• 한국세라믹학회지
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• 제32권12호
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• pp.1408-1416
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• 1995

Microstructure and ferroelectric properties of sol-gel derived PZT(52/48) and PT interlayered PZT(52/48) thin films on Pt/Ti/SiO2/Si substrates were investigated. Films were fabricated using Acetylacetone chelated PT and PZT(52/48) sols. PZT(52/48) thin films annealed at $700^{\circ}C$ for 20 min showed the rosette structure with the size of 1.2~1.6${\mu}{\textrm}{m}$ and the pyrochlore phse was contained. PT interlayered PZT thin films, which is inserted by PbTiO3 thin layer with the thickness of 130 $\AA$ between PZT thin film and electrode, consisted of a single perovskite phase after annealing above 55$0^{\circ}C$. They exhibited the uniform and columnar grains of 0.1~0.16${\mu}{\textrm}{m}$, which are applicable for microelectronic device including non-volatile memory. Typical P-E hysteresis loops could be obtained from PT interlayered PZT thin film at as low as the annealing temperature of 50$0^{\circ}C$. Ferroelectric properties of PT interlayered PZT thin films were improved as increasing annealing temperature up to $700^{\circ}C$, and then deteriorated at 75$0^{\circ}C$. PZT(52/48) and PT interlayered PZT(52/48) thin film annealed at $700^{\circ}C$ for 20 min displayed Ps=38.8$\mu$C/$\textrm{cm}^2$, Pr=10.0$\mu$C/$\textrm{cm}^2$, Ec=65.3 kV/cm and Ps=28.5$\mu$C/$\textrm{cm}^2$, Pr=9.8$\mu$C/$\textrm{cm}^2$, Ec=76.1 kV/cm, respectively.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.764-768
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• 2016

To investigate excess $Na^+$ effect, $Bi_{0.5}(Na_{0.78+x}K_{0.22})_{0.5}TiO_3$ ($0{\leq}x{\leq}0.05$) (BNKT) ceramics were prepared by using a conventional solid-state reaction method. The structure and ferroelectric properties of BNKT ceramics were characterized by XRD (X-ray diffraction) and polarization dependence by external electric field. Also, the temperature dependence of dielectric constant and loss were studied. From these results, it was found that appropriate excess $Na^+$ into BNKT ceramics compensate the volatility and induce dense ceramics. The enhanced piezoelectric coefficient (158 pC/N) and depolarization temperature ($202^{\circ}C$) were obtained for the x=0.01 composition.

• 한국재료학회지
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• 제19권4호
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• pp.228-231
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• 2009

Phase transition in ferroelectric polymer is very interesting behavior and has been widely studied for real device applications, such as actuators and sensors. Through the phase transition, there is structural change resulting in the change of electrical and optical properties. In this study, we fabricated the Febry-Perot interferometer with the thin film of ferroelectric P(VDF-TrFE) 50/50 mol% copolymer, and thermo-optical properties were investigated. The effective thermo-optical coefficient of P(VDF-TrFE) was obtained as $2.3{\sim}3.8{\times}10^{-4}/K$ in the ferroelectric temperature region ($45^{\circ}C{\sim}65^{\circ}C$) and $6.0{\times}10^{-4}/K$ in the phase transition temperature region ($65^{\circ}C{\sim}85^{\circ}C$), which is a larger than optical silica-fiber and PMMA. The resonance transmission peak of P(VDF-TrFE) with the variation of temperature showed hysteretic variation and the phase transition temperature of the polymer in heating condition was higher than in the cooling condition. The elimination of the hysteretic phase transition of P(VDF-TrFE) is necessary for practical applications of optical devices.

• 한국세라믹학회지
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• 제35권10호
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• pp.1040-1048
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• 1998

Ferroelectric properties of{{{{ { { { {SrBi }_{2 }Ta }_{2-x }Nb }_{x }O }_{9 } }} (SBIN) thin films were affected by the amount of Bi content in SBTN. The addition of Bi into the SBTN films could be accomplished by heat treating SBTN/Bi2O3/SBTN het-erostructures fabricated by r.f. magnetron sputtering method. The variation of Bi content was controlled by changing the thickness of the sandwiched Bi2O3 in SBTN/Bi2O3/SBTN heterostructure from 50 to 400$\AA$. As changing the thickness of the sandwiched Bi2O3 in Bi2O3 films was increased from 0 to 100$\AA$ the grain grew faster and the ferroelectric pro-perties were improved. On the other hand when the thickness of Bi2O3 films was thicker than 150$\AA$ the fer-roelectric properties were deteriorated Especially for SBTN thin films inserted by 400$\AA$ Bi2O3 layer a Bi2Phase appeared as a second phase resulting in poor ferroelectric properties. The maximum remanent po-larization (2Pr) and coercive field(Ec) were obtained for the SBTN/Bi2O3/(100$\AA$)/SBTN thin films. In this case 2Pr and Ec were 14.75 $\mu$C/cm2 and 53.4kV/cm at an applied voltage of 3V respectively.

• 대한전기학회논문지
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• 제41권8호
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• pp.858-868
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• 1992

0.085Ba(LaS11/2TNbS11/2T)OS13T-0.915Pb(ZrS1yTTiS11-yT)OS13T (0.45$\leq$y$\leq$0.65) transparent electrooptic ceramics were fabricated by two-stage sintering method. The structural, ferroelectric and electrooptic properties were investigated varying composition and second sintering time. Also the possibility of application to electrooptic device was studied. If we increase the PbZrOS13T contents, dielectric constants were increased and Curie temperature was decreased. In the composition of 0.55[mol] PbZrOS13T, electromechanical coupling factor and piezoelectric charge constant were the highest values of 43[%] and 173x10S0-12T[C/N], respectively. Mechanical quality factors were decreased with the increasing PbZrOS13T contents. Light transmittance was increased with wavelength when measured from 300[nm] to 900[nm], and with PbZrOS13T contents in the range of 0.50[mol]-0.65[mol], and had the highest value of 67[%] in the composition of 0.65[mol] PbZrOS13T. From the results of ferroelectric hysteresis loop and transmitted light intensity with electric field, the specimens with compositions of 0.65,0.60,0.55[mol] PbZrOS13T were applicable to electrooptic memory device and those with compositions of 0.50,0.45[mol] PbZrOS13T were applicable to linear electrooptic device.

• 한국재료학회지
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• 제16권11호
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• pp.705-709
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• 2006

Nb was doped to Pb-free $(Bi_{0.5}Na_{0.5})TiO_3$ (BNT) by a solid state mixing process to form $(Bi_{0.5}Na_{0.5})Ti_{1-x}Nb_xO_3\;(x=0{\sim}0.05)$ (BNTNb) and its doping effects on ferroelectric and piezoelctric properties of BNT were investigated. The BNTNb solid solutions were formed up to x=0.01 with no apparent second phases while grain sizes decreased. As x increased, coercive field ($E_c$) and mechanical quality factor ($Q_m$) decreased but piezoelectric constant ($d_{33}$) increased, which indicates Nb acts as a donor for BNT.

• 센서학회지
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• 제32권4호
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• pp.238-245
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• 2023

0.75(Bi_1/2Na_1/2)TiO₃-0.25SrTiO₃ (BNT-25ST) ceramics with high densities were successfully prepared at a sintering temperature of 1,000℃ by adding a mixture of 1 mol% CuO and 0.5 mol% Na₂CO₃ or 0.5 mol% CuO and 0.25 mol% Na₂CO₃. Double polarization-electric field (P-E) hysteresis curves and sprout-shaped bipolar strain-electric field (S-E) hysteresis curves with small negative strains were observed in the pristine and CuO-added BNT-25ST ceramics whereas the Na₂CO₃-added sample showed similar P-E and S-E curves to a typical ferroelectric. The pristine BNT-25ST ceramics showed an extremely large strain and a large-signal piezoelectric strain constant (d₃₃^*): 0.287 % at 80 kV/cm and 850 pm/V at 20 kV/cm. Similar values, 0.248 % at 80 kV/cm and 655 pm/V at 20 kV/cm, were obtained in the CuO-added sample. However, the pristine and CuO-added samples showed large hysteresis in unipolar S-E curves at an electric field of less than 20 kV/cm. The Na₂CO₃-added sample showed smaller values of the strain and d₃₃^* but displayed a linear change and small hysteresis in the unipolar S-E curve. The co-added sample with CuO and Na₂CO₃ displayed intermediate P-E and S-E hysteresis curves.

• 마이크로전자및패키징학회지
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• 제22권2호
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• pp.33-39
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• 2015

타이타늄산바륨($BaTiO_3$)은 대표적인 강유전 물질로 유전상수가 200 이상의 값을 나타내는 물질이다. 타이타늄산바륨을 나노입자화하면 나노커패시터(nanocapacitors)와 강유전체 메모리(ferroelectric random access memories)와 같이 여러 용도로 응용 가능하다. 하지만, 나노입자의 합성방법에 따라 나노입자의 분산특성이 달라지며 이에 활용할 수 있는 분야가 달라질 수 있다. 본 연구에서는 타이타늄산바륨 나노입자를 옥살레이트법(oxalate method)과 sol-gel법(ambient condition sol method)으로 합성하고 각 방법에 따른 나노입자의 크기와 분산상태를 확인하였다. 각각의 공정에 사용한 캡핑 에이전트(capping agent)는 poly vinyl pyrrolidone (PVP)을 옥살레이트법에 이용하였고 sol-gel법에는 tetrabutylammonium hydroxide (TBAH)를 이용하였다. 합성된 나노입자의 X-선 회절 분석 패턴을 분석하여 cubic 결정구조를 갖는 타이타늄산바륨을 확인하였다. 푸리에(Fourier) 변환 적외선 분광분석을 이용하여 나노입자의 캡핑 에이전트 결합상태와 시차주사현미경과 입도분석기를 이용한 나노입자의 크기 및 뭉침 변화를 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1843-1845
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• 1999

We have investigated the dielectric characteristics of palmitic acid(PA), stearic acid (SA) and arachidic acid(AA) Langmuir-Blodgett(LB) films because these fatty acid systems have a same hydrophilic group and a different hydrophobic one (alkyl chain length). In this work. fatty acid systems were used as LB films and the status of the deposited films was confirmed by evaluating the transfer ratio. the UV absorption and the capacitance. Also, the dielectric characteristics such as the frequency-capacitance characteristics and the dielectric dispersion and absorption characteristics of PA, SA and AA through-plane were measured. The relative dielectric constants of PA, SA and AA LB films were about $2.6\sim4.6$, $2.4\sim4.1$ and $2.2\sim3.8$, respectively. That is, the relative dielectric constants were decreased in proportion to the chain length of methylene group. And, the dielectric dispersion and absorption of each fatty acid LB films have arisen from spontaneous polarization of dipole polarization in the range of $10^4\sim10^5[Hz]$.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.104-104
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• 2003

다양한 구조를 갖는 polysilsesquioxane은 열적, 전기적, 기계적 성질이 우수하여 차세대 고집적 반도체용 저 유전율 층간 절연막 재료로 부각되고 있으며, 유/무기 하이브리드 재료로 많은 연구 대상이 되고 있다. 그러나 PMSSQ(polymethylsilsesquioxane)는 취성으로 인한 반도체 제조의 CMP 공정에서 미세 크렉 발생의 위험이 있으므로 막의 인성 강화가 요구되고 있다. 이를 위하여 PMSSQ의 취성을 보완하기 위한 목적으로 선형 분자인 dimethylsiloxane을 10-20mo1% 도입하고자 하였다. 이때 도입된 dimethylsiloxane기가 PMSSQ에 균일하게 분포하지 않으면 실리콘 기판에 코팅 후 약 43$0^{\circ}C$의 열처리 공정 중에 열분해 되는 위험이 있다. 이에 따라 본 연구에서는 dimethylsiloxane기의 열분해에 의한 문제를 최소화하기 위하여 출발 물질인 MTMS(methyltrimethoxysilane)와 DMDMS(dimethyldimethoxysilane)과의 가수분해 속도차이를 고려한 단계(step) 반응법과 MTMS 와 DMDES(dimethyldiethoxysilane)를 사용한 리간드 교환법(ligand exchange)으로 dimethylsiloxane이 PMSSQ에 도입된 공중합체를 합성하였다. 각 합성 방법에 따라 합성된 공중합 PMSSQ의 특성을 TGA, TG-IR, $^1$H-NMR, $^{29}$ Si-NMR과 in-situ IR을 통하여 분석하였다. 또한 dimethylsiloxane 도입 양 및 상기 제조 방법에 따라 합성한 공중합체를 Si 기판위에 코팅하여 43$0^{\circ}C$에서 열처리한 후 코팅막의 강도, 두께 및 굴절율 변화를 ellipsometry 와 nanoindenter로 분석하였다.