• 제목/요약/키워드: (200) texture

검색결과 240건 처리시간 0.026초

인라인 스퍼터를 이용한 알루미늄 도핑된 산화아연 박막의 증착 및 특성 최적화 연구 (Deposition and Optimization of Al-doped ZnO Thin Films Fabricated by In-line Sputtering System)

  • 강동원
    • 전기학회논문지
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    • 제66권8호
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    • pp.1236-1241
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    • 2017
  • We deposited Al-doped ZnO (ZnO:Al) thin films on glass substrates ($200mm{\times}200mm$) by using in-line magnetron sputtering system. Effects of various deposition parameters such as working pressure, deposition power and substrate temperature on optoelectronic characteristics including surface-texture etching profiles were carefully investigated in this study. We found that relatively low working pressure and high deposition power offered to obtain enhanced conductivity and optical transmittance. Haze properties showed similar trend with the transmittance. Furthermore, surface-texture etching study exhibited good morphologies when the films were deposited at $200-300^{\circ}C$. On the basis of these optimizations, we could find the deposition region that produces highly transparent and conductive properties including efficient light scattering capability.

Suputtering 조건에 따른 Ti$_{x}$N Coating 층의 색상과 집합조직에 관한 연구 (A study on the Color and Texture of Ti$_{x}$N Coating with Sputtering Condition)

  • 김학동;조성식
    • 한국표면공학회지
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    • 제31권3호
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    • pp.133-141
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    • 1998
  • Stainless is widely used for various purposes due to its good corrosion resistance. There has been much research to produce the color stainless steel by several methods. In this experiment, TixN films have been deposited on the SUS304 substrate by the DC magnetron sputtering system and the color and texture of the films as a function of coating conditions has been studies. The TixN films showed a (111) preferred orintation in bias-free conditions. The texture of coated later was changed from (111) to (200) to (2200 with a change of the bias from -1000V to -3000V. When the bias is low, coated elements have low energy. Therefore, the texturct (111) of low surface energy. The mobility of atoms was increased with the increase of the blas and texture was changed to the other plane. Non-etched specimens all exhibited strong (111) texture. This result shows that (111) is a loose plane and of non-etched specimens all exhibited. High growing velocity of (111) of especially was main texture of Non-etched specimens. Low working pressure($4\times10^{-3}$torr) was more effective than figh working pressure ($6\times10^{-3}$torr) for the gold color of $Ti_xN$ film. L and b were increased and a was decreased with the increase of bias voltage. Accordingly, We obtained the near gold color of $Ti_xN$ film(L;92, a;1~1.5 b:24~29.50. As a result of reflectance. And as the bias increased, the reflectance was proportional to the increasing bias voltage, but we took the top reflectance when the bias voltage was -200V.

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전처리 방법과 비율을 달리하여 제조한 도라지 양갱의 품질 특성에 관한 연구 (A Study on Quality Characteristics of Doraji (Platydodon grandiflorum) Yanggeng using by Different Pre-treatment Methods and Amounts Adding Levels of Doraji)

  • 박미숙;박동연;손경희;고봉경
    • 동아시아식생활학회지
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    • 제19권1호
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    • pp.78-88
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    • 2009
  • The mechanical characteristics (texture and color) and consumer preference of Doraji Yanggengs using different pre-treatments and added levels of Doraji were presently evaluated. Three kinds of Doraji Yanggengs were made with differing amounts of Doraji powder (DPY; 30, 50, or 70 g), ground raw Doraji (GRDY; 100, 200, or 300 g), and Doraji juice (DJY; 100, 200, or 300 g). Texture characteristics (hardness, adhesiveness, springiness, chewiness, gumminess, cohesiveness) and color values (lightness, redness, yellowness) were measured three times in three experiments conducted with each formulation. Preference was measured with a nine-point hedonic scale for Yanggengs once every three experiments. Consumer preference was measured with color, flavor, taste, appearance, texture, and overall acceptability. Significant differences according to the amount of Doraji powder were evident with DPY for hardness (p<0.001), adhesiveness (p<0.05), and cohesiveness (p<0.001). Hardness (p<0.001), adhesiveness (p<0.001), chewiness (p<0.01), and gumminess (p<0.01) of 100 g GRDY displayed higher scores than 200 g and 300 g GRDY, but displayed significantly lower scores in cohesiveness (p<0.01). Hardness (p<0.001), adhesiveness (p<0.001), chewiness (p<0.001), gumminess (p<0.01), and cohesiveness (p<0.05) of DJY showed significant differences according to amount of Doraji juice. The highest score in a preference test among DPYs was evident for 30 g DPY. There were no significant differences in preference among GRDYs and DJYs. Color, flavor, taste, appearance, texture, and overall acceptability were significantly (p<0.01) correlated in all Yanggengs. DJY was preferred more than DPY and GRDY. Women in their forties and fifties preferred Yanggeng more when compared to women in their twenties and thirties.

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비대칭 압연한 IF 강 판의 Goss 집합조직 발달 (Goss Texture Development of Asymmetrically Rolled IF Steel Sheet)

  • 김인수;남수권;김광희;이동녕
    • 소성∙가공
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    • 제26권3호
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    • pp.150-155
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    • 2017
  • To obtain the Goss texture, {110}<001>, IF steel sheets were asymmetrically rolled by 50-89% reduction in the thickness at room temperature and subsequently annealed at 200, 900, and $1200^{\circ}C$ in a box furnace under air atmosphere. The asymmetrically rolled specimens and annealed specimens show well-developed Goss texture, {110}<001>. After the IF steel sheets were asymmetrically rolled at room temperature and subsequently annealed at $900^{\circ}C$ for 1 h in a box furnace under air atmosphere, the intensity of the Goss texture, {110}<001> was high in the IF steel sheets.

반도체 공정에서의 신뢰성 연구 - 구리 배선의 신뢰성 (Intrinsic Reliability Study of ULSI Processes - Reliability of Copper Interconnects)

  • 류창섭
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2002년도 추계기술심포지움논문집
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    • pp.7-12
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    • 2002
  • 반도체 공정에서 구리(Cu) 배선의 미세구조와 신뢰성에 대해 연구하였는데, 특히 CVD Cu와 전기도금 Cu를 사용하여 신뢰성에 대한 texture와 결정 구조의 영향을 연구하였다 CVD Cu의 경우 여러 가지 시드층(seed layer)을 사용함으로서, 결정입자의 크기는 비슷하지만 texture가 전혀 다른 Cu 박막을 얻을 수 있었는데, 신뢰성 검사결과 (111) texture를 가진 Cu 배선의 수명이 (200) texture를 가진 Cu 배선의 수명보다 약 4배 가량 길게 나왔다. 전기도금 Cu 박막의 경우 항상 (111) texture를 갖고 있었으며 결정립의 크기도 CVD Cu의 것보다 더 컸다. Damascene 공법으로 회로 형성한 Cu 배선의 경우에도 전기도금 Cu의 결정립 크기가 CVD Cu의 것보다 더 크게 나타났으며, 신뢰성 검사결과 배선의 수명도 더 길게 나타났는데 그 차이는 0.4 $\mu\textrm{m}$ 이하의 미세선폭 영역에서 더욱 현저했다. 따라서 전기도금 Cu가 CVD Cu보다 신뢰성 측면에서 더 우수한 것으로 판명되었다.

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TixN Coating층의 색상에 미치는 첨가원소의 영향 (Effect of additional gases on the Color of TixN Coated Film)

  • 김학동;조성석
    • 한국진공학회지
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    • 제7권2호
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    • pp.127-134
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    • 1998
  • 스테인레스강은 내식성이 우수해서 많은 용도로 사용되고 있다. 스테인레스강의 내 식특성과 함께 장식용으로 적당한 색상을 부역하기 위한 여러 방법으로 시도되고 있다. 본 연구에서는 DC amgnetron sputtering장치를 사용하여 스테인레스강의 표면에 TiN(C,O,H) 코팅층을 코팅한 후, 집합조직과 색상에 미치는 산소, 수소, 아세칠렌가스의 영향에 관한 연 구를 수행하였다. 수소와 아세칠렌이 첨가됨에 따라 (220)집합조직은 (200)거쳐서 (111)으로 변화하였고, 아세칠렌이 더욱 증가되면 (111)집합조직을 나타내었다. 산소의 첨가는 (111)을 거쳐 (200)으로 변화시켰다. TiN의 색상은 산소의 첨가에 따라 황금색으로부터 회색을 거쳐 녹색으로 변화하였다. 아세칠렌의 첨가는 분홍색을 거쳐서 회색으로 변화하였다. 반사율은 수소의 첨가에 따라 단파장의 영역에서 증가하였고, 산소와 아세칠렌의 첨가에 따라 감소하 였다.

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CeO2 완충층의 결정성장 특성 및 금속 유기물 증착법으로 제조된 초전도 YBCO층에 미치는 영향 (Texture Development of CeO2 Buffer Layer and its Effect on Superconducting MOD-YBCO Films)

  • 정국채;김영국
    • 대한금속재료학회지
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    • 제47권10호
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    • pp.681-685
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    • 2009
  • $CeO_2$ buffer layers have been deposited on YSZ single crystal substrates via a radio-frequency sputtering method. We focused on the texture development of $CeO_2$ with out-of-plane alignment and its effects on a superconducting YBCO layer, which was deposited by metal organic deposition. $CeO_2$ layers were grown epitaxially on single crystal YSZ substrates and subsequent YBCO layers were also grown epitaxially from $CeO_2$ layers. It was observed that the intensity of $CeO_2$(200) decreased with deposition temperature. ${\theta}-2{\theta}$ scan FWHM values of $CeO_2$(200) were inversely proportional to the peak intensities of $CeO_2$(200). The sample with the lowest $CeO_2$(200) intensity and poor out-of-plane alignment showed a strong reaction with the MOD-YBCO layer resulting in a thicker $BaCeO_3$ layer. The texture and superconducting property of the YBCO layer were affected indirectly by the formation of a $BaCeO_3$ layer at the interface between the $CeO_2$ and YBCO layers.

B, Nb 및 Ti를 함유한 극저탄소강판에서 연속열처리조건이 재질에 미치는 영향 (Effects of Continuous Annealing Conditions on the Properties of Extra Low Cabon Steel Sheets Containing B, Nb and Ti)

  • 이종무;윤국한;이도형
    • 한국재료학회지
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    • 제4권1호
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    • pp.44-54
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    • 1994
  • Ti, Nb B를 합금원소로 첨가한 알루미늄 킬드 극저탄소 고강도 강판의 재결정 집합조직에 미치는 코일링처리시의 냉각속도, 냉간가공도, 연속어닐링처리등의 효과를 조사하였다. 집합조직계수비 TC(222)/TC(200)는 코일링시의 냉각속도 감소와 냉간압연시의 입하율 증가에 따라 증가하는 경향을 나타내었다. 그러나 압하율이 80%에서 90%로 증가됨에 따라 집합조직계수비가 오히려 감소하는 경향을 나타내는데, 이것은 주집합조직이 {554}<225>로부터 {111}<112>로부터 {111}<112>로 바뀌기 때문인것으로 보여진다. 집합조직계수비를 최대로 만들기위한 최적의 강판제조 공정 조건을 제시하면, 코일링처리시 노냉하고, 냉간압연시의 압하율은 80%로 하며, 연속열처리시 $800^{\circ}C$에서 1분간 유지한다음 $20^{\circ}C$로 수냉하고 다시 $450^{\circ}C$에 5분간 과시효처리하는 것이다.

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니켈 분말 성형체의 냉간압연과 열처리로 제조된 YBCO coated conductor용 양축 정렬된 니켈 테이프 (Fabrication of bi-axially textured Ni tapes for YBCO coated conductors by a cold rolling process and heat treatment of Ni powder compacts)

  • 이동욱;지봉기;임준형;정충환;주진호;박순동;전병혁;홍계원;김찬중
    • 한국초전도ㆍ저온공학회논문지
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    • 제4권2호
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    • pp.16-20
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    • 2002
  • Bi-axially textured Ni tapes for YBCO coated conductors were Prepared by cold rolling and heat treatment of Ni Powder compacts. The Ni powder used in this study was 5 urn in particle size and 99.99 % in purity. The process of this study consists of filling of hi powder into a rubber mold, cold-isostatically Pressing and sintering of the powder compacts at 110$0^{\circ}C$ for 6h in 96 % Ar - 4 % H$_2$ atmosphere. The sintered compacts were cold rolled with a 5 % step reduction ratio into a 100 micron-thick tapes and then heat-treated at 100$0^{\circ}C$ for various time periods. The (200) texture of Ni tape was successfully developed through the recrystallization heat treatment of the cold rolled Ni tapes. At 100$0^{\circ}C$, the degree of texture of the heat-treated Ni tapes seems not to be significantly affected by the heat-treatment time. The short heat treatment of S min was sufficient to develop the complete (200) cube texture. The degree of in-Plane and out-of-plane texture of the prepared Ni tapes was 8-10$^{\circ}$. The heat treated Ni tapes consisted of equiaxed grains with a size 50-70 microns. and the AFM sol-face roughness was as smooth as 3 nm.

AZ31 Mg 합금의 쌍정 형성에 미치는 Initial Texture의 영향 (Effect of Initial Texture on the Twinning Formation of AZ31 Mg Alloy)

  • 이병호;김용우;이종수
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.114-117
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    • 2007
  • In the present study, the effects of initial texture on the twinning formation of AZ31 Mg rolled sheet was investigated. Uniaxial compression tests were performed on samples cut along the normal direction and rolling direction of rolled AZ31 Mg alloy sheet at various temperatures (RT, 200, 250, 300, 350, $400^{\circ}C$) with the 0.01/s strain rate. Pole figure of rolling planes showed that basal planes of most gain were located parallel to the rolling direction. After compression test, microstructures and stress-strain curves results indicated that active deformation twining occurred only at the specimen cut along the rolling direction. The slip-twin transition with the increase of temperature was also investigated.

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