\times}1.0m^3$, and $2.4{\times}2.0{\times}1.4m^3$ and copper (Cu) wire with $27{\sim}40{\mu}m$ diameter was used as the coils. High frequency characteristics of the inductance, quality factor, and impedance of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). It was observed that the developed inductors with the number of turns of 7 have the inductance of 13 to 100nH and exhibit the self-resonant frequency (SRF) of 6.4 to 1.1GHz. The SRF of inductors decreases with increasing the inductance and the inductors have the quality factor of 50 to 80 in the frequency range of 300MHz to 1.3GHz. In this study, small-size solenoid-type RF chip inductors with high inductance and high quality factor were fabricated successfully.

• Proceedings of the KIPE Conference
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• 2016.07a
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• pp.157-158
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• 2016

LCL 필터는 스위칭 고조파를 저감하는 저역통과필터로써 L 필터에 비해 경제적이며 효과적인 스위칭고조파 감쇄능력을 갖는다. 하지만 LCL 필터는 L 필터에서 존재하지 않은 공진문제를 야기한다. 이러한 LCL 필터의 공진현상은 계통주입전류의 품질을 저하시키고 LCL 필터의 고조파 억제성능을 저하시킬 수 있는 잠재적 요소이다. 최근에는 스위칭 고조파 및 LCL 필터 공진성분 뿐만 아니라 기본파 주파수 부근의 저차 고조파 성분도 계통주입전류를 왜곡시키는 원인의 하나로 밝혀져다. 그러므로 LCL 필터를 설계하기 위해서는 주요 주파수 영역에서의 정확한 필터동작해석이 요구된다. 본 논문은 기본파 주파수, 공진주파수, 스위칭주파수에 대한 L 필터와 LCL 필터의 주파수응답을 통해 필터의 동작을 해석하며, 시뮬레이션을 통해 계통주입전류의 스위칭 고조파 및 저차 고조파를 저감하기 위한 최적의 필터인덕터 비율을 제안한다.