• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.156-157
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• 2012

단일 셀에서 비휘발성 및 고속의 휘발성 메모리를 모두 구동할 수 있는 다기능 메모리는 모바일 기기 및 embedded 장치의 폭발적인 성장에 있어 그 중요성이 커지고 있다. 따라서 최근 이러한 fusion기술을 응용한 unified RAM (URAM)과 같은 다기능 메모리의 연구가 주목 받고 있다. 이러한 다목적 메모리는 주로 silicon on insulator (SOI)기반의 1T-DRAM과 SONOS기술 기반의 비휘발성 메모리의 조합으로 이루어진다. 하지만 이런 다기능 메모리는 주로 단결정기반의 SOI wafer 위에서 구현되기 때문에 값이 비싸고 사용범위도 제한되어 있다. 따라서 이러한 다기능메모리를 다결정 실리콘을 이용하여 제작한다면 기판에 자유롭게 메모리 적용이 가능하고 추후 3차원 적층형 소자의 구현도 가능하기 때문에 다결정실리콘 기반의 메모리 구현은 필수적이라고 할 수 있겠다. 본 연구에서는 다결정실리콘을 이용한 channel recessed구조의 다기능메모리를 제작하였으며 각 1T-DRAM 및 NVM동작에 따른 memory 특성을 살펴보았다. 실험에 사용된 기판은 상부 비정질실리콘 100 nm, 매몰산화층 200 nm의 SOI구조의 기판을 이용하였으며 고상결정화 방법을 이용하여 $600^{\circ}C$ 24시간 열처리를 통해 결정화 시켰다. N+ poly Si을 이용하여 source/drain을 제작하였으며 RIE시스템을 이용하여 recessed channel을 형성하였다. 상부 ONO게이트 절연막은 rf sputter를 이용하여 각각 5/10/5 nm 증착하였다. $950^{\circ}C$ N2/O2 분위기에서 30초간 급속열처리를 진행하여 source/drain을 활성화 하였다. 계면상태 개선을 위해 $450^{\circ}C$ 2% H2/N2 분위기에서 30분간 열처리를 진행하였다. 제작된 Poly Si MFM에서 2.3V, 350mV/dec의 문턱전압과 subthreshold swing을 확인할 수 있었다. Nonvolatile memory mode는 FN tunneling, high-speed 1T-DRAM mode에서는 impact ionization을 이용하여 쓰기/소거 작업을 실시하였다. NVM 모드의 경우 약 2V의 memory window를 확보할 수 있었으며 $85^{\circ}C$에서의 retention 측정시에도 10년 후 약 0.9V의 memory window를 확보할 수 있었다. 1T-DRAM 모드의 경우에는 약 $30{\mu}s$의 retention과 $5{\mu}A$의 sensing margin을 확보할 수 있었다. 차후 engineered tunnel barrier기술이나 엑시머레이저를 이용한 결정화 방법을 적용한다면 device의 특성향상을 기대할 수 있을 것이다. 본 논문에서는 다결정실리콘을 이용한 다기능메모리를 제작 및 메모리 특성을 평가하였다. 제작된 소자의 단일 셀 내에서 NVM동작과 1T-DRAM동작이 모두 가능한 것을 확인할 수 있었다. 다결정실리콘의 특성상 단결정 SOI기반의 다기능 메모리에 비해 낮은 특성을 보여주었으나 이는 결정화방법, high-k절연막 적용 및 engineered tunnel barrier를 적용함으로써 해결 가능하다고 생각된다. 또한 sputter를 이용하여 저온증착된 O/N/O layer에서의 P/E특성을 확인함으로써 glass위에서의 MFM구현의 가능성도 확인할 수 있었으며, 차후 system on panel (SOP)적용도 가능할 것이라고 생각된다.

• Journal of the Korean Geotechnical Society
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• v.27 no.12
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• pp.5-15
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• 2011

Conventional designs of landfill covers use geosynthetics such as geomembrane and GCL, and clay liners to lower the permeability of final covers of landfill sites. However, differential settlement and the variation of temperature or humidity in landfill sites cause the development of cracks or structural damage inside the final cover. This study examined the application of a Self Recovering Sustainable Liner (SRSL) as an alternative landfill final cover material. SRSL consists of double layers, which have chemicals, can generate precipitates filling the pores of the layers by chemical reaction. The interface material forms an impermeable layer and in case of internal cracks, the reactants of the two layers migrate towards the crack and heal it by forming another liner. In this study the applicability of SRSL material for landfill final cover was examined by performing flexible wall permeameter tests to prove that the hydraulic conductivity is lower than the regulations and unconfined compression tests to judge whether the strength satisfies the restriction for the landfill final cover. Furthermore, the environmental impacts on the permeability and strength were evaluated. The experimental results show that the SRSL has lower hydraulic conductivity and higher strength than the regulations and is little influenced by climatic changes such as wet/dry or freeze/thaw process.

• Journal of Dental Rehabilitation and Applied Science
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• v.29 no.3
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• pp.209-223
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• 2013

This study was to evaluate the stress distributions of prefabricated, customized abutments and fixtures according to their material and shape by three-dimensional finite element analysis. And to investigate the fatigue life and fracture characteristics. Mandibular models were fabricated by reconstruction of the CT scan of patients with normal occlusion. A total of six finite element models were designed, a load of 100 N was applied on the buccal cusps vertically, and 30 degree obliquely. 10 specimens each were fabricated for the more clinically widely used 4 type abutments and were loaded according to ISO 14801. Differences in stress distribution patterns were not found according to the materials of the abutments and fixtures. But a slight difference in the stress level was detected. Customized abutment groups showed lower crown stress levels. One-piece zirconia implant showed the lowest bone stress levels. In the fatigue test, highest values were measured in group 7. Prefabricated abutments showed less variation of fatigue life (P<0.05). Use of customized abutments can improve the fracture resistance of restorations. Especially, use of customized zirconia abutments reinforced by titanium screw connecting parts is recommended.

• Journal of the Korean Magnetics Society
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• v.16 no.4
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• pp.221-227
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• 2006

We have synthesized uniform nanometer sized magnetite particles using chemical coprecipitation technique through a sonochemical method with surfactant such as oleic acid. Magnetite phase nanoparticles could be observed from X-ray diffraction. Magnetite nanoparticles is surface phase morphology and biopolymer-microspheres for Application Medical. Magnetite nanoparticles coated biopolymer. Atomic Force Microscope (AFM) was used to image the coated nanoparticles. Magnetic colloid suspensions containing particles with sodium oleate, chitosan and $\beta$-glucan have been prepared. The morphology of the magnetic biopolymer microsphere particles were characterized using optical microscope. Magnetic hysteresis measurement were performed using a superconducting quantum interference device (SQUID) magnetometer at room temperature to investigate the magnetic properties of the biopolymer microspheres and magnetite coated biopolymer including magnetite nanoparticles. Magnetic Resonance (MR) imaging was used to investigate biopolymer coated nanoparticles and biopolymer microspheres.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1182-1189
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• 1998

High quality $TiN/TiSi_2$-bilayers were formed on the Si(100) substrate at room temperature and at $600^{\circ}C$ first by coevaporation of stoichiometric Si and Ti(Si:Ti = 2:1) fellowed by Ti reactive deposition in N, gas ambient, and in situ annealing in ultrahigh vacuum. Stoichiometric $Ti_{0.}N_{0.5}$, films with (111) texture and $C54-TiSi_2$ films were grown by annealing at temperatures above $700^{\circ}C$. $TiN/C54-TiSi_2$/Si(100) interface was clear and flat without agglomoration, and $CS4-TiSi_2$ film was epitxailly grown. The sheet resistance of the $TiN/TiSi_2$- bilayer decreased as the annealing temperature increased and about $2.5\omega/\textrm{cm}^2$ was obtained from the sample annealed over $700^{\circ}C$.

• Korean Journal of Materials Research
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• v.8 no.6
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• pp.505-512
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• 1998

In this study, two-layer thermal barrier coatings composed of plasma sprayed 0.3mm $ZrO_2(8wt% Y_2o_3)$ ceramic coating layer and O.lmm $NiCrAlCoY_20_3$ bond coating layer on AISI 316 were investigated microstructure of the coating, oxidation of the metallic bond coating and adhesive strength to evaluate the durability of coating layer after cyclic and isothermal test at 90$0^{\circ}C$. And quantitative phase analysis of $ZrO_2(8wt% Y_2o_3)$ ceramic coating was performed as a function of thermal exposure time using XRD technique. The results showed that the amount of m - 2rO, phase in the coating was slightly increased with increasing thermal exposure time at 90$0^{\circ}C$. The c/a ratio of t' - $ZrO_2$ in the as-sprayed coating was 1.0099 and slightly increased to 1.0115 after 100 hours heat treatment. It was believed that $Y_2O_3$ in high yttria tetragonaJ(t') was transformed to low yttria tetragonaJ(t) by $Y_2O_3$ diffusion with increasing thermal exposure time. The adhesive strength was gradually decreased as thermal exposure time increased. After the isothermal test, the failure predominantly occured in ceramic coating layer. On the other hand. the specimens after cyclic thermal test were mostly failed at bond coating/ceramic coating interface. The failure was oeeured by decreasing the bond strength between bond coating and oxide scale which were formed by oxidation of the metallic elements within bond coating and by thermal stress due to thermal expansion mismatches between the oxide scale and ceramic coating.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1170-1175
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• 1998

PZT films without lower electrode were deposited on the highly doped Si(100) substrate with MgO buffer layer (Mgo/si) by RF magnetron sputtering method followed by the rapid thermal annealing at $650^{\circ}C$ . We investigated the dependences of the crystalline and electrical properties on the MgO thickness and the RTA post annealing. The PZT films on bare Si (without MgO) showed pyrochlore crystal structure while those on MgO(50 )/Si substrates showed the typical perovskite crystal structures. From SEM and AES analysis, the thickness of PZT films was about 7000 showing relatively smooth interface. The depth profiles indicated that atomic species were distributed homogeneously in the PZT/MgO/Si substrate. The dielectric constant($\varepsilon_{r}$ ) and remanent polarization(2Pr) were about 300 and $14\mu$C/$\textrm{cm}^2$;, respectively. The leakage current was about $3.2\mu$/A$\textrm{cm}^2$.

• Journal of the Korean Electrochemical Society
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• v.10 no.4
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• pp.301-305
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• 2007

The performance of polymer electrolyte membrane fuel cell could be decreased due to coolant leaked from connection part. Micro pump was used to put small amount of coolant and investigate the effect on fuel cell. The stoichiometric ratio of hydrogen/air was 1.5/2.0, both side of gas was fully humidified, and current density of $400mA/cm^2$ was used as standard condition in this experiment. Constant current method was used to check performance recovery from coolant effect in 3 cell stack. The performance was recovered when coolant was injected in cathode side. On the other hand, the performance was not recovered when coolant was injected in anode side. Ethylene glycol could be converted to CO in oxidation process and cause poisoning effect on platinum catalyst or be adhered on GDL and cause gas diffusion block effect resulting performance decrease. Water with nitrogen gas was supplied in anode side to check performance recovery. Polarization curve, cyclic voltammetry, electrochemical impedance spectroscopy was used to check performance, and gas chromatography was used to check coolant concentration. Constant current method was not enough in full recovery of performance. However, water injection method was proved good method in full recovery of performance.

• Korean Chemical Engineering Research
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• v.51 no.5
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• pp.550-555
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• 2013

A hydrogel electrolyte consisting of potassium poly(acrylate) (PAAK) (3 wt%) in 6 M KOH aqueous solution is coated on poly(acrylonitrile) nonwoven separator to examine high-rate characteristics of activated carbon supercapacitor adopting the separator. The hydrogel is homogeneously coated on the surface pores of the nonwoven separator. The electrolyte uptake of the PAAK hydrogel maintains for 24 days higher than 230% and the coated separator shows slightly lower ionic conductivity ($2.9{\times}10^{-2}Scm^{-1}$) than that ($3.6{\times}10^{-2}Scm^{-1}$) of using 6 M KOH only. The activated carbon supercapacitor adopting the coated separator shows a specific capacitance higher than $27Fg^{-1}$ at $1000mVs^{-1}$ and a retention ratio higher than 97% after the 1000th cycle. This is due to strong interfacial contact of coated hydrogel electrolyte between the activated carbon electrode and the nonwoven separator.

• Journal of the korean academy of Pediatric Dentistry
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• v.28 no.4
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• pp.566-574
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• 2001

For decades it has been a clinically accepted requirement, in case of salivary contamination, to re-etch conditioned enamel and dentin to proceed with the adhesive technique. Only a few reports have been so far dealing with the potential of one-bottle adhesive system to bond even when applied after salivary contamination and without re-etching. The purpose of this study was to evaluate the influence of the salivary contamination on the shear bond strength of dentin. The results were as follows: 1. In group II, in which saliva contamination and washing occurred before applying of Prime & Bond NT showed high shear bond strength as in control group. In Group III and IV, in which the cured adhesive was contaminated with saliva, showed significantly lower mean bond strength, 2. Relating long resin tags of $70\sim120{\mu}m$ were observed in samples of all groups under SEM. We could observed hybrid layer, resin tag and many lateral branches in every group. And there were no differences between groups.