• 제목/요약/키워드: 'B' Film

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TiN/W 플러그 구조 위에 제작된 Ir/$IrO_2$/PZT/Pt/$IrO_2$/Ir 강유전체 커패시터의 전기적 특성 (Electrical Properties of Integrated Ir/$IrO_2$/PZT/Pt/$IrO_2$/Ir Ferroelectric Capacitor on TiN/W Plug Structure)

  • 최지혜;권순용;황성연;김윤정;손영진;조성실;이애경;박상현;이백희;박남균;박해찬;장헌용;홍석경;홍성주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.321-322
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    • 2006
  • The electrical properties of PZT thin film capacitor on TiN/W plug structure were investigated for high density ferroelectric memory devices. In order to enhance the ferroelectric properties of PZT capacitor, the process conditions of bottom electrodes were optimized. The fabricated PZT capacitor on TiN/W plug showed good remanent polarization, leakage current, and contact resistance of TiN/W plug, which were $33\;{\mu}C/cm^2$, $1.2{\times}10^{-6}\;A/cm^2$, and 5.3 ohm/contact, respectively.

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Depositon of Transparent Conductive Films by a DC arc Plasmatron

  • Penkov, O.V.;Plaksin, V. Yu.;Joa, S.B.;Kim, J.H.;LEE, H.J.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.480-480
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    • 2010
  • In the present work, we studied effect of the deposition parameters on the structure and properties of ZnO films deposited by DC arc plasmatron. The varied parameters were gas flow rates, precursor composition, substrate temperature and post-deposition annealing temperature. Vapor of Zinc acetylacetone was used as source materials, oxygen was used as working gas and argon was used as the cathode protective gas and a transport gas for the vapor. The plasmatron power was varied in the range of 700-1,500 watts. Flow rate of the gases and substrate temperature rate were varied in the wide range to optimize the properties of the deposited coatings. After deposition films were annealed in the hydrogen atmosphere in the wide range of temperatures. Structure of coatings was investigated using XRD and SEM. Chemical composition was analyzed using x-ray photo-electron spectroscopy. Sheet conductivity was measured by 4-point probe method. Optical properties of the transparent ZnO-based coatings were studied by the spectroscopy. It was shown that deposition by a DC Arc plasmatron can be used for low-cost production of zinc oxide films with good optical and electrical properties. Sheet resistance of 4 Ohms cm was achieved after the deposition and 30 min annealing in the hydrogen at $350^{\circ}C$. Elevation of the substrate temperature during the deposition process up to $350^{\circ}C$ leads to decreasing of the film's resistance due to rearrangement of the crystalline structure.

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박막에서 쌍곡선형 열전도 방정식에 의한 열전도 해석 (Analysis of Hyperbolic Heat Conduction in a Thin Film)

  • 정우남;이용호;조창주
    • 에너지공학
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    • 제8권4호
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    • pp.540-545
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    • 1999
  • 고전적인 Fourier 열전도 방정식은 극저온하에서 또는 아주 짧은 시간동안의 가열시 타당성이 없는 것으로 고려되었다. 이러한 조건하에서는 열전도파의 성질이 지배적이기 때문에 , 수정된 Fourier 법칙에 근거한 쌍곡선형 열전도 방정식이 도입되었다. 열전도에 대한 Fourier 모델과 쌍곡선형 열전도모델이 적분변환법과 함께 Green 함수방법을 이용하여 분되었다. 한쪽 표면에서 주기적인 표면가열을 하는 유한한 평판의 열유속 분포 및 온도분포의 해를 제시하였고 각가의 모델로부터 얻어진 결과를 서로 비교검토하였다. 쌍곡선형 열전도 방정식에서 유도된 열전도파는 매개물을 통해 전파되어 맞은편쪽의 단열표면에서 가열 표면쪽으로 반사하였으나 , 고전적인 Fourier 모델에 의한 열은 열적교란이 매개물의 전체에 걸쳐서 전달된 후 즉각적으로 무한한 속도로 열전파가 발생함을 보여주었다.

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증착 후 열처리 온도에 따른 In2O3 박막의 구조적, 전기적, 광학적 특성 변화 (Effect of Annealing Temperature after Deposition on the Structural, Electrical and Optical Properties of In2O3 Films)

  • 이영진;이학민;허성보;김유성;채주현;공영민;김대일
    • 열처리공학회지
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    • 제24권6호
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    • pp.307-310
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    • 2011
  • We have investigated the structural, electrical and optical properties of $In_2O_3$ thin films deposited by RF magnetron sputtering and then annealed at $150^{\circ}C$ and $300^{\circ}C$ in vacuum. The structural and electrical properties are strongly related to annealing temperature. All the annealed $In_2O_3$ films are grown as a hexagonal wurtzite phase and the largest grain size is observed in the films annealed at $300^{\circ}C$. The sheet resistance decreases with a increase in annealing temperature and $In_2O_3$ film annealed at $300^{\circ}C$ shows the lowest sheet resistance of $174{\Omega}/{\Box}$. The optical transmittance of $In_2O_3$ films in a visible wavelength region also depends on the annealing temperature. The films annealed at $300^{\circ}C$ show higher transmittance of 76% than those of the films prepared in this study.

N-Alkyl Pyridinium Bromide류의 계면활성에 대한 열역학적 특성 (Thermodynamic Characteris tics of Surface Activities of N-Alkyl Pyridinium Bromide)

  • 김영찬;김동식;정순옥;손병청
    • 한국응용과학기술학회지
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    • 제8권2호
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    • pp.105-114
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    • 1991
  • In relation to the preparation of Langmuir-Blodgett thin film, four kinds of N-alkylpyridiniurn bromide were synthesized. The values of surface tensions of these materials, measured with a Traube stalagmometer, gave the relationship between the critical micells hydrophobic radical and between CMC and temperature. Values of thermodynamic properties(${\Delta}H^0_m,\;{\Delta}S^0_m,\;{\Delta}G^0_m,$) for the formatoin of micelle were also obtained. Experiments gave the following results; at the temperature range between 40 and 60$^{\circ}C, CMC of Hexadecyl-, Octadecyl-, Eicosyl-, and Docosyl-Pyridinium Bromide were $7.64{\times}10^{-4}{\sim}9.13{\times}10^{-4},\;3.85{\times}10^{-4}{\sim}4.60{\times}10^{-4},\;2.00{\times}10^{-4}{\sim}2.39{\times}10^{-4},\;and\;1.07{\times}10^{-4}{\sim}1.28{\times}10^{-4}$ mol/l, respectively. Surface tension, ${\Gamma}_{CMC}$, of those were 33.49${\sim}$36.00, 34.78${\sim}$37.61, 35.49${\sim}$37.61 and 38.76${\sim}$55.80 dyne/cm, respectively, The relationship between CMC and the mumber of carbon atoms in the hydrophobic radical, N was expressed as follows : Log(CMC)=A-BN where A and B are constants. At the temperature range between 40 and 60$^{\circ}C$, the change of Gibbs evergy (${\Delta}G_m$) for one methylene group ($-CH_2-$) were -0.65RT, respectively, The minus values of enthalpy change (${\Delta}H_m$) suggest that the formation of micelle is exothermic. Additionally, the overall increase in the entropy change (${\Delta}S_m$) with respect to the temperature increase suggests that the formation of micelle is attained by a exothermic enthalpy directed process.

Silicon Nitride Layer Deposited at Low Temperature for Multicrystalline Solar Cell Application

  • Karunagaran, B.;Yoo, J.S.;Kim, D.Y.;Kim, Kyung-Hae;Dhungel, S.K.;Mangalaraj, D.;Yi, Jun-Sin
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.276-279
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    • 2004
  • Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coating. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300t, keeping the total thermal budget of the cell processing to a minimum. In this work SiN deposition was performed using a horizontal PECVD reactor system consisting of a long horizontal quartz tube that was radiantly heated. Special and long rectangular graphite plates served as both the electrodes to establish the plasma and holders of the wafers. The electrode configuration was designed to provide a uniform plasma environment for each wafer and to ensure the film uniformity. These horizontally oriented graphite electrodes were stacked parallel to one another, side by side, with alternating plates serving as power and ground electrodes for the RF power supply. The plasma was formed in the space between each pair of plates. Also this paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTP firing. Using this sequence we were able to obtain solar cells with an efficiency of 14% for polished multi crystalline Si wafers of size 125 m square.

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Rigorous Modeling of the First Generation of the Reconnaissance Satellite Imagery

  • Shin, Sung-Woong;Schenk, Tony
    • 대한원격탐사학회지
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    • 제24권3호
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    • pp.223-233
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    • 2008
  • In the mid 90's, the U.S. government released images acquired by the first generation of photo reconnaissance satellite missions between 1960 and 1972. The Declassified Intelligent Satellite Photographs (DISP) from the Corona mission are of high quality with an astounding ground resolution of about 2 m. The KH-4A panoramic camera system employed a scan angle of $70^{\circ}$ that produces film strips with a dimension of $55\;mm\;{\times}\;757\;mm$. Since GPS/INS did not exist at the time of data acquisition, the exterior orientation must be established in the traditional way by using control information and the interior orientation of the camera. Detailed information about the camera is not available, however. For reconstructing points in object space from DISP imagery to an accuracy that is comparable to high resolution (a few meters), a precise camera model is essential. This paper is concerned with the derivation of a rigorous mathematical model for the KH-4A/B panoramic camera. The proposed model is compared with generic sensor models, such as affine transformation and rational functions. The paper concludes with experimental results concerning the precision of reconstructed points in object space. The rigorous mathematical panoramic camera model for the KH-4A camera system is based on extended collinearity equations assuming that the satellite trajectory during one scan is smooth and the attitude remains unchanged. As a result, the collinearity equations express the perspective center as a function of the scan time. With the known satellite velocity this will translate into a shift along-track. Therefore, the exterior orientation contains seven parameters to be estimated. The reconstruction of object points can now be performed with the exterior orientation parameters, either by intersecting bundle rays with a known surface or by using the stereoscopic KH-4A arrangement with fore and aft cameras mounted an angle of $30^{\circ}$.

사진용 필름, 인화지의 감도측정에 따른 보존특성 (Preservative characteristics of photographic films and papers on the speed method)

  • 안홍찬;한상완;최훈정;허훈
    • 한국기록관리학회지
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    • 제3권2호
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    • pp.143-155
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    • 2003
  • 역사적 사실이나 경험의 중요한 증거자료로서 보존적 가치를 지니는 사진은 보통의 다른 문서들과 달리 빛, 온도, 습도 등의 여러 가지 환경 요인에 따라 매우 쉽게 변형될 수 있기 때문에 보존에 따르는 과학적이고 세밀한 주의가 요구된다. 본 연구에서는 일반적으로 널리 시판되어 사용되고 있는 사진용 필름과 인화지들을 선택하여 노광을 주어 감도를 측정하고, 노화가속장치(Weather-o-meter)에 넣어 인위적으로 변형을 허용한 뒤 다시 감도를 측정하여 비교함으로써 감재의 보존특성을 비교분석 하였다. 실험결과 흑백감재의 보존특성이 컬러의 경우보다 우수했으며, Film보다 인화지의 경우가 노화에 따른 변형이 없는 것으로 나타났다. 그러나 제조회사에 따른 각 제품별 보존특성 차이는 크게 관찰되지 않았다.

Development of Spontaneous Polarization of Epitaxial Iron-Excess Gallium Ferrite Thin Films

  • Oh, S.H.;Shin, R.H.;Lee, J.H.;Jo, W.;Lefevre, C.;Roulland, F.;Thomasson, A.;Meny, C.;Viart, N.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2012년도 임시총회 및 하계학술연구발표회
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    • pp.121-122
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    • 2012
  • Iron-excess gallium ferrite, $Ga_{0.6}Fe_{1.4}O_3$ (GFO), is known to have room-temperature ferromagnetic phases and potentially exhibit ferroelectricity as well [1]. But, leaky polarization-electric field (PE) hysteresis curves of the GFO thin film are hurdle to prove its spontaneous polarization, in other words, ferroelecticity. One of the reasons that the GFO films have leaky PE hysteresis loop is carrier hopping between $Fe^{2+}$ and $Fe^{3+}$ sites due to oxygen deficiency. We focus on reducing conducting current by substituting divalent cations at $Fe^{2+}$ sites. GFO thin films were grown epitaxially along b-axis normal to $SrRuO_3/SrTiO_3$ (111) substrates by pulsed laser deposition. Current density of the ion-substituted GFO thin films was reduced by $10^3$ or more. Ferroelectric properties of the ion-substituted GFO thin films were measured using macroscopic and microscopic schemes. In particular, local ferroelectric properties of the GFO thin films were exhibited and their remnant polarization and piezoelectric d33 coefficient were obtained.

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레토르트파우치 조미 홍합의 제조 및 저장 중 품질 변화 (Preparation of Retort Pouched Seasoned Sea Mussel and Its Quality Stability during Storage)

  • 노윤이;윤호동;공청식;남동배;박태호;김정균
    • 수산해양교육연구
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    • 제23권4호
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    • pp.709-722
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    • 2011
  • This study was investigated to obtain basic data which can be applied to processing of retort pouched seasoned sea mussel. Shell was washed and steamed before shucking. Sea mussel meat was seasoned in boiled and mixed seasoning sauce(soy sauce 23%, monosodiun glutamate 2%, sorbitol 2%, sesame oil 1%, vinegar 2%, starch syrup 15%, water 55%) for 30 min. The seasoned sea mussel was vacuum packed in plastic film bag and sterilized for various Fo values(Fo 7~13 min.) in a hot water circulation system retort at $121^{\circ}C$. The chemical composition such as pH, VBN, amino-N, total amino acid, free amino acid, color value (L, a, b), texture profile, TBA value, mineral, sensory evaluation and viable cells count of the retort pouched seasoned sea mussels sterilized with various conditions(Fo 7~13 min.) were measured. The same experimental items were also measured during storage. There was no remarkable difference between sterilization conditions and sensual characteristics. The results showed that the product sterilized at Fo 7 min. was the most desirable because this condition is most economical.