• 제목/요약/키워드: $Ti_{1-x}Nb_xO_2$

검색결과 226건 처리시간 0.027초

SBN 박막의 결정화 및 전기적 특성에 관한 씨앗층 두께의 영향 (Effect of Seed-layer thickness on the Crystallization and Electric Properties of SBN Thin Films.)

  • 장재훈;이동근;이희영;조상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.271-274
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    • 2003
  • [ $Sr_xBa_{1-x}Nb_2O_6$ ] (SBN, $0.25{\leq}x{\leq}0.75$) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient and a nonlinear electro-optic coefficient value. In spite of its advantages, SBN has not been investigated well compared to other ferroelectric materials with perovskite structure. In this study, SBN thin film was manufactured by ion beam sputtering technique using the prepared SBN target in $Ar/O_2$ atmosphere. SBN30 thin films of different thickness were pre-deposited as a seed layer on $Pt(100)/TiO_2/SiO_2/Si$ substrate followed by SBN60 deposition up to $4500\;{\AA}$ in thickness. As-deposited SBN60/SBN30 layer was heat-treated at different temperatures of 650, 700, 750, and $800\;^{\circ}C$ in air, respectively, The crystallinity and orientation behavior as well as electric properties of SBN60/SBN30 multi-layer were examined. The deposited layer was uniform and the orientation was shown primarily along (001) plane from XRD pattern. There was difference in the crystal structure with heat-treatment temperature, and the electric properties depended on the heating temperature and the seed-layer thickness. In electric properties of Pt/SBN60/SBN30/Pt thin film capacitor prepared, the remnant polarization (2Pr) value was $15\;{\mu}C/cm^2$, the coercive field (Ec) 65 kV/cm, and the dielectric constant 1492, respectively.

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유기금속열분해 방법으로 제작된 NKN 박막의 강유전특성 (Ferroelectric properties of NKN Thin Films prepared by Metal Organic Decomposition method)

  • 김경태;김창일;이성갑
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1394-1395
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    • 2006
  • $(Na_{0.5}LaK_{0.5})NbO_3$ (NKN) thin films were fabricated by the alkoxide-based MOD method. NKN stock solutions were made spin-coated onto the Pt/Ti/$SiO_2$/Si substrate. The structural properties of the NKN thin films examined by x-ray diffraction. The perovskite phase was obtained as a function of the annealing temperature from $550^{\circ}C$ to $700^{\circ}C$ for 1h. The crystallinity and grain size of the NKN thin films increased with increasing annealing temperature. The dielectric constants and loss of the NKN thin films annealed at $650^{\circ}C$ ($t_{eq}$=2.35 nm) showed 323 and 0.025.

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투광성 Ba(La1/2Nb1/2)O3-PbZrO3-PbTiO3세라믹의 강유전 및 전기광학특성에 관한 연구 (A Study on the Ferroelectic and Electrooptical Properties of the Transparent Ba(LaS11/2TNbS11/2T)OS13T-PbZrOS13T-PbTiOS13T Ceramics)

  • 김준수;류기원;박영희;박창엽
    • 대한전기학회논문지
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    • 제41권8호
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    • pp.858-868
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    • 1992
  • 0.085Ba(LaS11/2TNbS11/2T)OS13T-0.915Pb(ZrS1yTTiS11-yT)OS13T (0.45$\leq$y$\leq$0.65) transparent electrooptic ceramics were fabricated by two-stage sintering method. The structural, ferroelectric and electrooptic properties were investigated varying composition and second sintering time. Also the possibility of application to electrooptic device was studied. If we increase the PbZrOS13T contents, dielectric constants were increased and Curie temperature was decreased. In the composition of 0.55[mol] PbZrOS13T, electromechanical coupling factor and piezoelectric charge constant were the highest values of 43[%] and 173x10S0-12T[C/N], respectively. Mechanical quality factors were decreased with the increasing PbZrOS13T contents. Light transmittance was increased with wavelength when measured from 300[nm] to 900[nm], and with PbZrOS13T contents in the range of 0.50[mol]-0.65[mol], and had the highest value of 67[%] in the composition of 0.65[mol] PbZrOS13T. From the results of ferroelectric hysteresis loop and transmitted light intensity with electric field, the specimens with compositions of 0.65,0.60,0.55[mol] PbZrOS13T were applicable to electrooptic memory device and those with compositions of 0.50,0.45[mol] PbZrOS13T were applicable to linear electrooptic device.

압전 스피커 응용을 위한 PSN-PZT계 세라믹스의 미세구조 분석 및 전기적 특성 평가 (Microstructures and Electrical Properties of PSN-PZT Ceramics for Piezoelectric Speaker)

  • 김성진;권순용
    • 한국전기전자재료학회논문지
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    • 제32권2호
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    • pp.110-115
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    • 2019
  • $Pb(Sb_{0.5}Nb_{0.5})_x(Zr_{0.51}Ti_{0.49})_{1-x}O_3$ (abbreviation: PSN-PZT) ceramics were synthesized, using conventional bulk ceramic processing technology, with various PSN doping contents. The maximum density of PSN-PZT was 97% of the theoretical density in the samples sintered at $1,250^{\circ}C$. The maximum values of the piezoelectric properties achieved using the conventional processes were: $k_p$ of 0.625, $d_{33}$ of 531 pC/N, and $g_{33}$ of $33mV{\cdot}m/N$. Finally, we fabricated a piezo-speaker with the optimized PSN-PZT ceramics. The SPL of the speaker was measured at a distance of 1 m, with a driving voltage of $40V_{rms}$ in the frequency range of ~300 Hz to 9 kHz. The measured $SPL_{max}$ was at a very high level (95 dB), which was superior in quality in comparison with those of other commercial products.

하소온도가 PZT의 소결특성에 미치는 영향 (Effect of Calcining Temperature on Sintering Characteristics of PZT)

  • 정수태;이우일;조상희
    • 한국세라믹학회지
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    • 제22권1호
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    • pp.40-46
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    • 1985
  • The effect of calcining temperature ranged from $700^{\circ}C$ to 110$0^{\circ}C$ on sintering characteristics of morphotropic $Pb(Zr_{0.53}Ti_{0.47})O_3 doped with $Nb_2O_5$ has been investigated. The ratio of sintered grain size to calcined grain size decreased as the calcining temperature increased. The hardness as well as the sintered density of the samples reached a maximum at about 90$0^{\circ}C$. The X-ray diffraction pattern of the sintered sample showed both tetragonal and rhombohedral phases. The tetragonal phases intensity increased with the calcining temperature going through a maximum at about 90$0^{\circ}C$ while the rhombohedral phase intensity remained uneffected. The both intensity were about the same at 90$0^{\circ}C$ The dielectric constant of the sintered samples reached a maximum um while the dielectric dissipation factor showed a minimum at the calcining temperature of about 100$0^{\circ}C$.

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첨가제에 의한 PWM-PSN-PZT계 세라믹의 유전특성에 관한 연구 (A study on the dielectric characteristics of PWM-PSN-PZT ceramics with additive)

  • 신혜경;송현재;김유신;배선기
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.107-109
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    • 2003
  • This paper was to measure the structure, piezoelectric properties of $0.03Pb(Mg_{0.5}W_{0.5})O_3$ - $0.12Pb(Sb_{0.5}Nb_{0.5})O_3$ - $0.85Pb(Zr_{0.52}Ti_{0.48})O_3$ + $0.5[wt%]MnO_2$ ceramics dropped with additive CuO after manufacturing the specimens with a general method. It is shown that X-ray diffraction pattern variation of lines (211) have tendency to move minutely by addition of additive CuO. According to dropping with Cu, the dielectric constant at 20[$^{\circ}C$] reduced to CuO 3.0[wt%]. In case of sintering at 1050[$^{\circ}C$], dielectric constant was maximum value 623.59 at CuO 1.0[wt%]. Dielectric loss was maximum value 2.7[%] at Cu 2.0[wt%] in case of sintering at 1050[$^{\circ}C$].

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PSN-PZT계 세라믹스를 이용한 고출력 압전 트랜스포머의 전기적 특성 (Electrical Characteristics of the High Power Piezoelectric transformer Using PSN-PZT system ceramics)

  • 이용우;류주현;윤광희;정회승;서성재;김종선
    • 한국전기전자재료학회논문지
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    • 제13권4호
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    • pp.286-293
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    • 2000
  • In this paper we investigated the structural dielectric and piezoelectric properties of 0.03Pb(Sb$\_$1/2//Nb$\_$1/2/)-0.97Pb(Zr$\_$0.495//Ti$\_$0.505/)O$_3$+0.5 wt% excess PbO + wt% MnO(X=0, 0.1, 0.3, 0.5, 0.7) ceramics to develop the high-power piezoelectric transformer. The piezoelectric transformers with dimension of 27.5$\times$27.5$\times$2.5[mm$^3$]were fabricated and their electrical properties were measured. Maxima of piezoelectric properties such as electro-mechanical coupling factor of 0.534 and mechanical quality factor of 1487 were obtained for the PSN-PZT with 0.3wt% MnO. voltage step-up ratios of piezoelectric transformers at 500[Ω]and no load were 0.78, 12.82, respectively. The maximum efficiency of piezoelectric transformer was 98.6% at 800[Ω]. While the 14W fluorescent lamp were driven by the piezoelectric transformer for more than 20[min], increment of temperature in the piezoelectric transformer was 7[$\^{C}$].

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SHAPE EFFECT ON PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR

  • Wee, S. B.;Jeong, S. J.;Song, J. S.
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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    • pp.163-168
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    • 2003
  • In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

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저온소결 세라믹을 이용한 밴더형 적층 액츄에이터의 제작 (Bending Mode Multilayer Actuator Using Low Temperature Sintering Piezoelectric Ceramics)

  • 이주영;김상종;강종윤;김현재;이상렬;윤석진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.68-69
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    • 2005
  • Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

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입자의 크기가 PZT 세라믹스의 열화현상에 미치는 영향 (The Effects of Grain Size on the Degradation Phenomena of PZT Ceramics)

  • 정우환;김진호;조상희
    • 한국세라믹학회지
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    • 제29권1호
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    • pp.65-73
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    • 1992
  • The effect of grain size on the time-dependent piezoelectrice degradation of a poled PZT of MPB composition Pb0.988Sr0.012 (Zr0.52Ti0.48)O3 with 2.4 mol% of Nb2O5 was studied, and the degradation mechanism was discussed. Changes in the internal bias field and the internal stress both responsible for the time-dependent degradation of poled PZT were examined by the polarization reveral technique, XRD and Vickers indentation, respectively. The piezoelectric degradation increased with increasing time and grain size, and the internal bias field due to space charge diffusion decreased with increasing grain size of poled PZT. The internal bias field, however, was almost insensitive to the degradation time regardless of the grain size. On the other hand, both the x-ray diffraction peak intensity ratio of (002) to (200) and the fracture behavior including the crack propagation support that the ferroelectric domain rearrangement of larger grain size showed rapid relaxation of the internal stress compared with smaller one, which is thought the origin of the larger piezoelectric degradation in the former. In conclusion, the contribution of space charge diffusion on the piezoelectric degradation of PZT is strongly dependent on both the grain size and the composition. Thus, the relaxation of internal stress due to the ferroelectric domain rearrangement as well as the amount and time-dependence of the internal bias field due to space charge diffusion should be considered simultaneously in the degradation mechanism of PZT.

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