• 제목/요약/키워드: $ZrSi_2$

검색결과 687건 처리시간 0.028초

가스 센서 응용을 위한 압전 마이크로 칸티레버의 제작 및 특성 (Fabrication and Properties of Piezoelectric Microcantilever for Gas Sensor Application)

  • 신상훈;송상근;백준규;박효덕;이재찬
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.75-75
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    • 2003
  • 본 연구에서는 대기 중 극 미량으로 존재하는 환경 유해 가스 성분을 검출할 수 있는 미세 소자로의 응용을 위해 마이크로 칸티레버를 제작하고 가스 센서로의 활용 가능성을 검토하였다. 마이크로 칸티레버는 크게 구동층 캐패시터로서 대표적인 압전 재료인 Pb(Zr,Ti)O$_3$ (PZT)를 사용하고 SiNx 박막을 지지층으로 하는 형태로 제작되었다. 제작된 마이크로 칸티레버는 치수 및 형상에 따라 17~29 KHz 의 기본 공진 주파수 값을 나타내었다. Electron beam evaporator를 이용한 copper (Cu) 박막의 단계적인 증착을 통해 칸티 레버 표면에 질량을 증가시키고 그에 따른 마이크로 칸티레버의 공진주파수 변화를 관찰한 결과 질량 증가에 대해 34 Hz/ng의 선형적인 주파수 감소를 나타내었으며, 이로부터 694.4 $\textrm{cm}^2$/g 의 gravimetric sensitivity factor를 얼을 수 있었다. 마이크로칸티레버의 가스 감지능력 시험을 위해 가스 흡착층으로 일차 알콜류의 vapor를 흡착 하는 것으로 보고된 poly methyl metacrytate (PMMA)를 마이크로 칸티레버 표면에 코팅하였다. 마이크로칸티 레버의 기본 공진 주파수 및 PMMA 흡착층 형성과 가스의 흡착에 따른 주파수 변화는 마이크로 칸티 레버로부터 의 전기적 신호를 이용하는 복소 임피던스 분석에 의해 측정되었다. PMMA가 코팅된 마이크로 칸티레버는 ethanol 및 methanol vapor 의 농도가 증가함에 따라 선형적인 공진주파수 감소를 나타내었으며, methanol vapor 의 경우 0.06 Hz/ppm 의 가스 검출 감도를 얻을 수 있었다.

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연질 Cu 분말-가스분무 Ni계 벌크 비정질 복합분말의 방전플라즈마 소결에 관한 연구 (Spark Plasma Sintering of the Ductile Cu-Gas-atomized Ni Bulk Metallic Glass Composite Powders)

  • 김진천;김용진;김병기;김지순
    • 한국분말재료학회지
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    • 제13권5호
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    • pp.351-359
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    • 2006
  • Ni based($Ni_{57}Zr_{20}Ti_{18}Si_2Sn_3$) bulk metallic glass(BMG) powders were produced by a gas atomization process, and ductile Cu powders were mixed using a spray drying process. The Ni-based amorphous powder and Cu mixed Ni composite powders were compacted by a spark plasma sintering (SPS) processes into cylindrical shape. The relative density varied with the used SPS mold materials such as graphite, hardened steel and WC-Co hard metal. The relative density increased from 87% to 98% when the sintering temperature increased up to $460^{\circ}C$ in the WC-Co hard metal mold.

La와 Nd가 치환된 PZT 세라믹의 구조 및 전기적 성질 (Structure and Electric Properties of PZT Ceramics Substituted by La and Nd)

  • 정수철;박휴범;김정;김건;김시중
    • 한국세라믹학회지
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    • 제31권2호
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    • pp.155-160
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    • 1994
  • PZT ceramics substituted by La3+ and Nd3+ were fabricated according to the formula: [Pb1-x(La or Nd)x][Zr0.58Ti0.42]1-x/4$\square$x/4O3(x=0.00, 0.02, 0.05, 0.08, 0.15, 0.20). The crystal structure and microstructure were investigated by XRD and SEM. It was observed that the phase transitions among rhombohedral, tetragonal, and cubic symmetry occured as the substitutional quantity increased. Dielectric constant, dissipation factor and piezoelectric coefficient (d33), of each sample were measured. The dielectric properties were changed as the substitutional quanity of rare earth ion increased. These changes could be explained by crystal structure and compositional fluctuaction. Its d33 was higher at tetragonal region near to phase boundry between rhombohedral and tetragonal, which was explained by reorientation of domain wall.

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Effects of Atmospheric Powder and Grain Size on Electrical Properties of Lanthanum-modified $PbTiO_3$ Ceramics

  • Byung Sung kang;You, Dong-Joo;Park, Si-Kyung
    • The Korean Journal of Ceramics
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    • 제6권4호
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    • pp.396-400
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    • 2000
  • Dielectric and piezoelectric properties of Pb$_0.9$La$_0.1$TiO$_3$ ceramics were investigated as a function of grain size. Sintering atmosphere was controlled with changing the kind of atmospheric powder and its amount. It was confirmed that dielectric and piezoelectric of Pb$_0.9$La$_0.1$TiO$_3$ were strongly influenced by the sintering atmosphere. Relative dielectric constant of Pb$_0.9$La$_0.1$TiO$_3$ which was sintered in PbO-deficient atmosphere made by Pb$_0.9$La$_0.1$TiO$_3$ powder, increased with the grain size. However, the dielectric constant of the samples sintered in the PbO-sufficient atmosphere made by PbZrO$_3$ powder was slightly decreased with the grain size. Piezoelectric d$_33$ constant of Pb$_0.9$La$_0.1$TiO$_3$ also showed a different trend, depending on the sintering atmosphere. It was almost constant in the range of grain size of 1.3~2.3 $\mu$m when the samples were sintered in the PbO-sufficient atmosphere, while it intensively decreased with the grain size in the case of the PbO-deficient condition.

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Morphology Change of Nanotube and Micropore on the Ti-25Nb-xHf Alloys with Hf Contents after Anodization

  • Kim, Sung-Hwan;Ko, Yeong-Mo;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.333-333
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    • 2012
  • In this study, we investigated morphology of nanotube and micropore on the Ti-25Nb-xHf alloys with Hf contents after anodization. Ti-25Nb-xHf ternary alloys contained from (0~15) wt.% Hf contents were manufactured by vacuum arc-melting furnace. The obtained ingots were homogenized in an argon atmosphere at $1000^{\circ}C$ for 12h and then water quenching. The specimens were cut from ingots to 3mm thickness and first ground and polished using SiC paper (grades from 100 to 2000). 2steps anodization treatments on Ti-25Nb-xHf alloys were carried out at room temperature for experiments. Micro-pore formation was performed in Ca+P mixed solution at 265V for 3min. After that, nanotube formation was in 1M $H_3PO_4$ electrolytes containing 0.8wt.% NaF solutionat 10V for 120min. Morphologies of micropore and nanotube depended on the Hf content in Ti-25Nb-xZr ternary system.

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Effect of Dimension Control of Piezoelectric Layer on the Performance of Magnetoelectric Laminate Composite

  • Cho, Kyung-Hoon
    • 한국재료학회지
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    • 제28권11호
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    • pp.611-614
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    • 2018
  • Laminate composites composed of $0.95Pb(Zr_{0.52}Ti_{0.48})O_3-0.05Pb(Mn_{1/3}Sb_{2/3})O_3$ piezoelectric ceramic and Fe-Si-B based magnetostrictive amorphous alloy are fabricated, and the effect of control of the areal dimensions and the thickness of the piezoelectric layer on the magnetoelectric(ME) properties of the laminate composites is studied. As the aspect ratio of the piezoelectric layer and the magnetostrictive layer increases, the maximum value of the ME voltage coefficient(${\alpha}_{ME}$) increases and the intensity of the DC magnetic field at which the maximum ${\alpha}_{ME}$ value appears decreases. Moreover, as the thickness of the piezoelectric layer decreases, ${\alpha}_{ME}$ tends to increase. The ME composites exhibit ${\alpha}_{ME}$ values higher than $1Vcm^{-1}Oe^{-1}$ even at the non-resonance frequency of 1 kHz. This study shows that, apart from the inherent characteristics of the piezoelectric composition, small thicknesses and high aspect ratios of the piezoelectric layer are important dimensional determinants for achieving high ME performance of the piezoelectric-magnetostrictive laminate composite.

Impacts of the calcination temperature on the structural and radiation shielding properties of the NASICON compound synthesized from zircon minerals

  • Islam G. Alhindawy;Hany Gamal;Aljawhara.H. Almuqrin;M.I. Sayyed;K.A. Mahmoud
    • Nuclear Engineering and Technology
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    • 제55권5호
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    • pp.1885-1891
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    • 2023
  • The present work aims to fabricate Na1+xZr2SixP3-xO12 compound at various calcination temperatures based on the zircon mineral. The fabricated compound was calcinated at 250, 500, and 1000℃. The effect of calcination temperature on the structure, crystal phase, and radiation shielding properties was studied for the fabricated compound. The X-ray diffraction diffractometer demonstrates that, the monoclinic crystal phase appeared at a calcination temperature of 250℃ and 500℃ is totally transformed to a high-symmetry hexagonal crystal phase under a calcination temperature of 1000℃. The radiation shielding capacity was also qualified for the fabricated compounds using the Monte Carlo N-Particle transport code in the g-photons energy interval between 15keV and 122keV. The impacts of calcination temperature on the g-ray shielding behavior were clarified in the present study, where the linear attenuation coefficient was enhanced by 218% at energy of 122keV, when the calcination temperature increased from 250 to 1000℃, respectively.

충주 어래산 일대에서 산출하는 희토류 광물의 광물학적 및 광물화학적 특성 (Mineralogy and Mineral-chemistry of REE Minerals Occurring at Mountain Eorae, Chungju)

  • 유병운;이길재;고상모
    • 자원환경지질
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    • 제45권6호
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    • pp.643-659
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    • 2012
  • 충주 지역은 소위 옥천층군에 해당되는 계명산층이 분포하며, 계명산층내에는 변성화산암 모암과 페그마타이트 모암의 희토류 광체가 배태한다. 변성화산암 모암의 희토류 광체를 구성하는 희토류광물은 갈렴석, 저어콘, 인회석, 스핀이 산출하나 갈렴석이 가장 우세하게 산출한다. 페그마타이트 모암의 희토류 광체를 구성하는 희토류 광물은 퍼구소나이트, 카르나수르타이트, 저어콘, 토륨석이 산출하나 퍼구소나이트가 가장 우세하다. 변성화산암에서 산출하는 갈렴석의 화학식은 (Ca, Y, REE, Th)$_{2.095}$(Mg, Al, Ti, Mn, $Fe^{3+})_{2.770}(SiO_4)_{2.975}(OH)$로서 TREO 23.89-29.12 wt%, $La_2O_3$ 4.71-9.92 wt%, $Ce_2O_3$ 11.30-14.33 wt%, $Y_2O_3$ 0.11-0.29 wt%, $ThO_2$ 0.12-0.94 wt% 이다. A(2) 사이트 에서 $Ca^{2+}$$REE^{3+}$, M(2) 사이트에서 $Al^{3+}$$Fe^{2+}$의 치환이 일어나는데 이는 갈렴석의 화학조성에 밀접한 관련을 갖는 특징이고, Fe의 함량이 일반 갈렴석보다 높은 Ce 계열의 Ferriallanite에 해당된다. 이는 모암인 계명산층을 주로 구성하는 변성화산암(변성조면암)의 원암이 Fe이 풍부한 함철층이기 때문인 것으로 판단된다. 페그마타이트 모암에서 가장 우세하게 산출하는 퍼구소나이트의 화학조성은 A 사이트에서 Y-REE, Y-Th 치환이 우세하게 일어났으며, B 사이트에서는 Nb-Ta-Ti의 치환이 주로 초래되었으며, 계산된 화학식은 $YNbO_4$ 이다. 또한 $Y_2O_3$$Nb_2O_5$만의 비율로 상관도를 확인 한 결과 연구지역에서 산출되는 퍼구소나이트는 Y과 Nb의 이상적인 비율인 1:1 비율과 달리 1:1.5의 비율을 나타내고 있으며, Nb의 함량이 Y 함량보다 높으며, Y 사이트 즉, A 사이트에서 희토류 원소의 치환이 활발하게 초래되었다. 페그마타이트에서 산출하는 카르나수르타이트는 REE 및 Th를 치환하는 조성은 각각 $Ce_2O_3$ 9.16-22.88 wt%, $La_2O_3$ 2.15-9.16 wt%, $ThO_2$ 0.44-10.8 wt%, 화학조성으로 계산된 구조식은 (Y, REE, Th, K, Na, Ca)$_{1.478}$(Ti, Nb)$_{1.304}$(Mg, Al, Mn, $Fe^{+3})_{0.988}$(Si, P)$_{1.431}O_7(OH)_4{\cdot}3H_2O$이다. 870-860 Ma 인 초기 원생대에 로디니아 대륙의 분열기로서 한반도에서 A-1형 화산활동이 초래되어 철, 희토류원소 및 고장력원소(Nb, Zr, Y 등)가 풍부한 변성화산암으로 주로 구성되는 계명산층을 형성 시켰다면 갈렴석은 모암이 형성될 당시 알카리 화산암에서 정출되었거나 변성작용이 초래된 고생대 말(300-280 Ma, Cho et al., 2002) 광역변성작용에 의해 형성 되었을 가능성이 높다. 희토류를 함유하는 페그마타이트에서 산출하는 저어콘 연대가 190 Ma 인 것은 쥬라기에 충주지역에서 광범위하게 초래된 화강암 정치활동과 관련된 가능성이 크다. 따라서 충주지역 계명산층 내 배태된 희토류 광체는 인접한 지역에 배태되어 있지만 매우 차별적 희토류 광화작용이 초래 되어 희토류광물조성과 광체의 산상이 차별적으로 나타나는 것으로 해석된다.

CO2 메탄화 반응을 위한 Ni 기반 Disk Type 촉매의 제조 최적화에 관한 연구 (Manufacturing Optimization of Ni Based Disk Type Catalyst for CO2 Methanation)

  • 이재정;문대헌;장순웅
    • 한국환경과학회지
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    • 제28권1호
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    • pp.65-73
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    • 2019
  • The catalytic activity of Ni-0.2%YSZ (Yttria-Stabilized Zirconia) with different promoters was evaluated for $CO_2$ methanation. The catalysts were weighed for mixing and they were dried at $110^{\circ}C$ for molding into disks. The concentration of $CO_2$ and $CH_4$ for conducting of $CO_2$ methanation were analyzed by gas chromatography and the physical characteristics of the disk-type catalyst formed were analyzed by X-ray diffraction, scanning electron microscope and energy dispersive x-ray spectrometer. The addition of $CeO_2$ as a promoter for Ni-0.2%YSZ (denoted as Ni-5%Ce-0.2%YSZ) resulted in the highest $CO_2$ methanation. It also showed catalytic activity at a low temperature($200^{\circ}C$). Following this, $ZrO_2$, $SiO_2$, $Al_2O_3$ and $TiO_2$ were added to Ni-5%Ce-0.2%YSZ to compare the $CO_2$ methanation, and the highest efficiency was found for. Ni-1%Ti-5%Ce-0.2%YSZ Then, the concentration of Ti was increased to 10% and the catalytic activity was estimated using seven different types of commercial $TiO_2$. In conclusion, ST-01 $TiO_2$ showed the highest efficiency for $CO_2$ methanation.

무알칼리 다성분 La2O3-Al2O3-SiO2 유리의 조성과 몇 가지 물성의 관계 (Composition-Some Properties Relationships of Non-Alkali Multi-component La2O3-Al2O3-SiO2 Glasses)

  • 강은태;양태영;황종희
    • 한국세라믹학회지
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    • 제48권2호
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    • pp.127-133
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    • 2011
  • Non-Alkali multicomponent $La_2O_3-Al_2O_3-SiO_2$ glasses has been designed and analyzed on the basis of a mixture design experiment with constraints. Fitted models for thermal expansion coefficient, glass transition temperature, Young's modulus, Shear modulus and density are as follows: ${\alpha}(/^{\circ}C)=8.41{\times}10^{-8}x_1+5.72{\times}10^{-7}x_2+2.13{\times}10^{-7}x_3+1.09{\times}10^{-7}x_4+1.10{\times}10^{-7}x_5+1.15{\times}10^{-7}x_6+2.72{\times}10^{-8}x_7+2.41{\times}10^{-7}x_8-1.08{\times}10^{-8}x_1x_2+4.28{\times}10^{-8}x_3x_7-2.02{\times}10^{-8}x_3x_8-1.60{\times}10^{-8}x_4x_5-2.71{\times}10^{-9}x_4x_8-2.19{\times}10^{-8}x_5x_6-3.89{\times}10^{-8}x_5x_7$ $T_g(^{\circ}C)=7.36x_1+15.35x_2+20.14x_3+8.97x_4+13.85x_5+4.22x_6+28.21x_7-1.44x_8-0.84x_2x_3-0.45x_2x_5-1.64x_2x_7+0.93x_3x_8-1.04x_5x_8-0.48x_6x_8$ $E(GPa)=2.04x_1+14.26x_2-1.22x_3-0.80x_4-2.26x_5-1.67x_6-1.27x_7+3.63x_8-0.24x_1x_2-0.07x_2x_8+0.14x_3x_6-0.68x_3x_8+0.29x_4x_5+1.28x_5x_8$ $G(GPa)=0.35x_1+1.78x_2+1.35x_3+1.87x_4+9.72x_5+29.16x_6-0.99x_7+3.60x_8-0.48x_1x_6-0.50x_2x_5+0.08x_3x_7-0.66x_3x_8+0.94x_5x_8$ ${\rho}(g/cm^3)=0.09x_1+0.51x_2-4.94{\times}10^{-3}x_3-0.03x_4+0.45x_5-0.07x_6-0.10x_7+0.07x_8-9.60{\times}10^{-3}x_1x_2-8.20{\times}10^{-3}x_1x_5+2.17{\times}10^{-3}x_3x_7-0.03x_3x_8+0.05x_5x_8$ The optimal glass composition similar to the thermal expansion coefficient of Si based on these fitted models is $65.53SiO_2{\cdot}25.00Al_2O_3{\cdot}5.00La_2O_3{\cdot}2.07ZrO_2{\cdot}0.70MgO{\cdot}1.70SrO$.