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Development of Microscale RF Chip Inductors for Wireless Communication Systems  

윤의중 (호서대학교 정보제어공학과)
김재욱 (호서대학교 전자공학과)
정영창 (호서대학교 전자공학과)
홍철호 (호서대학교 정보제어공학과)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.40, no.10, 2003 , pp. 17-23 More about this Journal
Abstract
In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. The materials (96% Al2O3) and shape (I-type) of the core were determined by a Maxwell three-dimensional field simulator to maximize the performance of the inductors. The copper (Cu) wire with 40${\mu}{\textrm}{m}$ diameter was used as the coils. High frequency characteristics of the inductance (L), quality-factor (Q), and capacitance (C) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 11 to 39 nH and quality factors of 28 to 50 over the frequency ranges of 250MHz to 1 GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ that is one of the best chip inductor company in the world. The simulated data predicted the high-frequency data of the L, Q, and C of the inductors developed well.l.
Keywords
micro scale; RF chip inductor; solenoid-type; Maxwell 3D field simulator; $Al_2$$O_3$core;
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  • Reference
1 I. Wolff and H. Kapusta, 'Modeling of Circular Spiral Inductors for MMICs,' IEEE MTT-s Digest, pp. 123-126, 1987
2 Minda Denesh, John R. Long, 'Differentially Driven Symmetric Microstrip Inductors,' IEEE Trans. on Microwave Theory and Techniques, vol. 50, no. 1, pp. 332-341, Jan, 2002   DOI   ScienceOn
3 Rob Groves, David L. Harame, Dale jadus, 'Temperature Dependence of Q and Inductance in Spiral Inductors Fabricated in a Silicon-Germanium/BiCMOS Technology,' IEEE Journal of Solid-State Circuits, vol. 32, no. 9, pp. 1455-1459, Sep, 1997   DOI   ScienceOn
4 Y. Kobayashi, S. Ishbashi, K. Shirakawa, J. Toriu, H. Matsuki, K. Murakami, 'New Type Micro Cloth-Inductor and Transformer withThin Amorphous Wires and Multi-Thin coils,' IEEE Trans. on Magenetics, vol. 28, no. 5, pp. 3012-3014, Sep, 1992   DOI   ScienceOn
5 W. H. Hayt Jr., 'Engineering electromagenetics,' 5th ed. New York : McGRAW-Hill, 1989
6 R. F. Soohoo, 'Magentic Thin Film Inductors for Integrated Circuit Applications,' IEEE Trans. on Magnetics, vol. MAG-15, 1803, 1979
7 Chong H. Ahn, Mark G. Allen, 'Micromachined Planar Inductors on Silicon Wafers for MEMS Applications,' IEEE Trans. on Industrial Electronics, vol. 45, no. 6, pp. 866-876, Dec, 1998   DOI   ScienceOn
8 Takanori Tsutaoka, Teruhiro Kasagi, Kenichi Hatakeyama, 'Magnetic Field Effect on the Complex Permeability for a Mn-Zn Ferrite and its composite Materials,' Journal of the European Ceramic Society, pp. 1531-1535, 1999   DOI   ScienceOn
9 C. Patrick Yue, S. Sime Wong, 'On-chip Spiral Inductors with Pattemed Ground Shields for Si-Based RF IC's,' IEEE Journal of Solid-State circuits, vol. 33, no. 5, pp. 743-752, May 1998   DOI   ScienceOn
10 M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, and K. Ito, 'Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region,' J. Appl. Phys., vol. 85, no. 11, pp. 7919-7922, 1999   DOI
11 Coilcraft, 'Inductors Transformers Filters Catalog,' May 2001
12 Myung-Hee jung, Jae-Wook Kim, Eui-Jung Yun, 'Development of high-Performance Solendid-Type RF Chip Inductors,' Jpn. J. Appl. Phys., vol. 39 (2000), pp. 4772-4776, Part 1, No. 8, August 2000   DOI
13 Jun-Bo Yoon, Chul-Hi Han, Eui-Sik Yoon and Choong-Ki Kim, 'Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimension Photolithography of a Thick Photo-resist, 'Jpn. J. Appl. Phys. Vol. 37, pp. 7081-7085, Part1, No. 12B, Dec 1998   DOI