Preparation of Ferroelectric $\textrm{SrBi}_{2}\textrm{Ta}_{2}\textrm{O}_{9}$ Thin Films Deposited by Plasma-enhanced Metalorganic Chemical Vapor Deposition
(플라즈마를 이용한 유기금속 화학증착법에 의한 강 유전체 $\textrm{SrBi}_{2}\textrm{Ta}_{2}\textrm{O}_{9}$ 박막의 제조)
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- Korean Journal of Materials Research
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- v.7 no.2
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- pp.107-113
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- 1997