• 한국전기전자재료학회논문지
• /
• 제17권2호
• /
• pp.156-161
• /
• 2004

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. In order to compare the removal rate and non-uniformity as a function of oxidizer contents, we used alumina-based tungsten slurry and copper blanket wafers deposited by DC sputtering method. According to the CMP removal rates and particle size distribution, and the microstructures of surface layer by SEM image as a function or oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_2$O$_3$abrasive particles in CMP slurry.

• 한국세라믹학회지
• /
• 제39권1호
• /
• pp.51-56
• /
• 2002

고순도 알루미나 분말에 소결조제로서 초산 마그네슘과 질산 마그네슘을 1000ppm첨가하여 제작한 소결체에 대해서 소결조제로 사용한 MgO의 출발물질의 종류가 소결체 특성에 미치는 영향을 고찰하였다. 초산 마그네슘과 질산 마그네슘을 사용해서 제작한 소결체에 대해서 소결온도 1$600^{\circ}C$에서 상대밀도의 급격한 감소가 확인되었고 SEM관찰결과 소결조제로 사용한 두 종류의 출발물질을 첨가한 경우에 동일하게 소결체의 outer layer에서는 입성장 및 기공이 형성되어있고 inner layer에서는 알루미나 입계에 제2상의 존재가 관찰되었다. 이 시편의 EPMA을 이용한 원소분석결과로부터 소결온도 1$600^{\circ}C$에서 알루미나 입계에 존재하는 제2상은 Mg를 함유한 혼합물이라는 것을 알 수 있었다.

• 대한기계학회논문집B
• /
• 제29권9호
• /
• pp.979-987
• /
• 2005

Numerical simulations were performed at atmospheric pressure in order to understand the effect of additives on flame speed, flame temperature, radical concentrations, $NO_x$ formation, and heat flux in freely propagating $CH_4-Air$ flames. The additives were both carbon dioxide and hydrogen chloride which had a combination of physical and chemical behavior on hydrocarbon flame. In the flame established with the same mole of methane and additive, hydrogen chloride significantly contributed toward the reduction of flame speed, flame temperature, $NO_x$ formation and heat flux by the chemical effect, whereas carbon dioxide mainly did so by the physical effect. The impact of hydrogen chloride on the decrease of the radical concentration was about $1.4\~3.0$ times as large as that of carbon dioxide. Hydrogen chloride had higher effect on the reduction of $EI_{NO}$ than carbon dioxide because of the chemical effect of hydrogen chloride. The reaction, $OH+HCl{\rightarrow}Cl+H_2O$, played an important role in the heat flux from flames added by hydrogen chloride instead of the reaction, $OH+H_2{\rightarrow}H+H_2O$ which was an important reaction in hydrocarbon flames.

• 한국전기전자재료학회논문지
• /
• 제15권4호
• /
• pp.356-360
• /
• 2002

The piezoelectric properties of $0.05Pb(Al_{0.5}Nb_{0.5})O_3-0.95Pb(Zr_{0.52}Ti_{0.48})O_3+0.7wt%Nb_2O_5+o.5wt%MnO_2$ ceramics with the additive of BaCO$_3$were investigated. As the addition of BaCO$_3$increased from 0 to 0.4 wt%, the dielectric constant ($\epsilon^T _{33}$), piezoelectric constant ($d_33$), electromechanical coupling factor ($k_p$), and mechanical quality factor ($Q_m$) increased, while the dielectric loss ($tan\delta$) decreased. The highest piezoelectric and dielectric properties were observed at $1200^{\circ}C$ of the sintered temperature with 0.4 wt% of $BaCO_3$, and the properties of $d_33$, $k_p$, and $Q_m$ were 339 pC/N, 60% and 1754, respectively.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
• /
• pp.466.1-466.1
• /
• 2014

$TiO_2$는 저렴한 가격, 적절한 bandgap, 열적, 화학적, 생물학적 안정성 등으로 촉망받는 광촉매 물질이다. $TiO_2$는 rutile (tetragonal, space group: P42/mnm), anatse (tetragonal, space group: I41/amd), and brookite (orthorhombic, space group: Pbca )의 3가지 대표적인 결정구조를 가지고 있다. Rutile과 anatase는 1972년 Fujishima와 Honda가 $TiO_2$의 광촉매 특성을 발견 한 후로 아주 많은 연구가 되어왔다. 반면 brookite의 경우는 자연에 거의 존재하지 않으며, 합성방법도 어려워서 rutile과 anatase에 비해 많은 연구가 되지 않았다. 본 연구에서는 brookite를 포함한 다양한 $TiO_2$ 나노구조를 간단한 수열합성법으로 티타늄 호일 위에 합성하였다. 합성된 $TiO_2$는 반응 온도와 시간, additive의 농도에 따라서 sheet, tube, wire, pyramidal 의 4가지 morphologies를 가졌다. 이 다양한 morphologies은 SEM과 TEM으로 분석되었으며, 각 물질의 결정 구조는 XRD분석과 TEM의 SAED pattern 분석으로 sheet, tube, wire은 anatase, pyramidal 구조는 brookite라는 것이 확인 되었다. 위의 방법으로 합성된 각각의 $TiO_2$ 물질들을 working 전극으로, Pt와 Ag/AgCl을 reference와 counter 전극으로 만들어서 photoelectrochemical 특성을 측정해서 비교를 해보았을 때, brookite 물질이 anatase보다 더 좋은 photoelectrochemical 특성을 나타내는 것을 확인하였다.

• Nuclear Engineering and Technology
• /
• 제24권3호
• /
• pp.219-227
• /
• 1992

모의 붕산폐액을 석회와 반응시키고 반응기를 겸한 건조기에서 이를 건조시켜 얻어진 건조물의 특성을 살펴보았다. 반응과 건조후 생성된 건조물의 주된 화학종은 2CaO.B$_2$O$_3$로 확인되었다 건조물의 입도분포로부터 첨가제로서는 생석회가 소석회보다 우수함을 알 수 있었고, 건조물의 부착성 및 응집성을 고려하여 반응몰비(Ca/B)는 3/4인 조건으로 결정하였다. 수분함량이 8 wt% 정도까지 되도록 건조시켜도 건조물은 유동성이 있어 수송에 문제가 발생되지 않으며 건조시간의 단축도 가능하다.

• Nuclear Engineering and Technology
• /
• 제56권7호
• /
• pp.2767-2774
• /
• 2024

In this study, investment casting shell waste successfully utilized to produce cordierite/mullite/zircon composites. Green pellets, consisting of investment casting shell waste, alumina, and magnesia, were prepared and sintered at temperatures between 1250 and 1350 ℃. The influence of the sintering temperature on the crystalline phase composition, densification behavior, flexural strength, microstructure, and radiation shielding properties of the cordierite/mullite/zircon composites is investigated. Phase analysis showed that characteristic cordierite peaks appear at 1250 ℃, but the complete conversation of silica from investment casting shell waste into cordierite requires a sintering temperature of at least 1300 ℃. Notably, the cordierite/mullite/zircon composite sintered at 1350 ℃ exhibited a sixfold increase in flexural strength compared to the ceramic composite directly fabricated from investment casting shell waste at the same sintering temperature. Furthermore, the effect of Y₂O₃ addition on composites' radiation shielding properties is investigated. The results show that the Y₂O₃ addition improves densification behavior, enhancing the shielding capabilities of the composites against fast neutron and gamma radiation. Our findings suggest that the developed ceramic composites show significant potential for gamma-ray and neutron shielding applications.

• Korean Chemical Engineering Research
• /
• 제46권1호
• /
• pp.99-105
• /
• 2008

본 연구에서는 MLCC용 $BaTiO_3$에 첨가되는 $Cr_2O_3$와 $Mn_2O_3$의 나노코팅에 의한 core-shell 구조의 $BaTiO_3$ 분말을 제조하였다. 예비실험을 통해서 $KMnO_4$ 및 $K_2Cr_2O_4$ 그리고 sulfur를 사용하는 최적의 액상반응조건이 확립되었다. 본 연구에서는 두 첨가제 분말을 합성하였고 동일한 반응조건으로 두 첨가제를 $BaTiO_3$ 분말표면에 코팅하였다. 코팅은 one-step과 two-step의 두 방법으로 구분하여 시행하였고 그 결과를 분석 비교하였다. 결론적으로 말해서, $Cr_2O_3$와 $Mn_2O_3$의 두 첨가제는 용이한 반응조건에서 높은 수율로 우수한 품질의 코팅막을 형성하므로써, 첨가제 함량과 코팅막 특성의 정밀한 조절이 용이함을 보여주었다.

• 전기학회논문지
• /
• 제57권11호
• /
• pp.2015-2022
• /
• 2008

The effect of content of $Al_2O_3+Y_2O_3$ sintering additives on the densification behavior, mechanical and electrical properties of the pressureless-sintered $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressurless-sintered for 2 hours at 1,700[$^{\circ}C$] temperatures with an addition of $Al_2O_3+Y_2O_3$(6 : 4 mixture of $Al_2O_3$ and $Y_2O_3$) as a sintering aid in the range of $8\;{\sim}\;20$[wt%]. Phase analysis of $SiC-ZrB_2$ composites by XRD revealed mostly of $\alpha$-SiC(6H), $ZrB_2$ and In Situ YAG($Al_5Y_3O_{12}$). The relative density, flexural strength, Young's modulus and vicker's hardness showed the highest value of 89.02[%], 81.58[MPa], 31.44[GPa] and 1.34[GPa] for $SiC-ZrB_2$ composites added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at room temperature respectively. Abnormal grain growth takes place during phase transformation from $\beta$-SiC into $\alpha$-SiC was correlated with In Situ YAG phase by reaction between $Al_2O_3$ and $Y_2O_3$ additive during sintering. The electrical resistivity showed the lowest value of $3.l4{\times}10^{-2}{\Omega}{\cdot}cm$ for $SiC-ZrB_2$ composite added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at 700[$^{\circ}C$]. The electrical resistivity of the $SiC-TiB_2$ and $SiC-ZrB_2$ composite was all negative temperature coefficient resistance (NTCR) in the temperature ranges from room temperature to 700[$^{\circ}C$]. Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites.

• 한국세라믹학회지
• /
• 제19권3호
• /
• pp.187-192
• /
• 1982

N.B.R. latex was used as the admixture in order to improve the various properties of gypsum plaster which is widely used as the construction material. The influences of N.B.R. latex on the hydration of gypsum plaster were studied. The results obtained are summerized as follows; 1. The water/gypsum plaster ratio is decreased wth increasing amounts of surfactant (P.O.E. Nonyl Phenol Ether) as the additive. 2. It is the pore of large size (${\gg}$7500A) that is mainly decreased with increasing amounts of surfactant. 3. With the small amount of surfactant as the additive, the hydration was slightly retarded, but was gradually recovered with increasing amounts of surfactant, and their heat of liberation after 20 hours were nearly same.