• Transactions of Materials Processing
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• v.13 no.3
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• pp.225-229
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• 2004

Chemical Mechanical Polishing(CMP) process becomes one of the most important semiconductor processes. But the basic mechanism of CMP still does not established. Slurry fluid dynamics that there is a slurry film between a wafer and a pad and contact mechanics that a wafer and a pad contact directly are the two main studies for CMP. This paper based on the latter one, especially on the abrasion wear model. Material Removal Rate(MRR) is calculated using the trajectory length of every point on a wafer during the process time. Both the rotational velocity of a wafer and a pad and the wafer oscillation velocity which has omitted in other studies are considered. For the purpose of the verification of our simulation, we used the experimental results of S.H.Li et al. The simulation results show that the tendency of the calculated MRR using the relative velocity is very similar to the experimental results and that the oscillation effect on MRR at a real CMP condition is lower than 1.5%, which is higher than the relative velocity effect of wafer, and that the velocity factor. not the velocity itself, should be taken into consideration in the CMP wear model.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.318-321
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• 2009

Transformation plasticity is that when a phase transformation of ferrous or non-ferrous alloys progresses even under an extremely small applied stress compared with a yield stress of the material, a permanent deformation occurs. One of widely accepted description for the transformation was proposed by Greenwood and Johnson [1]. Their description is based on an assumption that a weaker phase of an ideal plastic material could deform plastically to accommodate the externally applied stress and the internal stress caused by the volumetric change accompanying the phase transformation. In this study, an implicit finite element model was developed to simulate the deformation behavior of a low carbon steel during phase transformation. The finite element model was coupled with a phase field model, which could simulate the kinetics for ferrite to austenite transformation of the steel. The thermo-elasto-plastic constitutive equation for each phase was adopted to confirm the weaker phase yielding, which was proposed by Greenwood and Johnson [1]. From the simulation, the origin of the transformation plasticity was quantitatively discussed comparing with the other descriptions of it.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.2
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• pp.81-90
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• 2013

A study on the flow-structure characteristics of marine 3/2WAY pneumatic valve is essential for optimizing the performance of ship engines. It is important that the valve has desirable safety factor and reduced weight from safety and economic point of view. In this paper, flow-structure characteristics of pneumatic valve is obtained by being optimized based on the proper design criteria. The air with the pressure of 30 bar is the working fluid which is made to fill in the tack in short time. This time is defined as the filling time. On optimum design by considering the flow-structure characteristics, the approach is based on (1) the mathematical formulation of design decisions using the compromise decision-making method, and (2) the approximation technique of response surfaces. The methodology is demonstrated as the multi-objective optimization tool to improve the performance of marine 3/2WAY pneumatic valve.

• Transactions of Materials Processing
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• v.21 no.4
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• pp.234-239
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• 2012

This study examines the forming properties and forming loads needed to increase the edge thickness on the external face of a plate using finite element analysis(FEA). Recently, forming optimization techniques within FEA are being extensively used in designing the optimal forming conditions for processes like forging, extrusion, rolling, and spinning. Most of these existing forming operations involve reducing the volume per unit length, but research for increasing volume per unit length is not very extensive. For this study we chose an automotive engine flywheel which is a welded assembly of a plate and a gear with each component having a different thickness. We considered a forming technique to increase the thickness in order to allow the machining of the gear directly on the external face of plate alleviating the need for a weld. To study various forming techniques, we used the finite element method with the flow stress of material and incremental forming steps. We conclude from this study that the analysis of forming properties and forming loads by using the finite element analysis and testing is useful as a method to increase the thickness per unit length.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.106-112
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• 2000

Cognition and control of grinding trouble occurring during the grinding process are classified into a quantitative knowledge which depends on experimental data and qualitative knowledge which relies on skiful engineers. grinding operations include a large number of functional parameters since there are several ways of coping with ginding trouble. One is the qualitative method which depends on empirical knowledge utilizing the skilful experts from the workshop the other is the quantitative method which utilizes the experimental data obtained by sensor. But they are all difficult to accomplish from the grinding trouble-shooting system The reason is that grinding troubles are not accomplish from the grinding trouble-shooting system,. The rason is that grinding troubles are not easily controlled in the quantitative method and therefore trouble-shooting has mainly relied on the knoledge of skiful engineers. Thus there is an important issue of how a grinding touble-shooting system can be designed and what knowledge is utilized among the large amount of grinding trouble information. In this paper basic strategy to develop the grinding database by taking rule-based model which is strongly depended upon experience and intuition is described.

• Laser Solutions
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• v.18 no.1
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• pp.12-17
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• 2015

This work performed numerical analysis of electromagnetic field and thermal phenomena occurring in femtosecond laser irradiation of silver nanowires. The local electric field enhancement was computed to calculate the optical energy dissipation as a Joule heating source and the thermal transport was analysed based on the two-temperature model (TTM). Electron temperature increased up to 1000K after 50fs and its spatial distribution became homogeneous after 80fs at the fluence of 100mJ/cm2. The result of this work is expected to contribute to revealing the photothermal effects on silver nanowires induced by femtosecond laser irradiation. Although the highest increase of lattice temperature was substantially below the melting point of silver, the experimental results showed resolidification and fragmentation of the silver nanowire into nanoparticles, which cannot be explained by the photothermal mechanism. Further studies are thus needed to clarify the physical mechanisms.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.8-17
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• 2019

In this study, a model reduction technique was used to develop a precise noise and vibration prediction model for the individual components of a driveline system. The dynamic reduced-order model generated by the Craig-Bampton method was applied to perform dynamic analysis of an electric agricultural power cart. The natural frequency and acceleration response results were analyzed according to the different number of dominant sub-structural modes contained in the reduced-order models. Through the analysis results, it was confirmed that a sufficient number of dominant sub-structures to satisfy the operating conditions should be selected to construct an optimal reduced-order model.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.91-97
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• 2019

A method for generating 3D solid models and drawings for a rotor in the steam turbine is proposed. One of the most important design steps is generating the drawing for manufacturing it. This step is a very routine and time-consuming job because each drawing is composed of several kinds of views and many dimensions. To achieve automation for this activity, rotor profiles are composed of 2D entity groups with attributes. Based on this, the improved design process is developed as follows. First, the rotor profiles can be selected by searching for 2D entity groups using the related attributes. Second, the profiles are connected sequentially so that an entire rotor profile is determined. The completed profile is used to generate 2D drawings automatically, especially views, dimensions, and 3D models. The proposed method is implemented using a commercial CAD/CAM system, Unigraphics, and API functions written in C-language and applied to the rotor of steam turbines. Some illustrative examples are provided to show the effectiveness of the proposed method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.6
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• pp.75-82
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• 2018

This study suggests an optimal design process of an LMU, which is installed on the top side of offshore structures. The LMU is consist of EB(elastomeric bearing) and steel plate, and supports the vertical loads of offshore structures and assists its stable installation. The structural design requirement of the LMU is related to its stiffness. This study utilizes the finite element analysis to predict the stiffness. The stiffness of the EB depends on the size of the bearing. Thus, the design variables in this study are defined as the thickness, the width and the number of plates. Since the LMU has different loads for different locations, its stiffness should be designed differently. The multiobjective function is introduced to attain the target stiffness. In this process, the metamodel using the kriging interpolation method is adopted to replace the true stiffness.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.5
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• pp.117-122
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• 2018

3D printing technology and its applications have grown rapidly in academia and industry. We consider a 3D printing system designed for the selective laser sintering (SLS) method, which is one of the powder bed fusion (PBF) techniques to build up the final product by layering sintered powder slices. Thermal distortion of printing products is a critical challenge in 3D printing. This study investigates temperature-dependent conformational behaviors of 3D printed samples of sintered poly-ether-ether-ketone (PEEK) powders using molecular dynamics simulations. The wear and chemical resistance properties of PEEK are understood, as it is a well-known biocompatible material used for implants. However, studies on physical phenomena at nanoscale in PEEK are rarely published in public. We simulate dissipative particle dynamics to elucidate how a cavity regime forms in PEEK at different system temperatures. We demonstrate how PEEK structures deform subject to the system temperature distribution.