• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.9
• /
• pp.11-17
• /
• 2001

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.05a
• /
• pp.796-799
• /
• 2000

The concern of environmental problems by using coolant required the recycling technologies of used coolant and development of environmental-firiendly coolant Some methods have been developing. Those are the dry grinding with compressed cold air and grinding with misted coolant. The farmer is effective in the cooling effect, but has not the performance of lubrication. Otherwise, the latter can satisfy both of them and also decrease the environmental pollution. This paper tried to analyze the cooling effect and surface integral of coolant, compressed cold air, mist through measuring the temperature of grind point and grinding force. Especially, the grinding method with misted coolant according to parameters was done. So, the finding method with misted coolant proved to be effective as one of methods to decrease the environmental pollution.

• Journal of the Korean Society for Precision Engineering
• /
• v.15 no.9
• /
• pp.145-151
• /
• 1998

In this study, the experimental and analytic investigation with cold air system has been performed for improving the working environment of the conventional grinding fluid. Very simple cold air system was developed which could replace by the conventional grinding fluid system. The identification of heat of grinding Bone is very important for precision grinding. The experimental data was analysed to investigate the heat which was transferred to the workpiece. It was found that 45∼55％ of the total energy for dry grinding, 22∼28％ for wet grinding, and 32∼35％ for cold air system are conducted to the workpiece in grinding with cubic boron nitride wheel. Cubic boron nitride wheel could reduce the residual stress and thermal demage comparing with aluminium oxide wheel, because cubic boron nitride wheel has very high extreme thermal conductivity.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.11a
• /
• pp.793-797
• /
• 2000

The environmental problems by using coolant demanded the new cooling methods. As one of them the studies on the dry grinding with compressed cold air have been done. The cooling method using compressed cold air was effdve thmugh going down the temperature of compressed air supplied below $-25^{\circ}C$ and inneasing the amount of mmpresd cold air, but had not enough cooling effect due to the low performance of lubrication. Therefore, the cooling methods using MQL(Minimum Quantity Lubrication) or mist newly were suggested. These two methods can satisfy both cooling effect and lubrication with only small amount of coolant, also has the benefit in the point of decreasing the envimnmental pollution. This paper focused on analyzing the grindmg characteristics of the cooling method using mid. The generated heat and grinding force of the cooling method using mist were compared with them of coolant and compressed cold air. And them grinding test according to the temperature of compressed cold air, mist spray amount and mist supply direction were done.

• Journal of the Microelectronics and Packaging Society
• /
• v.15 no.2
• /
• pp.63-67
• /
• 2008

3D integration technology has been a major focus of the next generation of IC industries. In this study Si wafer ultra-thinning has been investigated especially for the effect of ultra-thinning on the silicon surface. Wafers were grinded down to $30{\mu}m\;or\;50{\mu}m$ thickness and then grinded only samples were compared with surface treated samples in terms of surface roughness, surface damages, and hardness. Dry polishing or wet etching treatment has been applied as a surface treatment. Surface treated samples definitely showed much less surface damages and better roughness. However, ultra-thinned Si samples have the almost same hardness as a bulk Si wafer.

• Journal of the Korean Ceramic Society
• /
• v.42 no.2 s.273
• /
• pp.88-93
• /
• 2005

Ti-AI-Si-N coating layers were deposited on WC-Co substrates by a hybrid system of arc ion plating and sputtering techniques. The coatings were prepared with different Si contents to investigate the effect of Si content on their mechanical properties and microstructures. The dry sliding wear experiments were conducted on Ti-AI-Si-N coated WC-Co discs at constant load, 3N, and sliding speed, 0.1 m/s with two different counterpart materials such as steel ball and zirconia ball using a conventional ball-on-disc sliding wear apparatus. In the case of steel ball, the friction coefficient of Ti-AI-Si-N coating layers became lower than that of Ti-AI­N coating layers. The friction coefficient decreased with increasing of Si content due to adhesive wear behavior between coating layer and steel ball. On the contrary, in the case of zirconia ball, the friction coefficient increased with increasing of Si content, indicating that abrasive wear behavior was more dominant when the coating layers slid against zirconia ball.