• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.196-196
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• 2013

가시광 영역에서의 높은 투과도와 낮은 전기 비저항을 갖는 ITO (Indium Tin Oxide) 박막은 현재 Display, Solar Cell, LED, Smart Phone 등 최첨단 IT산업에서 가장 많이 사용되고 있는 투명전극소재이다. IBD (Ion Beam Deposition)방법은 박막의 증착 방법 중 Plasma에서 독립적으로 이온만을 빔의 형태로 조사하여 박막을 증착하는 방법으로 기존 RF 또는 DC 스퍼터방법에 비해서 상대적으로 높은 진공도(low 10E-04 torr)와 비교적 높은 스퍼터 된 입자의 에너지를 가지는 등의 장점으로 증착 된 박막의 밀도, 거칠기가 향상되고 상대적으로 적은 결함을 가지는 박막의 제작에 사용되고 있는 기술이다. (주)인포비온에서는 IBD 기술과 더불어 표면만을 선택적으로 가열할 수 있는 EBA Technology를 사용하여 박막에 Energy를 전달하고, 이를 바탕으로 ITO 박막의 전기적, 광학적, 구조적인 특성의 변화를 관찰 연구했다 [1]. 본 연구에서는 기존의 Sputter 방법과 IBD 방법으로 증착 된 ITO 박막의 전기적, 광학적, 구조적인 특성 변화를 비교 관찰하였고, EBA 후처리로 ITO 박막을 상온에서 처리하여, 박막의 투과도, 면 저항, 미세구조의 변화를 관찰하였다. 각 특성의 변화는 UV-VIS, 4Point-Probe, TEM을 사용하여 분석하였고, 처리 전, 후의 박막의 결합에너지는 XPS로, 박막의 조성변화는 SIMS를 이용하여 각각 분석하였다.

• Proceedings of the KIPE Conference
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• 2015.11a
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• pp.109-110
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• 2015

전기자동차 구동용 전동기는 고토크/고파워 밀도, 고효율, 넓은 구동속도 범위의 특징을 가져야 한다. 영구자석 매입형 동기전동기는 이러한 특성에 가장 부합하는 전동기 형태로서 전기자동차 구동용 전동기로 각광받고 있다. 하지만 강한 자속밀도를 얻기 위하여 희토류 영구자석을 사용해야 하고, 이는 생산단가의 절감문제, 고온에서의 비가역적 감자문제, 인버터 결함 시의 안전성 문제 등의 문제점을 갖고 있다. 이러한 문제들을 극복하기 위하여 전기자동차 구동용 유도전동기 설계를 제안한다. 유도전동기가 가지는 장점들과 함께 설계 시 고려해야 할 내용들을 제시한다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.1-3
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• 2003

평판형 안테나를 채택한 TCP (Transformer Coupled Plasma) 형태의 CVD 장비를 이용하여 비정질의 실리콘 박막을 증착 하였다. 비정질 실리콘 박막은 태양전지 및 TFT-LCD 등의 디스플레이 제품 등에 다양하게 적용되고 있는데, 일반적으로 CCP(Capacitor Coupled Plasma) 형태의 CVD 장비에서 증착되어 왔다. TCP-CVD 장비는 CCP-CVD에 비해 플라즈마 내의 높은 이온밀도 및 저압, 저온에서 공정이 가능할 뿐만 아니라, 기판 바이어스 전압을 독립적으로 조절할 수 있어 이은에 의한 증착막의 결함을 낮출 수 있는 장점이 있다. 본 발표에서는 자체 기술로 제작된 TCP-CVD의 소개와 증착된 비정질 실리콘 박막의 특성평가를 위한 라만 분석 및 dark conductivity 데이타를 다루었다. 또한 비정질 실리콘 박막의 반도체 소자의 응용성을 보기 위하여 3족 및 5족의 불순물을 도핑하여 전기전도도의 변화를 측정하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.4
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• pp.135-139
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• 2014

The hydride vapor phase epitaxy (HVPE) grown GaN samples to precisely measure the surface characteristics was applied to a molten KOH/NaOH wet chemical etching. The etching rate by molten KOH/NaOH wet chemical etching method was slower than that by conventional etching methods, such as phosphoric and sulfuric acid etching, which may be due to the formation of insoluble coating layer. Therefore, the molten KOH/NaOH wet chemical etching is a better efficient method for the evaluation of etch pits density. The grown GaN single crystals were characterized by using X-ray diffraction (XRD) and X-ray rocking curve (XRC). The etching characteristics and surface morphologies were studied by scanning electron microscopy (SEM). From etching results, the optimum etching condition that the etch pits were well independently separated in space and clearly showed their shape, was $410^{\circ}C$ and 25 min. The etch pits density obtained by molten KOH/NaOH wet chemical etching under optimum etching condition was around $2.45{\times}10^6cm^{-2}$, which is commercially an available materials.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.27 no.2
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• pp.89-93
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• 2017

GaN single crystals were grown by controlling of various processing parameters such as growing temperature, V/III ratio and growing rate. We optimized thickness of bulk GaN single crystal by analyzing defect of surface and inside of the GaN single crystal for application to high brightness and power device. 2-inch bulk GaN single crystals were grown by HVPE (hydride vapor phase epitaxy) on sapphire and their thickness was 0.3~7.0 mm. Crystal structure of the grown bulk GaN was analyzed by XRD (X-ray diffraction). The surface characteristics of the grown bulk GaN were observed by OM (optical microscope) and SEM (scanning electron microscopy) with measuring EPD (etch pits density) of the GaN crystals.

• Korean Journal of Optics and Photonics
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• v.33 no.5
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• pp.218-229
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• 2022

We have investigated reliable inspection methods for finding the defects generated during the manufacturing process of lightweight, large-aperture satellite telescope mirrors using silicon carbide, and we have measured the basic physical properties of the mirrors. We applied the advanced ceramic material (ACM) method, a combined method using liquid-silicon penetration sintering and chemical vapor deposition for the carbon molded body, to manufacture four SiC mirrors of different sizes and shapes. We have provided the defect standards for the reflectors systematically by classifying the defects according to the size and shape of the mirrors, and have suggested effective nondestructive methods for mirror surface inspection and internal defect detection. In addition, we have analyzed the measurements of 14 physical parameters (including density, modulus of elasticity, specific heat, and heat-transfer coefficient) that are required to design the mirrors and to predict the mechanical and thermal stability of the final products. In particular, we have studied the detailed measurement methods and results for the elastic modulus, thermal expansion coefficient, and flexural strength to improve the reliability of mechanical property tests.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.2
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• pp.183-189
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• 2007

Ultra precise processed parts are required together with the development of optoelectronics industry. As important parts of optoelectronics industry, there are ferrule of optical connector and lens for optical devices. In particular, the lens requires high reliability with high precision without including flaws. These optical modules need ultra precise processing in order to reduce the loss of light sources and various nondestructive inspections are carried out in the finishing stage to separate good and bad quality products. Therefore, it was analyzed through the characteristics of response of amplitude and resonant frequency according to the mass variations of aspheric lens that is used currently in laser printers.

• Tunnel and Underground Space
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• v.9 no.2
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• pp.114-130
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• 1999

It is very important to study on the structural behaviors of structurally damaged tunnel linings. A series of centrifuge model tests were performed in order to investigate different behaviors of tunnel linings. A 1/100-scaled aluminum horseshoe tunnel linings with a radius 5 cm, height 8 cm were buried in a depth with dry Joomunjin standard sand, the relative density of which was 86%. Such sectional forces as bending moments and thrusts along the tunnel circumference were measured by twelve strain gages. Earth pressures in soil mass and on the outside of lining model were estimated by pressure transducers, ground surface settlements at a center and edges by using LVDTs.

• Korean Journal of Materials Research
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• v.2 no.3
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• pp.172-179
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• 1992

$Al_2O_3/ZrO_2$ composites were fabricated by pressureless sintering from commercial powders and/or nano composite powder of $Al_2O_3/ZrO_2$. The Properties of the composites such as density, strength, hardness and fracture toughness were evaluated. Microstructures and fracture surfaces ware also examined. The flexural strength remains unchanged(~640 MPa) as long as the content of commercial powders is not extreamly high, and depends on microstructures of the composites. Fracture toughness(4.3-5.3 $Mpa{\cdot}m^{1/2}$) increases with increasing content of commercial powders. Fractography shows that failure-initiating sources are 1)surface flaws resulting from machining damage, 2)crack-shaped voids formed due to $ZrO_2$ agglomeration, and 3)surface separation caused by inhomogeneous blending and by sinterability difference between nato composite powder and commercial powders of $Al_2O_3/ZrO_2$. Failure mode of the composites was mainly transgranular.

• Journal of the Institute of Convergence Signal Processing
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• v.20 no.2
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• pp.78-83
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• 2019

Sounds based machine fault diagnosis recovers all the studies that aim to detect automatically abnormal sound on machines using the acoustic emission by these machines. Conventional methods that use mathematical models have been found inaccurate because of the complexity of the industry machinery systems and the obvious existence of nonlinear factors such as noises. Therefore, any fault diagnosis issue can be treated as a pattern recognition problem. We propose here an automatic fault diagnosis method of hand drills using discrete wavelet transform(DWT) and pattern recognition techniques such as artificial neural networks(ANN). We first conduct a filtering analysis based on DWT. The power spectral density(PSD) is performed on the wavelet subband except for the highest and lowest low frequency subband. The PSD of the wavelet coefficients are extracted as our features for classifier based on ANN the pattern recognition part. The results show that the proposed method can be effectively used not only to detect defects but also to various automatic diagnosis system based on sound.