• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.11
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• pp.9-17
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• 2000

A sensor array with 10 discrete sensors integrated on a substrate was developed for discriminating the kinds and quantities of explosive gases. The sensor array consisted of 10 oxide semiconductor gas sensors with $SnO_2$ as base material and had broad sensitivity to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensitivity signal of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of explosive gases like butane, propane and methane under the lower explosion limit through the principal component analysis (PCA) method.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.1
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• pp.11-19
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• 2003

A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).

• Journal of Sensor Science and Technology
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• v.10 no.2
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• pp.108-117
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• 2001

A sensor array with 10 discrete sensors integrated on a substrate w3s developed for discriminating the kinds and quantities of inflammable gases, like butane, propane, methane, LPG, carbon monoxide. The sensor array consisted of 10 metal oxide semiconductor gas sensors using the nano-sized $SnO_2$ as base material and had differentiated sensitivity patterns to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and good reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensing patterns of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of the tested inflammable gases under the lower explosion limit through the principal component analysis(PCA).

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.12
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• pp.17-23
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• 2003

A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.445-450
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• 1997

An ammonia gas sensor with high sensitivity using thick-film technology were fabricated and examined. The material for sensing the ammonia gas was the mixture of oxide semiconductor, $FeO_{x}-WO_{3}-SnO_{2}$. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element were proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$ gas sensor which shows opposite direction of resistance change in comparison with that of the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.6 no.2
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• pp.315-322
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• 2002

A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric－pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.％ Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.4 no.3
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• pp.705-711
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• 2000

A thin film oxide semiconductor micro gas sensor array which shows only 60 mW of power consumption at an operating temperature of $300^{\circ}C$ has been fabricated using microfabrication and micromachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double-layer structure of $0.1\mum\; thick\; Si_3N_4 \;and\; 1 \mum$ thick phosphosilicate glass (PSG) prepared by low-pressure chemical-vapor deposition (LPCVD) and atmospheric-pressure chemical-vapor deposition (APCVD), respectively. The sensor array consists of such thin film oxide semiconductor sensing materials as 1 wt.% Pd-doped $SnO_2,\; 6 wt.% A1_2O_3-doped\; ZnO,\; WO_3$/ and ZnO. Baseline resistances of the four sensing materials were found to be stable after the aging for three days at $300^{\circ}C$. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials.

• Proceedings of the Korea Information Processing Society Conference
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• 2006.05a
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• pp.379-382
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• 2006

일반적으로 센서 어레이는 많은 채널의 센서를 가지고 있으므로 분석해야 할 데이터의 양이 많다. 따라서 다변량(多變量) 분석 방법을 이용하는데, 크게 통계적 방법과 신경망 방법을 분석하고자 하는 데이터의 특성이나 분석에 필요한 환경 조건에 맞는 분석 방법을 선택하여 이용한다. 센서 어레이의 신호 패턴을 분석하기 위해 본 연구에서는 상태 천이 모델을 이용하여 측정된 가스의 특성을 반영할 수 있는 통계적 방법에 대해 연구하였다. 센서 어레이 신호 데이터를 패턴 모양의 특성을 나타낼 수 있는 상태 천이 모델로 변환하여 가스 종류 식별이 보다 정확하게 이루어 질 수 있도록 모델을 설계하는데 중점을 두고, 모델링 요소인 '상태'는 일정한 시간 간격으로 샘플링 하였을 때의 신호값으로,'천이 관계는 각 천이 벡터의 각으로 각각 정의하여 각도변이 기반 상태천이 모델링을 고안하였다.

• Journal of Sensor Science and Technology
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• v.11 no.5
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• pp.286-293
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• 2002

We fabricated gas recognition system using conducting polymer sensor array for recognizing and analyzing VOCs(Volatile Organic Compounds) gases. The polypyrrole and polyaniline thin film sensors which were made by chemical polymerization were employed to detect VOCs. The multi-dimensional sensor signals obtained from the sensor array were analyzed using PCA(principal component analysis) technique and RBF(radial basis function) Network. Throughout the experimental trails, we confirmed that RBF Network is effective than PCA technique in identifying VOCs.

• Proceedings of the Korea Society for Industrial Systems Conference
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• 2002.06a
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• pp.356-360
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• 2002

Polluting the air with such pollutants as CO, H₂S and SO₂, industrial development huts increased the danger of gas toxication. Futhermore, as the: living standard goes higher, the consumption of explosive hydrocarbonic gases such as butane(C₄H/sub 10/) or propane(C₃H/sub 8/) has been soaring, which results in the danger of a gas explosion. As measures to cope with such dangers, the development of highly sensitive gas sensors, gas detectors adopting gas-sensing technologies, and gas recognition systems are urgently required. The objective of the present research is to develop a gas recognition system that is capable of identifying specific types of selected gases by formulating a semiconductor-typed gas sensor array, which not only improves the selectivity of semiconductor-typed gas sensors but also minimizes the erect of drifts on a single sensor signal, and applying the input pattern data of gases detected by the array to a neural network.