• Electrical & Electronic Materials
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• v.5 no.4
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• pp.421-429
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• 1992

본 연구에서는 (Sr.Pb)TiO$_{3}$계 세라믹을 고압용 세라믹 캐패시터로 응용하기 위하여 일반적인 세라믹 소성법으로 제작하였으며 Bi$_{2}$O$_{3}$. 3TiO$_{2}$의 첨가량에 따른 전기전도 및 DC 절연파괴 특성을 조사하였다. 전도전류는 측정온도의 상승과 Bi$_{2}$O$_{3}$.3TiO$_{2}$의 첨가량이 증가함에 따라 상승하였다. 실온에서 전도전류는 전계에 따라 3영역으로 나누어졌다. 전계 15[kV/cm]이하의 영역에서는 오음의 법칙이 성립하는 이온전도가 나타났으며 전계 15[kV/cm]~40[kV/cm]인 영역에서는 전계에 강요된 강유전성 분극의 반전게에 기인하여 전류의 포화현상이 나타났다. 전계 40[kV/cm] 이상의 영역에서는 공간전하제한전류에 관련된 차일드법칙이 성립하였다. DC 절연파괴 강도는 측정온도의 상승과 Bi$_{2}$O$_{3}$.3TiO$_{2}$의 첨가량이 증가함에 따라 감소하였다. 온도 100[.deg.C] 이하에서는 전자적파괴가 일어났으며 100[.deg.C] 이상에서는 주울열과 유전손실에 의한 열적파괴가 나타났다.

• Korean Journal of Materials Research
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• v.21 no.2
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• pp.83-88
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• 2011

Nano-technology is a super microscopic technology to deal with structures of 100 nm or smaller. This technology also involves the developing of $TiO_2$ materials or $TiO_2$ devices within that size. The aim of the present paper is to synthesize $WO_x$ doped nano-$TiO_2$ by the Sonochemistry method and to evaluate the effect of different percentages (0.5-5 wt%) of tungsten oxide load on $TiO_2$ in methylene blue (MB) elimination. The samples were characterized using such different techniques as X-ray diffraction (XRD), TEM, SEM, and UV-VIS absorption spectra. The photo-catalytic activity of tungsten oxide doped $TiO_2$ was evaluated through the elimination of methylene blue using UV-irradiation (315-400nm). The best result was found with 5 wt% $WO_x$ doped $TiO_2$. It has been confirmed that $WO_x-TiO_2$ could be excited by visible light (E<3.2 eV) and that the recombination rate of electrons/holes in $WO_x-TiO_2$ declined due to the existence of $WO_x$ doped in $TiO_2$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.6
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• pp.272-278
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• 2003

$Bi_4Ti_3O_{12}$ (BIT) and $(Bi_{3.25}La_{0.75})(Ti_{2.97}V_{0.03})O_{12}$ (BLTV) thin films were deposited on ITO/glass substrates by metal organic chemical vapor deposition (MOCVD) using ultrasonic spraying. After deposition of the films in oxygen atmosphere for 30 min, the films were heated by rapid thermal annealing (RTA) method, especially direct insertion, at various temperatures. The films were investigated on phase formation temperature, microstructure and electrical properties. From x-ray diffraction (XRD) patterns, the perovskite phase formation temperature of BLTV thin film was about $600^{\circ}C$ which was lower than that of BIT, $650^{\circ}C$. The leakage current of the BLTV thin film was measured to be $1.52\times 10^{-9}$A/$cm^2$ at an applied voltage of 1 V. The remanent polarization (Pr) and coercive field (Ec) values of the BLTV film deposited at $650^{\circ}C$ were $5.6\muC/cm^2$ and 96.5 kV/cm, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.161-161
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• 2013

Two-dimensional electron gas (2DEG) has been investigated at the heterointerface between two insulating dielectric perovskite oxides, $LaAlO_3$ (LAO)/$SrTiO_3$ (STO). Properties of the 2DEG have attracted an enormous interest in condensed matter physics due to multifunctional properties such as the coexistence of ferromagnetism and superconductivity, as well as the high electron mobility. Here, we have grown $Ta_2O_5$ thin films using pulsed laser deposition on $SrTiO_3$ substrate to investigate the electric properties of the $Ta_2O_5$/STO heterointerface. Our research reveal that the non-polar $Ta_2O_5$/$TiO_2$ heterointerface favors the formation of 2DEG similar to that at the LAO/STO heterointerface. The metallic behavior was found in this heterointerface with the current about $10{\sim}100{\mu}A$ at 5 V by using conventional I-V measurements, when the $Ta_20_5$ film thickness reaches over critical thickness, $d_c{\simeq}2uc$. The finding that electrons was localized at $Ta_2O_5$/STO heterointerface have attracted to be strong and new candidate for nanoscale oxide device applications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.6
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• pp.436-441
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• 1998

$Pt/SrTiO_3/Pb_x(Zr_{0.52}, Ti_{0.48})O_3/SrTiO_3/Si$ structure was prepared by rf-magnetron sputtering method for use in nondestructive read out ferroelectric RAM(NDRO-FEAM). PBx(Zr_{0.52}Ti_{0.48})O_3}$(PZT) and $SrTiO_3$(STO) films were deposited respectively at the temperatures of $300^{\circ}C and 500^{\circ}C$on p-Si(100) substrate. The role of the STO film as a buffer layer between the PZT film and the Si substrate was studied using X-ray diffraction (XRD), Auger electron spectroscopy (ASE), and scanning electron microscope(SEM). Structural analysis on the interfaces was carried out using a cross sectional transmission electron microscope(TEM). For PZT/Si structure, mostly Pb deficient pyrochlore phase was formed due to the serious diffusion of Pb into the Si substrate. On the other hand, for STO/PZT/STO/Si structure, the PZT film had perovskite phase and larger grain size with a little Pb interdiffusion. the interfaces of the PZT and the STO film, of the STO film and the interface layer and $SiO_2$, and of the $SiO_2$ and the Si substate had a good flatness. Across sectional TEM image showed the existence of an amorphous layer and $SiO_2$ with 7nm thickness between the STO film and the Si substrate. The electrical properties of MIFIS structure was characterized by C-V and I-V measurements. By 1MHz C-V characteristics Pt/STO(25nm)/PZT(160nm)/STO(25nm)/Si structure, memory window was about 1.2 V for and applied voltage of 5 V. Memory window increased by increasing the applied voltage and maximum voltage of memory window was 2 V for V applied. Memory window decreased by decreasing PZT film thickness to 110nm. Typical leakage current was abour $10{-8}$ A/cm for an applied voltage of 5 V.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.71-71
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• 2000

본 연구에서는 차세대 마이크로파 유전체 소자로서의 응용을 목적으로 펄스 레이저 방식에 의하여 증착된 MgTiO3 박막의 전기적 특성을 종합적으로 연구 분석하였다. 이를 바탕으로 MgTiO3 박막의 유전손실 등과 같은 열화를 야기시키는 박막 내부 또는 박막과 기판간의 결함의 특성을 파악하여 열화 메카니즘을 분석하였다. MgTiO3는 마이크로파 영역에서의 우수한 유전특성과 같은 낮은 유전손실을 가지며, 온도 안정성 또한 우수하다. 현재까지 벌크 세라믹 MgTiO3 의 응용 광범위하게 연구되어 왔으나 박막의 제조공정 및 전기적 특성 분석은 미흡한 형편이다. 따라서 벌크 세라믹과는 특성이 상이한 박막의 전기적 특성분석 및 연구가 필요하다. 분석을 위한 소자의 기본 구조로서 Metal-Insulator-Semiconductor(MIS) 구조를 채택하였다. MgTiO3 박막을 증착하기 위한 기판으로는 n형 Si(100)기판과 p형 Si(100)기판을 사용하였고, Si 기판 위에 급속 열처리기 (RTP)를 이용하여 SiO2를 ~100 두께로 성장시킨 것과 성장시키지 않은 것으로 구분하여 제작하였다. MgTiO3 박막은 펄스 레이저 증착 방식(PLD)에 의하여 약 2500 두께로 증착되었으며, 200mTorr 압력의 산소 분위기 하에서 기판의 온도를 40$0^{\circ}C$~55$0^{\circ}C$까지 5$0^{\circ}C$간격으로 변화시키며 제작하였다. 상하부의 전극 금속으로는 Al을 이용하였으며, 열증발 증착기로 증착하였다. 증착된 MgTiO3 박막의 결정구조를 확인하기 위하여 XRD 분석을 수행하였으며, 박막의 전기적 특성을 분석하기 위해 Boonton7200 C-V 측정기와 HP4140P를 이용한 경우에는 C-V 곡선에 이력현상이 나타났으나, MgTiO3/SiO2를 이용한 경우에는 이력현상이 나타나지 않았고, 유전율은 감소하는 것으로 나타났다. I-V 측정 결과, 절연층으로 MgTiO3/SiO2를 이용한 경우에는 MgTiO3만을 절연층으로 사용한 경우에 비해 동일한 전계에서 낮은 누설전류 값을 가짐을 알 수 있었다. 또한 박막의 증착온도가 증가함에 따라서 C-V 곡선의 위치가 양의 방향으로 이동함을 확인하였다. 위의 현상은 기판의 종류에 관계없이 발생하는 것으로 보아 벌크 또는 계면에 존재하는 결함에 의한 것으로 추정된다. 현재 C-V 곡선의 이동 원인과 I-V 곡선의 누설전류 메카니즘을 분석 중에 있으며 그 결과를 학회에서 발표할 예정이다.

• Korean Chemical Engineering Research
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• v.51 no.2
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• pp.163-170
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• 2013

Selective catalytic reduction of $NO_x$ by $NH_3$ ($NH_3$-SCR) over $V_2O_5/TiO_2$-based catalysts is recently reported to be an anthropogenic emitter of $N_2O$ that is a global warming gas with a global warming potential of 310. Therefore, this review will get a touch on significance of some parameters regarding $N_2O$ formation in the $deNO_xing$ reaction for fossil fuels-fired power plants applications. The $N_2O$ production in $NH_3$-SCR reaction with such catalysts occurs via side reactions between $NO_x$ and $NH_3$ in addition to $NH_3$ oxidation, and the extent of these undesired reactions depends strongly on the loadings of $V_2O_5$ as a primary active component and the promoter as a secondary one ($WO_3$ and $MoO_3$) in the SCR catalysts, the feed and operating variables such as reaction temperature, $NO_2/NO_x$ ratio, oxygen concentration, gas hourly space velocity, water content and thermal excursion, and the physical and chemical histories of the catalysts on site. Although all these parameters are associated with the $N_2O$ formation in $deNO_xing$ reaction, details of some of them have been discussed and a better way of suppressing the $N_2O$ production in commercial SCR plants has been proposed.

• Journal of the Korean Applied Science and Technology
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• v.30 no.3
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• pp.451-460
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• 2013

NOx from the thermal power plants are NO and $NO_2$. This work investigated the chemical/physical characteristics and SCR efficiency of newly prepared catalysts including tungsten ($WO_3$), molybdenum ($MoO_3$) and antimony ($SbO_3$) based on vanadia($V_2O_5$) over titania($TiO_2$). As a result of the examination, the surface area of the catalysts promoted with additional metals was larger and the de-NOx efficiency also was enhanced with temperature. The most efficient catalytst was $V_2O_5/TiO_2-WO_3$(10%) at $200^{\circ}C$. Such a high efficiency could contribute to reduce the ammonia slip.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.100-105
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• 1992

Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) analyses have been performed on double-structured Au/V and Au/Ti thin films after heat treatment at 500$^{\circ}$C in air. V- and Tiunderlays sandwiched between gold thin films and SiOz substrates form oxides on the free surface of gold films during the heat treatment. The chemical compositions of the oxides were identified as V205 and TiOz in Au/V and Au/Ti thin films, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.687-690
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• 2004

Fabrication and characterization of dye-sensitized TiO2 solar cells(DSSC) consisting of spray-coated TiO2 electrode, an electrolyte containing I-/I3- redox couple, and a Pt-coated counter electrode carried out, using mainly FE-SEM and solar simulator. Also, effect of rapid thermal annealing(RTA) temperatue on I-V curves of DSSCS consisting of approximately 10m thickness and $5{\times}5mm2$ active area. No significant difference in the apparent size of TiO2 clusters was observed with increasing RTA temperature. Also, an open circuit voltage(Voc) of approximately 0.70V and a short-circuit photocurrent(Jsc) of 8 to 12mA/cm2 were observed in the TiO2 solar cell. With increasing RTA temperature upto 550oC, photocurrent density of dye-sensitized solar cells was enhanced, leading to enhancing the efficiency of dye-sensitized solar cells having Pt-electroplated counter electrode.