• Title/Summary/Keyword: 결정립 크기

Search Result 422, Processing Time 0.022 seconds

Effect of high-temperature annealing on the microstructure of laterally crystallized polycrystalline Si films and the characteristics of thin film transistor (고온열처리가 측면결정화시킨 다결정 실리콘 박막의 미세구조와 박막트랜지스터 특성에 미치는 영향)

  • 이계웅;김보현;안병태
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2003.11a
    • /
    • pp.70-70
    • /
    • 2003
  • 금속용액을 이용하여 측면고상결정화 시킨 다결정 실리콘 박막내의 고각입계를 줄이기 위해 서 고온열처리를 실시하였다. SEM과 TEM을 이용하여 다결정 실리콘내의 바늘모양의 결정립의 폭의 증가를 관찰하였고, 결정 립내의 결함이 감소를 관찰하였다. 그리고 결정화된 다결정 실리콘의 표면 거칠기를 AFM이용하여 퍼니스에서 53$0^{\circ}C$에서 25시간 동안 결정화 시킨 시편과 이후 80$0^{\circ}C$에서 40분간 추가 고온 열처리시킨 시편을 비교한 결과 6.09$\AA$에서 4.22$\AA$으로 개선되었음을 확인할 수 있었다. 박막내의 금속에 의한 오염을 줄이기 위해 금속의 농도를 줄인 금속용액을 결정화에 사용하였다. 이때 저농도 금속용액을 사용하여 측면결정화시킨 다결정 실리콘 박막내의 소각입계를 이루는 결정립군의 크기가 고농도 금속용액을 이용하여 측면결정화시킨 경우보다 증가함을 확인 할 수 있었다. 박막트랜지스터를 제작하여 트랜지스터의 전기적특성을 살펴보았다. 전계이동도가 80$0^{\circ}C$ 고온 열처리에 의해서 53$\textrm{cm}^2$/Vsec 에서 95$\textrm{cm}^2$/Vsec 로 상승하였는데 이는 고온열처리에 의해서 측면결정화된 다결정 실리콘내의 트랩 밀도가 2.2$\times$$10^{12}$/$\textrm{cm}^2$ 에서 1.3$\times$$10^{12}$$\textrm{cm}^2$로 감소하였기 때문이다.

  • PDF

superplastic deformation conditions of $YBa_{2}Cu_{3}O_{7-x}$ superconducting materials ($YBa_{2}Cu_{3}O_{7-x}$ 계 초전도체의 초소성 변형조건)

  • Kim, Byeong-Cheol;Jo, Beom-Rae;Song, Jin-Tae
    • Korean Journal of Materials Research
    • /
    • v.5 no.3
    • /
    • pp.371-378
    • /
    • 1995
  • YBCO 산화물 초전도체의 초소성 변형에 대한 최적 변형조건을 파악하고자 80$0^{\circ}C$~93$0^{\circ}C$의 온도범위에서 1.0 $\times$ $10^{-3}$s^{-1}$!1.0 $\times$ $10^{-7}$s^{-1}$의 초기변형속도로 압축시험을 수행하였다. 변형속도 민감지수는 m=0.50 $\pm$ 0.1로 나타났다. 이는 결정립계 미끄러지\ulcornerㄹ 주 변형기구로 하는 초소성임을 의미한다. 결정립크기에 따른 유동응력과의 관계는 $\sigma$\propto$d^{1.8 $\pm$ 0.3}$의 지수함수식을 이루고 있으며 Nabarro-Hering 크\ulcorner과 상응하는 격자확산이 확산경로임을 보였다. 초소성 변형에 대한 활성화에너지는 Q=571 $\pm$ 30 kJ/mole이었다. 본 실험온도 구간에서 압축 변형시 변형속도, 변형응력 및 결정립크기에 따른 고온 변형거동 관계식은 $\varepsilon$=A$\sigma$^{2.00 $\pm$ 0.04 - 1.8 $\pm$ 0.3}$ exp(-571 $\pm$ 30kJ/RT)와 같이 유도 되었다. 본 실험조건에서 최적 초소성 변형조건은 86$0^{\circ}C$ 부금, 초기변형속도 ~1.0 $\times$ $10^{-4}$S^{-1}$이었다.

  • PDF

The Effect of grain size on the damping capacity of Fe-26Mn-2Al alloy (Fe-26Mn-2Al 합금의 진동 감쇠능에 미치는 결정립 크기의 영향)

  • Kang, C.Y.;Eom, J.H.;Kim, H.J.;Sung, J.H.
    • Journal of Power System Engineering
    • /
    • v.11 no.1
    • /
    • pp.115-120
    • /
    • 2007
  • The effect of grain size on the damping capacity of Fe-26Mn-2Al alloy studied in this paper has been investigated after changing the microstructure by cold rolling and changing grain size. Micro structures in Fe-26Mn-2Al at room temperature consist of a large quantity of austenite and a small quantity of ${\varepsilon}\;and\;{\alpha}'$ martensite. And ${\varepsilon}\;and\;{\alpha}'$ martensite was increased by increasing the degree of cold rolling. The content of deformation induced martensite was increased with increasing the degree of cold rolling. Damping capacity was linearly increased with increasing ${\varepsilon}$ martensite content, which suggests that stacking faults and ${\varepsilon}$ martensite variant boundaries are the principle damping sources. With increasing the grain size in Fe-26Mn-2Al alloy, the damping capacity was increased due to increasing the volume fraction of ${\varepsilon}$ martensite by decrement in stability of austenite phase. With decreasing the grain size, the content of deformation induced martensite was decreased and the damping capacity was decreased.

  • PDF

Effects of Al Doping on Sinterabllity and Microstructure in $UO_2-6wt%Gd_2O_3$ Pellets ($UO_2-6wt%Gd_2O_3$ 소결체에서 Al 첨가가 소결성 및 미세조직에 미치는 영향)

  • Baek, Jong-Hyeok;Yu, Ho-Sik;Yun, Gyeong-Ho;Kim, Hyeong-Su;Seo, Geum-Seok
    • Korean Journal of Materials Research
    • /
    • v.5 no.6
    • /
    • pp.644-649
    • /
    • 1995
  • The sinterability and the microstructure of Al doped UO$_2$-6wt%Gd$_2$O$_3$pellets, which were doped using Al(OH)$_3$, ADS(aluminium distearate), Al(OH)$_3$+ ADS mixture and sintered at 1$700^{\circ}C$ for 4h in H$_2$, atmospheres, were examined. The sintered densities of Al doped UO$_2$-6wt%Gd$_2$O$_3$pellets were more than 94% T.D.. The open porosity in ADS doped pellets was dramatically decreased. And the amounts of pores less than l${\mu}{\textrm}{m}$ and larger than 10${\mu}{\textrm}{m}$ were decreased regardless of the kinds of doped Al compounds. And the average pore size of Al doped UO$_2$-6wt%Gd$_2$O$_3$pellets was ranged between 2 and 3${\mu}{\textrm}{m}$. While grain structure of non-doped UO$_2$-6wt%Gd$_2$O$_3$pellets was revealed to be duplex type (rocks in sands), that of Al doped pellets to be uniformly equiaxid type. Especially, the grain size in ADS doped pellets was averaged to 4.6${\mu}{\textrm}{m}$.

  • PDF

Phase and microstructure of hot-pressed SiC-AlN solid solutions (열간가압소결에 의한 SiC-AIN 고용체의 상 및 미세구조)

  • Chang-Sung Lim;Chang-Sam Kim;Deock-Soo Cheong
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.6 no.2
    • /
    • pp.238-246
    • /
    • 1996
  • High-density SiC-AIN solid solutions were fabricated from powder mixtures of $\beta$-SiC and AIN by hot-pressing in the 1870 to $2030^{\circ}C$ temperature range. The reaction of AIN and $\beta$-SiC (3C) powder transformed to the 2 H (wurzite) structure appeared to depend on the temperature and SiC/A1N ratio and seeds present. The crystalline phases consisted of a SiC-rich solid-solution phase and an A1N-rich solid-solution phase. At $2030^{\circ}C$ for 1 h, for a composition of 50 % AIN/50 % SiC with a seeding of $\alpha$-SiC, the complete solid solution could be obtained and the microstructures are equiaxed with a relatively homogeneous grain size of 2 H phases. The variation of the seeding of $\alpha$-SiC in SIC-A1N solid solutions could be attributed to the transformation behaviour and differences in size and shape of the grains, as well as to other factors, such as grain size distributions, compositional inhomogeneity, and structural defects.

  • PDF

Effects of Ag Seed Layer on the Magnetic Properties and the Microstructural Evolution of SmCo/Cr Thin Films (Ag 씨앗층이 SmCo/Cr 박막의 자기적 특성과 미세구조에 미치는 영향)

  • 이성래;고광식;김영근
    • Journal of the Korean Magnetics Society
    • /
    • v.11 no.2
    • /
    • pp.63-71
    • /
    • 2001
  • The effects of an Ag seed layer on the magnetic properties and the microstructural evolution of SmCo/Cr thin films deposited on glass substrates were investigated. Coercivity of the films is 2.0 kOe when the thickness of Ag seed layer was 1nm thick, but it increased to 2.7 kOe when the Ag seed layer thickness is 3 nm. The increase of coercivity for film with 3 nm-thick Ag is due to roughness of Cr and grain size of Cr by the Ag microbumps. Ar partial pressure influenced on the formation of Ag microbumps, for example, they were formed at 5 mTorr when Ag thickness was 1 nm. The mechanism of magnetization reversal of the SmCo films changed from domain wall motion to domain rotation as the Ag inserted. This was thought to be due to inhibition of domain wall motion by the reduction of Cr grain size and the increase of roughness.

  • PDF

MAGNETORESISTANCE AND Mn DIFFUSION BEHAVIORS OF CoNbZr-BASED SPIN VALVES WITH NANO OXIDE LAYERS

  • Kim, Jong-Soo;Kim, Young-Keun;Lee, Seong-Rae
    • Proceedings of the Korean Magnestics Society Conference
    • /
    • 2002.12a
    • /
    • pp.58-59
    • /
    • 2002
  • 고밀도 자기기록 매체의 재생 헤드로 응용되기 위해서는 높은 자기 저항비와 소자 제조 및 작동시 발생되어지는 열에 대해서 안정해야한다. 일반적으로 스핀밸브에서 나타나는 열화현상 중 가장 주된 원인은 반강자성체에 사용된 Mn이 고정층 및 비자성층으로의 확산으로 인해 반강자성체/강자성체 산이의 교환결합력의 감소와 스핀의존산란이 감소되어 자기적 특성이 열화 되는 것이다[1]. 이러한 상호확산은 거칠기, 결정성, 결정립 크기와 같은 미세구조에 크게 의존한다[2]. (중략)

  • PDF

A study on the electrical breakdown characteristics of thermal treated low density polyethylene film (열처리된 저밀도폴리에틸렌의 절연파괴특성에 관한 연구)

  • ;Y.Suzuoki;M.Mizutani
    • Electrical & Electronic Materials
    • /
    • v.6 no.4
    • /
    • pp.366-373
    • /
    • 1993
  • 고체구조와 절연파괴의 관계를 확실하게 알아보기 위하여 온도 100[.deg.C]의 실리콘유 내에서 1시간 열처리한 시료에 대해서 직류(DC)와 임펄스 절연파괴특성을 검토했다. 시료의 결정화도는 적외선 흡수와 X선 회절실험 측정방법으로 평가했으며 그리고 시료의 결정립크기와 분상은 시차주사 열량측정을 이용하였다. 실험결과 결정화도의 크기는 서냉, 수냉, 원시료 그리고 급냉시료 순으로 적어짐을 확인하였고 각각 70.23[%], 61.6[%], 56.75[%] 및 34.7[%]를 얻었다. 온도 30, 50[.deg.C]에서 임펄스 절연파괴특성은 결정화도의 감소에 따라 높아지는데 이것은 전자열적파괴를 시사하고 있다. 그리고 온도의 증가에 따라 임펄스 절연파괴강도는 감소되는데 이것은 Frohlich-type의 파괴이론을 제시한다. 또한 직류절연파괴는 저온영역에서 결정화도에 거의 의존하지 않지만 그러나 고온영역에서는 약간 의존한다.

  • PDF

Ultrasonic Attenuation due to the Changes of Grain Size and microstructure of SCM440 Steel (SCM440 강의 결정입도와 조직의 변화에 따른 초음파 감쇄)

  • Park, Eun-Su;Gang, Gye-Myeong;Kim, Seon-Jin;Jang, Sun-Sik
    • Korean Journal of Materials Research
    • /
    • v.3 no.6
    • /
    • pp.585-592
    • /
    • 1993
  • The effects of grain size and microstructure on the ultrasonic attenuation was investigated with SCM440 steel quenched and tempered at various temperatures. The ultrasonic attenuation was primarily due to the grain boundary scattering and the ultrasonic attenuation coeffecient increased with increasing grain size. In the meantime, it was found that the ultrasonic attenuation coefficient decreased with increasing tempering temperature. The dependence of ultrasonic attenuation coefficient on the frequency of ultrasonic wave had linear relationship on a log-log scale and was proportional to the Roney's equation.

  • PDF

Microstructure of Nanocrystalline Electrolytic $MnO_2$ (EMD) (Nanocrystalline Electrolytic $MnO_2$ (EMD)의 미세구조 연구)

  • ;Anqiang He;Arthur H. Heuer
    • Korean Journal of Crystallography
    • /
    • v.14 no.2
    • /
    • pp.79-83
    • /
    • 2003
  • The microstructure of bulk electrolytic MnO₂ (EMD) was studied using x-ray diffraction and transmission electron microscopy (TEM). The bulk sample showed a typical powder x-ray diffraction pattern of EMD materials. TEM study showed that the structure of EMD is present at two length scales;grains, ∼0.2 ㎛ in diameter, and ∼10 nm crystallites within the grain. The electron beam microdiffraction study revealed that each grain is an assemblage of multiphase with a common crystallographic orientation, and_that ∼50% of the crystallites are Ramsdellite, ∼30% are ε-MnO₂, and ∼15% are Pyrolusite. The {1120}peak located at about 67° in powder XRD pattern as well as a high-resolution electron microscope (HREM) image of (0001) plane support the existence of ε-MnO₂ phase.